12/21/2010	9:33:44 AM	Main Vac valve closed
12/21/2010	9:33:45 AM	Bypass valve closed
12/21/2010	9:33:50 AM	Bypass valve opened
12/21/2010	9:33:51 AM	Main Vac valve opened
12/21/2010	9:35:12 AM	Recipe started at 9:35 AM
12/21/2010	9:35:12 AM	Helium valve closed
12/21/2010	9:35:12 AM	BCl3 valve closed
12/21/2010	9:35:12 AM	PH3 valve closed
12/21/2010	9:35:12 AM	SiCl4 pre valve closed
12/21/2010	9:35:12 AM	SiCl4 post valve closed
12/21/2010	9:35:12 AM	Main Vac valve closed
12/21/2010	9:35:12 AM	Bypass valve closed
12/21/2010	9:35:12 AM	Bubbler valve closed
12/21/2010	9:35:12 AM	H2 valve opened
12/21/2010	9:35:12 AM	Helium MFC set to  0.000000
12/21/2010	9:35:12 AM	H2 MFC set to  500.000000
12/21/2010	9:35:12 AM	BCl3 MFC set to  0.000000
12/21/2010	9:35:12 AM	PHl3 MFC set to  0.000000
12/21/2010	9:35:12 AM	SiCl4 MFC set to  0.000000
12/21/2010	9:35:12 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:35:12 AM	Tube furnace set to 200
12/21/2010	9:36:33 AM	Helium valve closed
12/21/2010	9:36:33 AM	BCl3 valve closed
12/21/2010	9:36:33 AM	PH3 valve closed
12/21/2010	9:36:33 AM	SiCl4 pre valve closed
12/21/2010	9:36:33 AM	SiCl4 post valve closed
12/21/2010	9:36:33 AM	Main Vac valve closed
12/21/2010	9:36:33 AM	Bypass valve closed
12/21/2010	9:36:33 AM	H2 valve opened
12/21/2010	9:36:33 AM	Bubbler valve opened
12/21/2010	9:36:33 AM	Helium MFC set to  0.000000
12/21/2010	9:36:33 AM	H2 MFC set to  400.000000
12/21/2010	9:36:33 AM	BCl3 MFC set to  0.000000
12/21/2010	9:36:33 AM	PHl3 MFC set to  0.000000
12/21/2010	9:36:33 AM	SiCl4 MFC set to  0.000000
12/21/2010	9:36:33 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:36:33 AM	Tube furnace set to 1001
12/21/2010	9:57:33 AM	Helium valve closed
12/21/2010	9:57:33 AM	BCl3 valve closed
12/21/2010	9:57:33 AM	PH3 valve closed
12/21/2010	9:57:33 AM	Main Vac valve closed
12/21/2010	9:57:33 AM	Bypass valve closed
12/21/2010	9:57:33 AM	H2 valve opened
12/21/2010	9:57:33 AM	SiCl4 pre valve opened
12/21/2010	9:57:33 AM	SiCl4 post valve opened
12/21/2010	9:57:33 AM	Bubbler valve opened
12/21/2010	9:57:33 AM	Helium MFC set to  0.000000
12/21/2010	9:57:33 AM	H2 MFC set to  400.000000
12/21/2010	9:57:33 AM	BCl3 MFC set to  0.000000
12/21/2010	9:57:33 AM	PHl3 MFC set to  0.000000
12/21/2010	9:57:33 AM	SiCl4 MFC set to  50.000000
12/21/2010	9:57:33 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:57:34 AM	Tube furnace set to 1000
12/21/2010	9:57:44 AM	Helium valve closed
12/21/2010	9:57:44 AM	PH3 valve closed
12/21/2010	9:57:44 AM	Main Vac valve closed
12/21/2010	9:57:44 AM	Bypass valve closed
12/21/2010	9:57:44 AM	H2 valve opened
12/21/2010	9:57:44 AM	BCl3 valve opened
12/21/2010	9:57:44 AM	SiCl4 pre valve opened
12/21/2010	9:57:44 AM	SiCl4 post valve opened
12/21/2010	9:57:44 AM	Bubbler valve opened
12/21/2010	9:57:44 AM	Helium MFC set to  0.000000
12/21/2010	9:57:44 AM	H2 MFC set to  500.000000
12/21/2010	9:57:44 AM	BCl3 MFC set to  12.000000
12/21/2010	9:57:44 AM	PHl3 MFC set to  0.000000
12/21/2010	9:57:44 AM	SiCl4 MFC set to  50.000000
12/21/2010	9:57:44 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:57:44 AM	Tube furnace set to 1000
12/21/2010	10:12:44 AM	H2 valve closed
12/21/2010	10:12:44 AM	BCl3 valve closed
12/21/2010	10:12:44 AM	PH3 valve closed
12/21/2010	10:12:44 AM	SiCl4 pre valve closed
12/21/2010	10:12:44 AM	SiCl4 post valve closed
12/21/2010	10:12:44 AM	Main Vac valve closed
12/21/2010	10:12:44 AM	Bypass valve closed
12/21/2010	10:12:44 AM	Helium valve opened
12/21/2010	10:12:44 AM	Bubbler valve opened
12/21/2010	10:12:44 AM	Helium MFC set to  400.000000
12/21/2010	10:12:44 AM	H2 MFC set to  0.000000
12/21/2010	10:12:44 AM	BCl3 MFC set to  0.000000
12/21/2010	10:12:44 AM	PHl3 MFC set to  0.000000
12/21/2010	10:12:44 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:12:44 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:12:44 AM	Tube furnace set to 0
12/21/2010	10:32:44 AM	Helium valve closed
12/21/2010	10:32:44 AM	H2 valve closed
12/21/2010	10:32:44 AM	BCl3 valve closed
12/21/2010	10:32:44 AM	PH3 valve closed
12/21/2010	10:32:44 AM	SiCl4 pre valve closed
12/21/2010	10:32:44 AM	SiCl4 post valve closed
12/21/2010	10:32:44 AM	Main Vac valve closed
12/21/2010	10:32:44 AM	Bypass valve closed
12/21/2010	10:32:44 AM	Bubbler valve closed
12/21/2010	10:32:44 AM	Helium MFC set to  0.000000
12/21/2010	10:32:44 AM	H2 MFC set to  0.000000
12/21/2010	10:32:44 AM	BCl3 MFC set to  0.000000
12/21/2010	10:32:44 AM	PHl3 MFC set to  0.000000
12/21/2010	10:32:44 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:32:44 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:32:44 AM	Tube furnace set to 0
12/21/2010	10:32:44 AM	Run finished at 10:32 AM
12/21/2010	10:33:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:33:47 AM	Recipe started at 10:33 AM
12/21/2010	10:33:47 AM	Helium valve closed
12/21/2010	10:33:47 AM	H2 valve closed
12/21/2010	10:33:47 AM	BCl3 valve closed
12/21/2010	10:33:47 AM	PH3 valve closed
12/21/2010	10:33:47 AM	SiCl4 pre valve closed
12/21/2010	10:33:47 AM	SiCl4 post valve closed
12/21/2010	10:33:47 AM	Main Vac valve closed
12/21/2010	10:33:47 AM	Bubbler valve closed
12/21/2010	10:33:47 AM	Bypass valve opened
12/21/2010	10:33:47 AM	Helium MFC set to  0.000000
12/21/2010	10:33:47 AM	H2 MFC set to  0.000000
12/21/2010	10:33:47 AM	BCl3 MFC set to  0.000000
12/21/2010	10:33:47 AM	PHl3 MFC set to  0.000000
12/21/2010	10:33:47 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:33:47 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:33:47 AM	Tube furnace set to 0
12/21/2010	10:33:50 AM	Run aborted at 10:33 AM
12/21/2010	10:33:50 AM	Helium valve closed
12/21/2010	10:33:50 AM	H2 valve closed
12/21/2010	10:33:50 AM	BCl3 valve closed
12/21/2010	10:33:50 AM	PH3 valve closed
12/21/2010	10:33:50 AM	SiCl4 pre valve closed
12/21/2010	10:33:50 AM	SiCl4 post valve closed
12/21/2010	10:33:50 AM	Bypass valve closed
12/21/2010	10:33:50 AM	Main Vac valve closed
12/21/2010	10:33:50 AM	Bubbler valve closed
12/21/2010	10:33:50 AM	Helium MFC set to  0.000000
12/21/2010	10:33:50 AM	H2 MFC set to  0.000000
12/21/2010	10:33:50 AM	BCl3 MFC set to  0.000000
12/21/2010	10:33:50 AM	PHl3 MFC set to  0.000000
12/21/2010	10:33:50 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:33:50 AM	Tube furnace set to 0
12/21/2010	10:33:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:33:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	10:33:53 AM	Recipe started at 10:33 AM
12/21/2010	10:33:54 AM	H2 valve closed
12/21/2010	10:33:54 AM	BCl3 valve closed
12/21/2010	10:33:54 AM	PH3 valve closed
12/21/2010	10:33:54 AM	SiCl4 pre valve closed
12/21/2010	10:33:54 AM	SiCl4 post valve closed
12/21/2010	10:33:54 AM	Main Vac valve closed
12/21/2010	10:33:54 AM	Bypass valve closed
12/21/2010	10:33:54 AM	Bubbler valve closed
12/21/2010	10:33:54 AM	Helium valve opened
12/21/2010	10:33:54 AM	Helium MFC set to  500.000000
12/21/2010	10:33:54 AM	H2 MFC set to  0.000000
12/21/2010	10:33:54 AM	BCl3 MFC set to  0.000000
12/21/2010	10:33:54 AM	PHl3 MFC set to  0.000000
12/21/2010	10:33:54 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:33:54 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:33:54 AM	Tube furnace set to 0
12/21/2010	10:34:19 AM	Helium valve closed
12/21/2010	10:34:19 AM	H2 valve closed
12/21/2010	10:34:19 AM	BCl3 valve closed
12/21/2010	10:34:19 AM	PH3 valve closed
12/21/2010	10:34:19 AM	SiCl4 pre valve closed
12/21/2010	10:34:19 AM	SiCl4 post valve closed
12/21/2010	10:34:19 AM	Main Vac valve closed
12/21/2010	10:34:19 AM	Bypass valve closed
12/21/2010	10:34:19 AM	Bubbler valve closed
12/21/2010	10:34:19 AM	Helium MFC set to  0.000000
12/21/2010	10:34:19 AM	H2 MFC set to  0.000000
12/21/2010	10:34:19 AM	BCl3 MFC set to  0.000000
12/21/2010	10:34:19 AM	PHl3 MFC set to  0.000000
12/21/2010	10:34:19 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:34:19 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:34:19 AM	Tube furnace set to 0
12/21/2010	10:34:19 AM	Run finished at 10:34 AM
12/21/2010	10:34:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	10:36:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	10:36:31 AM	Recipe started at 10:36 AM
12/21/2010	10:36:31 AM	Helium valve closed
12/21/2010	10:36:31 AM	H2 valve closed
12/21/2010	10:36:31 AM	BCl3 valve closed
12/21/2010	10:36:31 AM	PH3 valve closed
12/21/2010	10:36:31 AM	SiCl4 pre valve closed
12/21/2010	10:36:31 AM	SiCl4 post valve closed
12/21/2010	10:36:31 AM	Main Vac valve closed
12/21/2010	10:36:31 AM	Bubbler valve closed
12/21/2010	10:36:31 AM	Bypass valve opened
12/21/2010	10:36:31 AM	Helium MFC set to  0.000000
12/21/2010	10:36:31 AM	H2 MFC set to  0.000000
12/21/2010	10:36:31 AM	BCl3 MFC set to  0.000000
12/21/2010	10:36:31 AM	PHl3 MFC set to  0.000000
12/21/2010	10:36:31 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:36:31 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:36:31 AM	Tube furnace set to 0
12/21/2010	10:37:25 AM	Helium valve closed
12/21/2010	10:37:25 AM	H2 valve closed
12/21/2010	10:37:25 AM	BCl3 valve closed
12/21/2010	10:37:25 AM	PH3 valve closed
12/21/2010	10:37:25 AM	SiCl4 pre valve closed
12/21/2010	10:37:25 AM	SiCl4 post valve closed
12/21/2010	10:37:25 AM	Bubbler valve closed
12/21/2010	10:37:25 AM	Main Vac valve opened
12/21/2010	10:37:25 AM	Bypass valve opened
12/21/2010	10:37:25 AM	Helium MFC set to  0.000000
12/21/2010	10:37:25 AM	H2 MFC set to  0.000000
12/21/2010	10:37:25 AM	BCl3 MFC set to  0.000000
12/21/2010	10:37:25 AM	PHl3 MFC set to  0.000000
12/21/2010	10:37:25 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:37:25 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:37:25 AM	Tube furnace set to 0
12/21/2010	10:38:25 AM	H2 valve closed
12/21/2010	10:38:25 AM	BCl3 valve closed
12/21/2010	10:38:25 AM	PH3 valve closed
12/21/2010	10:38:25 AM	SiCl4 pre valve closed
12/21/2010	10:38:25 AM	SiCl4 post valve closed
12/21/2010	10:38:25 AM	Bubbler valve closed
12/21/2010	10:38:25 AM	Helium valve opened
12/21/2010	10:38:25 AM	Main Vac valve opened
12/21/2010	10:38:25 AM	Bypass valve opened
12/21/2010	10:38:25 AM	Helium MFC set to  100.000000
12/21/2010	10:38:25 AM	H2 MFC set to  0.000000
12/21/2010	10:38:25 AM	BCl3 MFC set to  0.000000
12/21/2010	10:38:25 AM	PHl3 MFC set to  0.000000
12/21/2010	10:38:25 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:38:25 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:38:25 AM	Tube furnace set to 0
12/21/2010	10:39:25 AM	Helium valve closed
12/21/2010	10:39:25 AM	H2 valve closed
12/21/2010	10:39:25 AM	BCl3 valve closed
12/21/2010	10:39:25 AM	PH3 valve closed
12/21/2010	10:39:25 AM	SiCl4 pre valve closed
12/21/2010	10:39:25 AM	SiCl4 post valve closed
12/21/2010	10:39:25 AM	Bubbler valve closed
12/21/2010	10:39:25 AM	Main Vac valve opened
12/21/2010	10:39:25 AM	Bypass valve opened
12/21/2010	10:39:25 AM	Helium MFC set to  0.000000
12/21/2010	10:39:25 AM	H2 MFC set to  0.000000
12/21/2010	10:39:25 AM	BCl3 MFC set to  0.000000
12/21/2010	10:39:25 AM	PHl3 MFC set to  0.000000
12/21/2010	10:39:25 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:39:25 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:39:26 AM	Tube furnace set to 0
12/21/2010	10:40:26 AM	H2 valve closed
12/21/2010	10:40:26 AM	BCl3 valve closed
12/21/2010	10:40:26 AM	PH3 valve closed
12/21/2010	10:40:26 AM	SiCl4 pre valve closed
12/21/2010	10:40:26 AM	SiCl4 post valve closed
12/21/2010	10:40:26 AM	Bubbler valve closed
12/21/2010	10:40:26 AM	Helium valve opened
12/21/2010	10:40:26 AM	Main Vac valve opened
12/21/2010	10:40:26 AM	Bypass valve opened
12/21/2010	10:40:26 AM	Helium MFC set to  100.000000
12/21/2010	10:40:26 AM	H2 MFC set to  0.000000
12/21/2010	10:40:26 AM	BCl3 MFC set to  0.000000
12/21/2010	10:40:26 AM	PHl3 MFC set to  0.000000
12/21/2010	10:40:26 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:40:26 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:40:26 AM	Tube furnace set to 0
12/21/2010	10:41:26 AM	Helium valve closed
12/21/2010	10:41:26 AM	H2 valve closed
12/21/2010	10:41:26 AM	BCl3 valve closed
12/21/2010	10:41:26 AM	PH3 valve closed
12/21/2010	10:41:26 AM	SiCl4 pre valve closed
12/21/2010	10:41:26 AM	SiCl4 post valve closed
12/21/2010	10:41:26 AM	Bubbler valve closed
12/21/2010	10:41:26 AM	Main Vac valve opened
12/21/2010	10:41:26 AM	Bypass valve opened
12/21/2010	10:41:26 AM	Helium MFC set to  0.000000
12/21/2010	10:41:26 AM	H2 MFC set to  0.000000
12/21/2010	10:41:26 AM	BCl3 MFC set to  0.000000
12/21/2010	10:41:26 AM	PHl3 MFC set to  0.000000
12/21/2010	10:41:26 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:41:26 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:41:26 AM	Tube furnace set to 0
12/21/2010	10:42:26 AM	H2 valve closed
12/21/2010	10:42:26 AM	BCl3 valve closed
12/21/2010	10:42:26 AM	PH3 valve closed
12/21/2010	10:42:26 AM	SiCl4 pre valve closed
12/21/2010	10:42:26 AM	SiCl4 post valve closed
12/21/2010	10:42:26 AM	Bubbler valve closed
12/21/2010	10:42:26 AM	Helium valve opened
12/21/2010	10:42:26 AM	Main Vac valve opened
12/21/2010	10:42:26 AM	Bypass valve opened
12/21/2010	10:42:26 AM	Helium MFC set to  100.000000
12/21/2010	10:42:26 AM	H2 MFC set to  0.000000
12/21/2010	10:42:26 AM	BCl3 MFC set to  0.000000
12/21/2010	10:42:26 AM	PHl3 MFC set to  0.000000
12/21/2010	10:42:26 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:42:26 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:42:26 AM	Tube furnace set to 0
12/21/2010	10:43:26 AM	Helium valve closed
12/21/2010	10:43:26 AM	H2 valve closed
12/21/2010	10:43:26 AM	BCl3 valve closed
12/21/2010	10:43:26 AM	PH3 valve closed
12/21/2010	10:43:26 AM	SiCl4 pre valve closed
12/21/2010	10:43:26 AM	SiCl4 post valve closed
12/21/2010	10:43:26 AM	Bubbler valve closed
12/21/2010	10:43:26 AM	Main Vac valve opened
12/21/2010	10:43:26 AM	Bypass valve opened
12/21/2010	10:43:26 AM	Helium MFC set to  0.000000
12/21/2010	10:43:26 AM	H2 MFC set to  0.000000
12/21/2010	10:43:26 AM	BCl3 MFC set to  0.000000
12/21/2010	10:43:26 AM	PHl3 MFC set to  0.000000
12/21/2010	10:43:26 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:43:26 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:43:26 AM	Tube furnace set to 0
12/21/2010	10:44:26 AM	H2 valve closed
12/21/2010	10:44:26 AM	BCl3 valve closed
12/21/2010	10:44:26 AM	PH3 valve closed
12/21/2010	10:44:26 AM	SiCl4 pre valve closed
12/21/2010	10:44:26 AM	SiCl4 post valve closed
12/21/2010	10:44:26 AM	Bubbler valve closed
12/21/2010	10:44:26 AM	Helium valve opened
12/21/2010	10:44:26 AM	Main Vac valve opened
12/21/2010	10:44:26 AM	Bypass valve opened
12/21/2010	10:44:26 AM	Helium MFC set to  100.000000
12/21/2010	10:44:26 AM	H2 MFC set to  0.000000
12/21/2010	10:44:26 AM	BCl3 MFC set to  0.000000
12/21/2010	10:44:26 AM	PHl3 MFC set to  0.000000
12/21/2010	10:44:26 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:44:26 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:44:27 AM	Tube furnace set to 0
12/21/2010	10:45:27 AM	Helium valve closed
12/21/2010	10:45:27 AM	H2 valve closed
12/21/2010	10:45:27 AM	BCl3 valve closed
12/21/2010	10:45:27 AM	PH3 valve closed
12/21/2010	10:45:27 AM	SiCl4 pre valve closed
12/21/2010	10:45:27 AM	SiCl4 post valve closed
12/21/2010	10:45:27 AM	Bubbler valve closed
12/21/2010	10:45:27 AM	Main Vac valve opened
12/21/2010	10:45:27 AM	Bypass valve opened
12/21/2010	10:45:27 AM	Helium MFC set to  0.000000
12/21/2010	10:45:27 AM	H2 MFC set to  0.000000
12/21/2010	10:45:27 AM	BCl3 MFC set to  0.000000
12/21/2010	10:45:27 AM	PHl3 MFC set to  0.000000
12/21/2010	10:45:27 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:45:27 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:45:27 AM	Tube furnace set to 0
12/21/2010	10:46:27 AM	H2 valve closed
12/21/2010	10:46:27 AM	BCl3 valve closed
12/21/2010	10:46:27 AM	PH3 valve closed
12/21/2010	10:46:27 AM	SiCl4 pre valve closed
12/21/2010	10:46:27 AM	SiCl4 post valve closed
12/21/2010	10:46:27 AM	Bubbler valve closed
12/21/2010	10:46:27 AM	Helium valve opened
12/21/2010	10:46:27 AM	Main Vac valve opened
12/21/2010	10:46:27 AM	Bypass valve opened
12/21/2010	10:46:27 AM	Helium MFC set to  100.000000
12/21/2010	10:46:27 AM	H2 MFC set to  0.000000
12/21/2010	10:46:27 AM	BCl3 MFC set to  0.000000
12/21/2010	10:46:27 AM	PHl3 MFC set to  0.000000
12/21/2010	10:46:27 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:46:27 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:46:27 AM	Tube furnace set to 0
12/21/2010	10:47:27 AM	Helium valve closed
12/21/2010	10:47:27 AM	H2 valve closed
12/21/2010	10:47:27 AM	BCl3 valve closed
12/21/2010	10:47:27 AM	PH3 valve closed
12/21/2010	10:47:27 AM	SiCl4 pre valve closed
12/21/2010	10:47:27 AM	SiCl4 post valve closed
12/21/2010	10:47:27 AM	Bubbler valve closed
12/21/2010	10:47:27 AM	Main Vac valve opened
12/21/2010	10:47:27 AM	Bypass valve opened
12/21/2010	10:47:27 AM	Helium MFC set to  0.000000
12/21/2010	10:47:27 AM	H2 MFC set to  0.000000
12/21/2010	10:47:27 AM	BCl3 MFC set to  0.000000
12/21/2010	10:47:27 AM	PHl3 MFC set to  0.000000
12/21/2010	10:47:27 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:47:27 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:47:27 AM	Tube furnace set to 0
12/21/2010	10:48:27 AM	H2 valve closed
12/21/2010	10:48:27 AM	BCl3 valve closed
12/21/2010	10:48:27 AM	PH3 valve closed
12/21/2010	10:48:27 AM	SiCl4 pre valve closed
12/21/2010	10:48:27 AM	SiCl4 post valve closed
12/21/2010	10:48:27 AM	Bubbler valve closed
12/21/2010	10:48:27 AM	Helium valve opened
12/21/2010	10:48:27 AM	Main Vac valve opened
12/21/2010	10:48:27 AM	Bypass valve opened
12/21/2010	10:48:27 AM	Helium MFC set to  100.000000
12/21/2010	10:48:27 AM	H2 MFC set to  0.000000
12/21/2010	10:48:27 AM	BCl3 MFC set to  0.000000
12/21/2010	10:48:27 AM	PHl3 MFC set to  0.000000
12/21/2010	10:48:27 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:48:27 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:48:27 AM	Tube furnace set to 0
12/21/2010	10:49:27 AM	Helium valve closed
12/21/2010	10:49:27 AM	H2 valve closed
12/21/2010	10:49:27 AM	BCl3 valve closed
12/21/2010	10:49:27 AM	PH3 valve closed
12/21/2010	10:49:27 AM	SiCl4 pre valve closed
12/21/2010	10:49:27 AM	SiCl4 post valve closed
12/21/2010	10:49:27 AM	Bubbler valve closed
12/21/2010	10:49:27 AM	Main Vac valve opened
12/21/2010	10:49:27 AM	Bypass valve opened
12/21/2010	10:49:27 AM	Helium MFC set to  0.000000
12/21/2010	10:49:27 AM	H2 MFC set to  0.000000
12/21/2010	10:49:27 AM	BCl3 MFC set to  0.000000
12/21/2010	10:49:27 AM	PHl3 MFC set to  0.000000
12/21/2010	10:49:27 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:49:27 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:49:28 AM	Tube furnace set to 0
12/21/2010	10:50:28 AM	H2 valve closed
12/21/2010	10:50:28 AM	BCl3 valve closed
12/21/2010	10:50:28 AM	PH3 valve closed
12/21/2010	10:50:28 AM	SiCl4 pre valve closed
12/21/2010	10:50:28 AM	SiCl4 post valve closed
12/21/2010	10:50:28 AM	Bubbler valve closed
12/21/2010	10:50:28 AM	Helium valve opened
12/21/2010	10:50:28 AM	Main Vac valve opened
12/21/2010	10:50:28 AM	Bypass valve opened
12/21/2010	10:50:28 AM	Helium MFC set to  100.000000
12/21/2010	10:50:28 AM	H2 MFC set to  0.000000
12/21/2010	10:50:28 AM	BCl3 MFC set to  0.000000
12/21/2010	10:50:28 AM	PHl3 MFC set to  0.000000
12/21/2010	10:50:28 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:50:28 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:50:28 AM	Tube furnace set to 0
12/21/2010	10:51:28 AM	Helium valve closed
12/21/2010	10:51:28 AM	H2 valve closed
12/21/2010	10:51:28 AM	BCl3 valve closed
12/21/2010	10:51:28 AM	PH3 valve closed
12/21/2010	10:51:28 AM	SiCl4 pre valve closed
12/21/2010	10:51:28 AM	SiCl4 post valve closed
12/21/2010	10:51:28 AM	Bubbler valve closed
12/21/2010	10:51:28 AM	Main Vac valve opened
12/21/2010	10:51:28 AM	Bypass valve opened
12/21/2010	10:51:28 AM	Helium MFC set to  0.000000
12/21/2010	10:51:28 AM	H2 MFC set to  0.000000
12/21/2010	10:51:28 AM	BCl3 MFC set to  0.000000
12/21/2010	10:51:28 AM	PHl3 MFC set to  0.000000
12/21/2010	10:51:28 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:51:28 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:51:28 AM	Tube furnace set to 0
12/21/2010	10:52:28 AM	H2 valve closed
12/21/2010	10:52:28 AM	BCl3 valve closed
12/21/2010	10:52:28 AM	PH3 valve closed
12/21/2010	10:52:28 AM	SiCl4 pre valve closed
12/21/2010	10:52:28 AM	SiCl4 post valve closed
12/21/2010	10:52:28 AM	Bubbler valve closed
12/21/2010	10:52:28 AM	Helium valve opened
12/21/2010	10:52:28 AM	Main Vac valve opened
12/21/2010	10:52:28 AM	Bypass valve opened
12/21/2010	10:52:28 AM	Helium MFC set to  100.000000
12/21/2010	10:52:28 AM	H2 MFC set to  0.000000
12/21/2010	10:52:28 AM	BCl3 MFC set to  0.000000
12/21/2010	10:52:28 AM	PHl3 MFC set to  0.000000
12/21/2010	10:52:28 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:52:28 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:52:28 AM	Tube furnace set to 0
12/21/2010	10:53:23 AM	Helium valve closed
12/21/2010	10:53:23 AM	H2 valve closed
12/21/2010	10:53:23 AM	BCl3 valve closed
12/21/2010	10:53:23 AM	PH3 valve closed
12/21/2010	10:53:23 AM	SiCl4 pre valve closed
12/21/2010	10:53:23 AM	SiCl4 post valve closed
12/21/2010	10:53:23 AM	Bubbler valve closed
12/21/2010	10:53:23 AM	Main Vac valve opened
12/21/2010	10:53:23 AM	Bypass valve opened
12/21/2010	10:53:23 AM	Helium MFC set to  0.000000
12/21/2010	10:53:23 AM	H2 MFC set to  0.000000
12/21/2010	10:53:23 AM	BCl3 MFC set to  0.000000
12/21/2010	10:53:23 AM	PHl3 MFC set to  0.000000
12/21/2010	10:53:23 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:53:23 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:53:24 AM	Tube furnace set to 0
12/21/2010	10:54:08 AM	H2 valve closed
12/21/2010	10:54:08 AM	BCl3 valve closed
12/21/2010	10:54:08 AM	PH3 valve closed
12/21/2010	10:54:08 AM	SiCl4 pre valve closed
12/21/2010	10:54:08 AM	SiCl4 post valve closed
12/21/2010	10:54:08 AM	Bubbler valve closed
12/21/2010	10:54:08 AM	Helium valve opened
12/21/2010	10:54:08 AM	Main Vac valve opened
12/21/2010	10:54:08 AM	Bypass valve opened
12/21/2010	10:54:08 AM	Helium MFC set to  100.000000
12/21/2010	10:54:08 AM	H2 MFC set to  0.000000
12/21/2010	10:54:08 AM	BCl3 MFC set to  0.000000
12/21/2010	10:54:08 AM	PHl3 MFC set to  0.000000
12/21/2010	10:54:08 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:54:08 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:54:08 AM	Tube furnace set to 0
12/21/2010	10:55:08 AM	Helium valve closed
12/21/2010	10:55:08 AM	H2 valve closed
12/21/2010	10:55:08 AM	BCl3 valve closed
12/21/2010	10:55:08 AM	PH3 valve closed
12/21/2010	10:55:08 AM	SiCl4 pre valve closed
12/21/2010	10:55:08 AM	SiCl4 post valve closed
12/21/2010	10:55:08 AM	Bubbler valve closed
12/21/2010	10:55:08 AM	Main Vac valve opened
12/21/2010	10:55:08 AM	Bypass valve opened
12/21/2010	10:55:08 AM	Helium MFC set to  0.000000
12/21/2010	10:55:08 AM	H2 MFC set to  0.000000
12/21/2010	10:55:08 AM	BCl3 MFC set to  0.000000
12/21/2010	10:55:08 AM	PHl3 MFC set to  0.000000
12/21/2010	10:55:08 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:55:08 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:55:08 AM	Tube furnace set to 0
12/21/2010	10:56:08 AM	H2 valve closed
12/21/2010	10:56:08 AM	BCl3 valve closed
12/21/2010	10:56:08 AM	PH3 valve closed
12/21/2010	10:56:08 AM	SiCl4 pre valve closed
12/21/2010	10:56:08 AM	SiCl4 post valve closed
12/21/2010	10:56:08 AM	Bubbler valve closed
12/21/2010	10:56:08 AM	Helium valve opened
12/21/2010	10:56:08 AM	Main Vac valve opened
12/21/2010	10:56:08 AM	Bypass valve opened
12/21/2010	10:56:08 AM	Helium MFC set to  100.000000
12/21/2010	10:56:08 AM	H2 MFC set to  0.000000
12/21/2010	10:56:08 AM	BCl3 MFC set to  0.000000
12/21/2010	10:56:08 AM	PHl3 MFC set to  0.000000
12/21/2010	10:56:08 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:56:08 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:56:08 AM	Tube furnace set to 0
12/21/2010	10:57:09 AM	Helium valve closed
12/21/2010	10:57:09 AM	H2 valve closed
12/21/2010	10:57:09 AM	BCl3 valve closed
12/21/2010	10:57:09 AM	PH3 valve closed
12/21/2010	10:57:09 AM	SiCl4 pre valve closed
12/21/2010	10:57:09 AM	SiCl4 post valve closed
12/21/2010	10:57:09 AM	Bubbler valve closed
12/21/2010	10:57:09 AM	Main Vac valve opened
12/21/2010	10:57:09 AM	Bypass valve opened
12/21/2010	10:57:09 AM	Helium MFC set to  0.000000
12/21/2010	10:57:09 AM	H2 MFC set to  0.000000
12/21/2010	10:57:09 AM	BCl3 MFC set to  0.000000
12/21/2010	10:57:09 AM	PHl3 MFC set to  0.000000
12/21/2010	10:57:09 AM	SiCl4 MFC set to  0.000000
12/21/2010	10:57:09 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:57:09 AM	Tube furnace set to 0
12/21/2010	10:57:10 AM	Run finished at 10:57 AM
12/21/2010	10:57:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	11:00:55 AM	Helium MFC set to  10.000000
12/21/2010	11:00:55 AM	Helium valve opened
12/21/2010	11:01:46 AM	Helium MFC set to  10.000000
12/21/2010	11:01:47 AM	Helium valve closed
12/21/2010	11:01:50 AM	Helium MFC set to  0.000000
12/21/2010	11:02:41 AM	Helium MFC set to  10.000000
12/21/2010	11:02:42 AM	Helium valve opened
12/21/2010	11:03:09 AM	Helium valve closed
12/21/2010	11:04:25 AM	Helium valve opened
12/21/2010	11:04:26 AM	Helium valve closed
12/21/2010	11:04:33 AM	Recipe started at 11:04 AM
12/21/2010	11:04:33 AM	Helium valve closed
12/21/2010	11:04:33 AM	BCl3 valve closed
12/21/2010	11:04:33 AM	PH3 valve closed
12/21/2010	11:04:33 AM	SiCl4 pre valve closed
12/21/2010	11:04:33 AM	SiCl4 post valve closed
12/21/2010	11:04:33 AM	Main Vac valve closed
12/21/2010	11:04:33 AM	Bypass valve closed
12/21/2010	11:04:33 AM	Bubbler valve closed
12/21/2010	11:04:33 AM	H2 valve opened
12/21/2010	11:04:33 AM	Helium MFC set to  0.000000
12/21/2010	11:04:33 AM	H2 MFC set to  500.000000
12/21/2010	11:04:33 AM	BCl3 MFC set to  0.000000
12/21/2010	11:04:33 AM	PHl3 MFC set to  0.000000
12/21/2010	11:04:33 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:04:33 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:04:33 AM	Tube furnace set to 200
12/21/2010	11:05:51 AM	Helium valve closed
12/21/2010	11:05:51 AM	BCl3 valve closed
12/21/2010	11:05:51 AM	PH3 valve closed
12/21/2010	11:05:51 AM	SiCl4 pre valve closed
12/21/2010	11:05:51 AM	SiCl4 post valve closed
12/21/2010	11:05:51 AM	Main Vac valve closed
12/21/2010	11:05:51 AM	Bypass valve closed
12/21/2010	11:05:51 AM	H2 valve opened
12/21/2010	11:05:51 AM	Bubbler valve opened
12/21/2010	11:05:51 AM	Helium MFC set to  0.000000
12/21/2010	11:05:51 AM	H2 MFC set to  0.000000
12/21/2010	11:05:51 AM	BCl3 MFC set to  0.000000
12/21/2010	11:05:51 AM	PHl3 MFC set to  0.000000
12/21/2010	11:05:51 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:05:51 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:05:51 AM	Tube furnace set to 1001
12/21/2010	11:06:11 AM	Run aborted at 11:06 AM
12/21/2010	11:06:11 AM	Helium valve closed
12/21/2010	11:06:11 AM	H2 valve closed
12/21/2010	11:06:11 AM	BCl3 valve closed
12/21/2010	11:06:11 AM	PH3 valve closed
12/21/2010	11:06:11 AM	SiCl4 pre valve closed
12/21/2010	11:06:11 AM	SiCl4 post valve closed
12/21/2010	11:06:11 AM	Bypass valve closed
12/21/2010	11:06:11 AM	Main Vac valve closed
12/21/2010	11:06:11 AM	Bubbler valve closed
12/21/2010	11:06:11 AM	Helium MFC set to  0.000000
12/21/2010	11:06:11 AM	H2 MFC set to  0.000000
12/21/2010	11:06:11 AM	BCl3 MFC set to  0.000000
12/21/2010	11:06:11 AM	PHl3 MFC set to  0.000000
12/21/2010	11:06:11 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:06:11 AM	Tube furnace set to 0
12/21/2010	11:06:32 AM	Recipe started at 11:06 AM
12/21/2010	11:06:32 AM	Helium valve closed
12/21/2010	11:06:32 AM	BCl3 valve closed
12/21/2010	11:06:32 AM	PH3 valve closed
12/21/2010	11:06:32 AM	SiCl4 pre valve closed
12/21/2010	11:06:32 AM	SiCl4 post valve closed
12/21/2010	11:06:32 AM	Main Vac valve closed
12/21/2010	11:06:32 AM	Bypass valve closed
12/21/2010	11:06:32 AM	Bubbler valve closed
12/21/2010	11:06:32 AM	H2 valve opened
12/21/2010	11:06:32 AM	Helium MFC set to  0.000000
12/21/2010	11:06:32 AM	H2 MFC set to  500.000000
12/21/2010	11:06:32 AM	BCl3 MFC set to  0.000000
12/21/2010	11:06:32 AM	PHl3 MFC set to  0.000000
12/21/2010	11:06:32 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:06:32 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:06:32 AM	Tube furnace set to 200
12/21/2010	11:06:34 AM	Helium valve closed
12/21/2010	11:06:34 AM	BCl3 valve closed
12/21/2010	11:06:34 AM	PH3 valve closed
12/21/2010	11:06:34 AM	SiCl4 pre valve closed
12/21/2010	11:06:34 AM	SiCl4 post valve closed
12/21/2010	11:06:34 AM	Main Vac valve closed
12/21/2010	11:06:34 AM	Bypass valve closed
12/21/2010	11:06:34 AM	H2 valve opened
12/21/2010	11:06:34 AM	Bubbler valve opened
12/21/2010	11:06:34 AM	Helium MFC set to  0.000000
12/21/2010	11:06:34 AM	H2 MFC set to  500.000000
12/21/2010	11:06:34 AM	BCl3 MFC set to  0.000000
12/21/2010	11:06:34 AM	PHl3 MFC set to  0.000000
12/21/2010	11:06:34 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:06:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:06:34 AM	Tube furnace set to 1001
12/21/2010	11:27:34 AM	Helium valve closed
12/21/2010	11:27:34 AM	PH3 valve closed
12/21/2010	11:27:34 AM	Main Vac valve closed
12/21/2010	11:27:34 AM	Bypass valve closed
12/21/2010	11:27:34 AM	H2 valve opened
12/21/2010	11:27:34 AM	BCl3 valve opened
12/21/2010	11:27:34 AM	SiCl4 pre valve opened
12/21/2010	11:27:34 AM	SiCl4 post valve opened
12/21/2010	11:27:34 AM	Bubbler valve opened
12/21/2010	11:27:34 AM	Helium MFC set to  0.000000
12/21/2010	11:27:34 AM	H2 MFC set to  500.000000
12/21/2010	11:27:34 AM	BCl3 MFC set to  10.000000
12/21/2010	11:27:34 AM	PHl3 MFC set to  0.000000
12/21/2010	11:27:34 AM	SiCl4 MFC set to  50.000000
12/21/2010	11:27:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:27:34 AM	Tube furnace set to 1000
12/21/2010	11:29:34 AM	H2 valve closed
12/21/2010	11:29:34 AM	BCl3 valve closed
12/21/2010	11:29:34 AM	PH3 valve closed
12/21/2010	11:29:34 AM	SiCl4 pre valve closed
12/21/2010	11:29:34 AM	SiCl4 post valve closed
12/21/2010	11:29:34 AM	Main Vac valve closed
12/21/2010	11:29:34 AM	Bypass valve closed
12/21/2010	11:29:34 AM	Helium valve opened
12/21/2010	11:29:34 AM	Bubbler valve opened
12/21/2010	11:29:34 AM	Helium MFC set to  500.000000
12/21/2010	11:29:34 AM	H2 MFC set to  0.000000
12/21/2010	11:29:34 AM	BCl3 MFC set to  0.000000
12/21/2010	11:29:34 AM	PHl3 MFC set to  0.000000
12/21/2010	11:29:34 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:29:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:29:34 AM	Tube furnace set to 0
12/21/2010	11:49:34 AM	Helium valve closed
12/21/2010	11:49:34 AM	H2 valve closed
12/21/2010	11:49:34 AM	BCl3 valve closed
12/21/2010	11:49:34 AM	PH3 valve closed
12/21/2010	11:49:34 AM	SiCl4 pre valve closed
12/21/2010	11:49:34 AM	SiCl4 post valve closed
12/21/2010	11:49:34 AM	Main Vac valve closed
12/21/2010	11:49:34 AM	Bypass valve closed
12/21/2010	11:49:34 AM	Bubbler valve closed
12/21/2010	11:49:34 AM	Helium MFC set to  0.000000
12/21/2010	11:49:34 AM	H2 MFC set to  0.000000
12/21/2010	11:49:34 AM	BCl3 MFC set to  0.000000
12/21/2010	11:49:34 AM	PHl3 MFC set to  0.000000
12/21/2010	11:49:34 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:49:34 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:49:34 AM	Tube furnace set to 0
12/21/2010	11:49:35 AM	Run finished at 11:49 AM
12/21/2010	11:56:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:56:39 AM	Recipe started at 11:56 AM
12/21/2010	11:56:39 AM	Helium valve closed
12/21/2010	11:56:39 AM	H2 valve closed
12/21/2010	11:56:39 AM	BCl3 valve closed
12/21/2010	11:56:39 AM	PH3 valve closed
12/21/2010	11:56:39 AM	SiCl4 pre valve closed
12/21/2010	11:56:39 AM	SiCl4 post valve closed
12/21/2010	11:56:39 AM	Main Vac valve closed
12/21/2010	11:56:39 AM	Bubbler valve closed
12/21/2010	11:56:39 AM	Bypass valve opened
12/21/2010	11:56:39 AM	Helium MFC set to  0.000000
12/21/2010	11:56:39 AM	H2 MFC set to  0.000000
12/21/2010	11:56:39 AM	BCl3 MFC set to  0.000000
12/21/2010	11:56:39 AM	PHl3 MFC set to  0.000000
12/21/2010	11:56:39 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:56:39 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:56:40 AM	Tube furnace set to 0
12/21/2010	11:57:23 AM	Helium valve closed
12/21/2010	11:57:23 AM	H2 valve closed
12/21/2010	11:57:23 AM	BCl3 valve closed
12/21/2010	11:57:23 AM	PH3 valve closed
12/21/2010	11:57:23 AM	SiCl4 pre valve closed
12/21/2010	11:57:23 AM	SiCl4 post valve closed
12/21/2010	11:57:23 AM	Bubbler valve closed
12/21/2010	11:57:23 AM	Main Vac valve opened
12/21/2010	11:57:23 AM	Bypass valve opened
12/21/2010	11:57:23 AM	Helium MFC set to  0.000000
12/21/2010	11:57:23 AM	H2 MFC set to  0.000000
12/21/2010	11:57:23 AM	BCl3 MFC set to  0.000000
12/21/2010	11:57:23 AM	PHl3 MFC set to  0.000000
12/21/2010	11:57:23 AM	SiCl4 MFC set to  0.000000
12/21/2010	11:57:23 AM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:57:23 AM	Tube furnace set to 0
12/21/2010	11:57:23 AM	Run finished at 11:57 AM
12/21/2010	11:57:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:57:27 AM	Tube furnace set to 500
12/21/2010	12:22:17 PM	Tube furnace set to 1000
12/21/2010	12:22:37 PM	Recipe started at 12:22 PM
12/21/2010	12:22:37 PM	Helium valve closed
12/21/2010	12:22:37 PM	BCl3 valve closed
12/21/2010	12:22:37 PM	PH3 valve closed
12/21/2010	12:22:37 PM	SiCl4 pre valve closed
12/21/2010	12:22:37 PM	SiCl4 post valve closed
12/21/2010	12:22:37 PM	Main Vac valve closed
12/21/2010	12:22:37 PM	Bypass valve closed
12/21/2010	12:22:37 PM	Bubbler valve closed
12/21/2010	12:22:37 PM	H2 valve opened
12/21/2010	12:22:37 PM	Helium MFC set to  0.000000
12/21/2010	12:22:37 PM	H2 MFC set to  500.000000
12/21/2010	12:22:37 PM	BCl3 MFC set to  0.000000
12/21/2010	12:22:37 PM	PHl3 MFC set to  0.000000
12/21/2010	12:22:37 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:22:37 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:22:38 PM	Tube furnace set to 200
12/21/2010	12:23:51 PM	Helium valve closed
12/21/2010	12:23:51 PM	BCl3 valve closed
12/21/2010	12:23:51 PM	PH3 valve closed
12/21/2010	12:23:51 PM	SiCl4 pre valve closed
12/21/2010	12:23:51 PM	SiCl4 post valve closed
12/21/2010	12:23:51 PM	Main Vac valve closed
12/21/2010	12:23:51 PM	Bypass valve closed
12/21/2010	12:23:51 PM	H2 valve opened
12/21/2010	12:23:51 PM	Bubbler valve opened
12/21/2010	12:23:51 PM	Helium MFC set to  0.000000
12/21/2010	12:23:51 PM	H2 MFC set to  400.000000
12/21/2010	12:23:51 PM	BCl3 MFC set to  0.000000
12/21/2010	12:23:51 PM	PHl3 MFC set to  0.000000
12/21/2010	12:23:51 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:23:51 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:23:51 PM	Tube furnace set to 1001
12/21/2010	12:27:42 PM	Run aborted at 12:27 PM
12/21/2010	12:27:42 PM	Helium valve closed
12/21/2010	12:27:42 PM	H2 valve closed
12/21/2010	12:27:42 PM	BCl3 valve closed
12/21/2010	12:27:42 PM	PH3 valve closed
12/21/2010	12:27:42 PM	SiCl4 pre valve closed
12/21/2010	12:27:42 PM	SiCl4 post valve closed
12/21/2010	12:27:42 PM	Bypass valve closed
12/21/2010	12:27:42 PM	Main Vac valve closed
12/21/2010	12:27:42 PM	Bubbler valve closed
12/21/2010	12:27:42 PM	Helium MFC set to  0.000000
12/21/2010	12:27:42 PM	H2 MFC set to  0.000000
12/21/2010	12:27:42 PM	BCl3 MFC set to  0.000000
12/21/2010	12:27:42 PM	PHl3 MFC set to  0.000000
12/21/2010	12:27:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:27:42 PM	Tube furnace set to 0
12/21/2010	12:27:46 PM	Tube furnace set to 1000
12/21/2010	12:28:40 PM	Recipe started at 12:28 PM
12/21/2010	12:28:40 PM	Helium valve closed
12/21/2010	12:28:40 PM	BCl3 valve closed
12/21/2010	12:28:40 PM	PH3 valve closed
12/21/2010	12:28:40 PM	SiCl4 pre valve closed
12/21/2010	12:28:40 PM	SiCl4 post valve closed
12/21/2010	12:28:40 PM	Main Vac valve closed
12/21/2010	12:28:40 PM	Bypass valve closed
12/21/2010	12:28:40 PM	Bubbler valve closed
12/21/2010	12:28:40 PM	H2 valve opened
12/21/2010	12:28:40 PM	Helium MFC set to  0.000000
12/21/2010	12:28:40 PM	H2 MFC set to  500.000000
12/21/2010	12:28:40 PM	BCl3 MFC set to  0.000000
12/21/2010	12:28:40 PM	PHl3 MFC set to  0.000000
12/21/2010	12:28:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:28:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:28:40 PM	Tube furnace set to 200
12/21/2010	12:28:41 PM	Helium valve closed
12/21/2010	12:28:41 PM	BCl3 valve closed
12/21/2010	12:28:41 PM	PH3 valve closed
12/21/2010	12:28:41 PM	SiCl4 pre valve closed
12/21/2010	12:28:41 PM	SiCl4 post valve closed
12/21/2010	12:28:41 PM	Main Vac valve closed
12/21/2010	12:28:41 PM	Bypass valve closed
12/21/2010	12:28:41 PM	H2 valve opened
12/21/2010	12:28:41 PM	Bubbler valve opened
12/21/2010	12:28:41 PM	Helium MFC set to  0.000000
12/21/2010	12:28:41 PM	H2 MFC set to  400.000000
12/21/2010	12:28:41 PM	BCl3 MFC set to  0.000000
12/21/2010	12:28:41 PM	PHl3 MFC set to  0.000000
12/21/2010	12:28:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:28:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:28:41 PM	Tube furnace set to 1001
12/21/2010	12:35:21 PM	Helium valve closed
12/21/2010	12:35:21 PM	PH3 valve closed
12/21/2010	12:35:21 PM	Main Vac valve closed
12/21/2010	12:35:21 PM	Bypass valve closed
12/21/2010	12:35:21 PM	H2 valve opened
12/21/2010	12:35:21 PM	BCl3 valve opened
12/21/2010	12:35:21 PM	SiCl4 pre valve opened
12/21/2010	12:35:21 PM	SiCl4 post valve opened
12/21/2010	12:35:21 PM	Bubbler valve opened
12/21/2010	12:35:21 PM	Helium MFC set to  0.000000
12/21/2010	12:35:21 PM	H2 MFC set to  500.000000
12/21/2010	12:35:21 PM	BCl3 MFC set to  0.000000
12/21/2010	12:35:21 PM	PHl3 MFC set to  0.000000
12/21/2010	12:35:21 PM	SiCl4 MFC set to  50.000000
12/21/2010	12:35:21 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:35:21 PM	Tube furnace set to 1000
12/21/2010	12:37:21 PM	H2 valve closed
12/21/2010	12:37:21 PM	BCl3 valve closed
12/21/2010	12:37:21 PM	PH3 valve closed
12/21/2010	12:37:21 PM	SiCl4 pre valve closed
12/21/2010	12:37:21 PM	SiCl4 post valve closed
12/21/2010	12:37:21 PM	Main Vac valve closed
12/21/2010	12:37:21 PM	Bypass valve closed
12/21/2010	12:37:21 PM	Helium valve opened
12/21/2010	12:37:21 PM	Bubbler valve opened
12/21/2010	12:37:21 PM	Helium MFC set to  500.000000
12/21/2010	12:37:21 PM	H2 MFC set to  0.000000
12/21/2010	12:37:21 PM	BCl3 MFC set to  0.000000
12/21/2010	12:37:21 PM	PHl3 MFC set to  0.000000
12/21/2010	12:37:21 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:37:21 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:37:22 PM	Tube furnace set to 0
12/21/2010	12:57:22 PM	Helium valve closed
12/21/2010	12:57:22 PM	H2 valve closed
12/21/2010	12:57:22 PM	BCl3 valve closed
12/21/2010	12:57:22 PM	PH3 valve closed
12/21/2010	12:57:22 PM	SiCl4 pre valve closed
12/21/2010	12:57:22 PM	SiCl4 post valve closed
12/21/2010	12:57:22 PM	Main Vac valve closed
12/21/2010	12:57:22 PM	Bypass valve closed
12/21/2010	12:57:22 PM	Bubbler valve closed
12/21/2010	12:57:22 PM	Helium MFC set to  0.000000
12/21/2010	12:57:22 PM	H2 MFC set to  0.000000
12/21/2010	12:57:22 PM	BCl3 MFC set to  0.000000
12/21/2010	12:57:22 PM	PHl3 MFC set to  0.000000
12/21/2010	12:57:22 PM	SiCl4 MFC set to  0.000000
12/21/2010	12:57:22 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	12:57:22 PM	Tube furnace set to 0
12/21/2010	12:57:22 PM	Run finished at 12:57 PM
12/21/2010	1:47:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	1:47:22 PM	Recipe started at 1:47 PM
12/21/2010	1:47:22 PM	H2 valve closed
12/21/2010	1:47:22 PM	BCl3 valve closed
12/21/2010	1:47:22 PM	PH3 valve closed
12/21/2010	1:47:22 PM	SiCl4 pre valve closed
12/21/2010	1:47:22 PM	SiCl4 post valve closed
12/21/2010	1:47:22 PM	Main Vac valve closed
12/21/2010	1:47:22 PM	Bypass valve closed
12/21/2010	1:47:22 PM	Bubbler valve closed
12/21/2010	1:47:22 PM	Helium valve opened
12/21/2010	1:47:22 PM	Helium MFC set to  500.000000
12/21/2010	1:47:22 PM	H2 MFC set to  0.000000
12/21/2010	1:47:22 PM	BCl3 MFC set to  0.000000
12/21/2010	1:47:22 PM	PHl3 MFC set to  0.000000
12/21/2010	1:47:22 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:47:22 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:47:23 PM	Tube furnace set to 0
12/21/2010	1:47:25 PM	Helium valve closed
12/21/2010	1:47:25 PM	H2 valve closed
12/21/2010	1:47:25 PM	BCl3 valve closed
12/21/2010	1:47:25 PM	PH3 valve closed
12/21/2010	1:47:25 PM	SiCl4 pre valve closed
12/21/2010	1:47:25 PM	SiCl4 post valve closed
12/21/2010	1:47:25 PM	Main Vac valve closed
12/21/2010	1:47:25 PM	Bypass valve closed
12/21/2010	1:47:25 PM	Bubbler valve closed
12/21/2010	1:47:25 PM	Helium MFC set to  0.000000
12/21/2010	1:47:25 PM	H2 MFC set to  0.000000
12/21/2010	1:47:25 PM	BCl3 MFC set to  0.000000
12/21/2010	1:47:25 PM	PHl3 MFC set to  0.000000
12/21/2010	1:47:25 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:47:25 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:47:25 PM	Tube furnace set to 0
12/21/2010	1:47:26 PM	Run finished at 1:47 PM
12/21/2010	1:47:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	1:51:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	1:51:20 PM	Recipe started at 1:51 PM
12/21/2010	1:51:20 PM	Helium valve closed
12/21/2010	1:51:20 PM	H2 valve closed
12/21/2010	1:51:20 PM	BCl3 valve closed
12/21/2010	1:51:20 PM	PH3 valve closed
12/21/2010	1:51:20 PM	SiCl4 pre valve closed
12/21/2010	1:51:20 PM	SiCl4 post valve closed
12/21/2010	1:51:20 PM	Main Vac valve closed
12/21/2010	1:51:20 PM	Bubbler valve closed
12/21/2010	1:51:20 PM	Bypass valve opened
12/21/2010	1:51:20 PM	Helium MFC set to  0.000000
12/21/2010	1:51:20 PM	H2 MFC set to  0.000000
12/21/2010	1:51:20 PM	BCl3 MFC set to  0.000000
12/21/2010	1:51:20 PM	PHl3 MFC set to  0.000000
12/21/2010	1:51:20 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:51:20 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:51:20 PM	Tube furnace set to 0
12/21/2010	1:52:09 PM	Helium valve closed
12/21/2010	1:52:09 PM	H2 valve closed
12/21/2010	1:52:09 PM	BCl3 valve closed
12/21/2010	1:52:09 PM	PH3 valve closed
12/21/2010	1:52:09 PM	SiCl4 pre valve closed
12/21/2010	1:52:09 PM	SiCl4 post valve closed
12/21/2010	1:52:09 PM	Bubbler valve closed
12/21/2010	1:52:09 PM	Main Vac valve opened
12/21/2010	1:52:09 PM	Bypass valve opened
12/21/2010	1:52:09 PM	Helium MFC set to  0.000000
12/21/2010	1:52:09 PM	H2 MFC set to  0.000000
12/21/2010	1:52:09 PM	BCl3 MFC set to  0.000000
12/21/2010	1:52:09 PM	PHl3 MFC set to  0.000000
12/21/2010	1:52:09 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:52:09 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:52:09 PM	Tube furnace set to 0
12/21/2010	1:53:09 PM	H2 valve closed
12/21/2010	1:53:09 PM	BCl3 valve closed
12/21/2010	1:53:09 PM	PH3 valve closed
12/21/2010	1:53:09 PM	SiCl4 pre valve closed
12/21/2010	1:53:09 PM	SiCl4 post valve closed
12/21/2010	1:53:09 PM	Bubbler valve closed
12/21/2010	1:53:09 PM	Helium valve opened
12/21/2010	1:53:09 PM	Main Vac valve opened
12/21/2010	1:53:09 PM	Bypass valve opened
12/21/2010	1:53:09 PM	Helium MFC set to  100.000000
12/21/2010	1:53:09 PM	H2 MFC set to  0.000000
12/21/2010	1:53:09 PM	BCl3 MFC set to  0.000000
12/21/2010	1:53:09 PM	PHl3 MFC set to  0.000000
12/21/2010	1:53:09 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:53:09 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:53:09 PM	Tube furnace set to 0
12/21/2010	1:54:09 PM	Helium valve closed
12/21/2010	1:54:09 PM	H2 valve closed
12/21/2010	1:54:09 PM	BCl3 valve closed
12/21/2010	1:54:09 PM	PH3 valve closed
12/21/2010	1:54:09 PM	SiCl4 pre valve closed
12/21/2010	1:54:09 PM	SiCl4 post valve closed
12/21/2010	1:54:09 PM	Bubbler valve closed
12/21/2010	1:54:09 PM	Main Vac valve opened
12/21/2010	1:54:09 PM	Bypass valve opened
12/21/2010	1:54:09 PM	Helium MFC set to  0.000000
12/21/2010	1:54:09 PM	H2 MFC set to  0.000000
12/21/2010	1:54:09 PM	BCl3 MFC set to  0.000000
12/21/2010	1:54:09 PM	PHl3 MFC set to  0.000000
12/21/2010	1:54:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:54:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:54:10 PM	Tube furnace set to 0
12/21/2010	1:55:10 PM	H2 valve closed
12/21/2010	1:55:10 PM	BCl3 valve closed
12/21/2010	1:55:10 PM	PH3 valve closed
12/21/2010	1:55:10 PM	SiCl4 pre valve closed
12/21/2010	1:55:10 PM	SiCl4 post valve closed
12/21/2010	1:55:10 PM	Bubbler valve closed
12/21/2010	1:55:10 PM	Helium valve opened
12/21/2010	1:55:10 PM	Main Vac valve opened
12/21/2010	1:55:10 PM	Bypass valve opened
12/21/2010	1:55:10 PM	Helium MFC set to  100.000000
12/21/2010	1:55:10 PM	H2 MFC set to  0.000000
12/21/2010	1:55:10 PM	BCl3 MFC set to  0.000000
12/21/2010	1:55:10 PM	PHl3 MFC set to  0.000000
12/21/2010	1:55:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:55:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:55:10 PM	Tube furnace set to 0
12/21/2010	1:56:10 PM	Helium valve closed
12/21/2010	1:56:10 PM	H2 valve closed
12/21/2010	1:56:10 PM	BCl3 valve closed
12/21/2010	1:56:10 PM	PH3 valve closed
12/21/2010	1:56:10 PM	SiCl4 pre valve closed
12/21/2010	1:56:10 PM	SiCl4 post valve closed
12/21/2010	1:56:10 PM	Bubbler valve closed
12/21/2010	1:56:10 PM	Main Vac valve opened
12/21/2010	1:56:10 PM	Bypass valve opened
12/21/2010	1:56:10 PM	Helium MFC set to  0.000000
12/21/2010	1:56:10 PM	H2 MFC set to  0.000000
12/21/2010	1:56:10 PM	BCl3 MFC set to  0.000000
12/21/2010	1:56:10 PM	PHl3 MFC set to  0.000000
12/21/2010	1:56:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:56:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:56:10 PM	Tube furnace set to 0
12/21/2010	1:57:10 PM	H2 valve closed
12/21/2010	1:57:10 PM	BCl3 valve closed
12/21/2010	1:57:10 PM	PH3 valve closed
12/21/2010	1:57:10 PM	SiCl4 pre valve closed
12/21/2010	1:57:10 PM	SiCl4 post valve closed
12/21/2010	1:57:10 PM	Bubbler valve closed
12/21/2010	1:57:10 PM	Helium valve opened
12/21/2010	1:57:10 PM	Main Vac valve opened
12/21/2010	1:57:10 PM	Bypass valve opened
12/21/2010	1:57:10 PM	Helium MFC set to  100.000000
12/21/2010	1:57:10 PM	H2 MFC set to  0.000000
12/21/2010	1:57:10 PM	BCl3 MFC set to  0.000000
12/21/2010	1:57:10 PM	PHl3 MFC set to  0.000000
12/21/2010	1:57:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:57:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:57:10 PM	Tube furnace set to 0
12/21/2010	1:58:10 PM	Helium valve closed
12/21/2010	1:58:10 PM	H2 valve closed
12/21/2010	1:58:10 PM	BCl3 valve closed
12/21/2010	1:58:10 PM	PH3 valve closed
12/21/2010	1:58:10 PM	SiCl4 pre valve closed
12/21/2010	1:58:10 PM	SiCl4 post valve closed
12/21/2010	1:58:10 PM	Bubbler valve closed
12/21/2010	1:58:10 PM	Main Vac valve opened
12/21/2010	1:58:10 PM	Bypass valve opened
12/21/2010	1:58:10 PM	Helium MFC set to  0.000000
12/21/2010	1:58:10 PM	H2 MFC set to  0.000000
12/21/2010	1:58:10 PM	BCl3 MFC set to  0.000000
12/21/2010	1:58:10 PM	PHl3 MFC set to  0.000000
12/21/2010	1:58:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:58:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:58:10 PM	Tube furnace set to 0
12/21/2010	1:59:10 PM	H2 valve closed
12/21/2010	1:59:10 PM	BCl3 valve closed
12/21/2010	1:59:10 PM	PH3 valve closed
12/21/2010	1:59:11 PM	SiCl4 pre valve closed
12/21/2010	1:59:11 PM	SiCl4 post valve closed
12/21/2010	1:59:11 PM	Bubbler valve closed
12/21/2010	1:59:11 PM	Helium valve opened
12/21/2010	1:59:11 PM	Main Vac valve opened
12/21/2010	1:59:11 PM	Bypass valve opened
12/21/2010	1:59:11 PM	Helium MFC set to  100.000000
12/21/2010	1:59:11 PM	H2 MFC set to  0.000000
12/21/2010	1:59:11 PM	BCl3 MFC set to  0.000000
12/21/2010	1:59:11 PM	PHl3 MFC set to  0.000000
12/21/2010	1:59:11 PM	SiCl4 MFC set to  0.000000
12/21/2010	1:59:11 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	1:59:11 PM	Tube furnace set to 0
12/21/2010	2:00:11 PM	Helium valve closed
12/21/2010	2:00:11 PM	H2 valve closed
12/21/2010	2:00:11 PM	BCl3 valve closed
12/21/2010	2:00:11 PM	PH3 valve closed
12/21/2010	2:00:11 PM	SiCl4 pre valve closed
12/21/2010	2:00:11 PM	SiCl4 post valve closed
12/21/2010	2:00:11 PM	Bubbler valve closed
12/21/2010	2:00:11 PM	Main Vac valve opened
12/21/2010	2:00:11 PM	Bypass valve opened
12/21/2010	2:00:11 PM	Helium MFC set to  0.000000
12/21/2010	2:00:11 PM	H2 MFC set to  0.000000
12/21/2010	2:00:11 PM	BCl3 MFC set to  0.000000
12/21/2010	2:00:11 PM	PHl3 MFC set to  0.000000
12/21/2010	2:00:11 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:00:11 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:00:11 PM	Tube furnace set to 0
12/21/2010	2:00:38 PM	H2 valve closed
12/21/2010	2:00:38 PM	BCl3 valve closed
12/21/2010	2:00:38 PM	PH3 valve closed
12/21/2010	2:00:38 PM	SiCl4 pre valve closed
12/21/2010	2:00:38 PM	SiCl4 post valve closed
12/21/2010	2:00:38 PM	Bubbler valve closed
12/21/2010	2:00:38 PM	Helium valve opened
12/21/2010	2:00:38 PM	Main Vac valve opened
12/21/2010	2:00:38 PM	Bypass valve opened
12/21/2010	2:00:38 PM	Helium MFC set to  100.000000
12/21/2010	2:00:38 PM	H2 MFC set to  0.000000
12/21/2010	2:00:38 PM	BCl3 MFC set to  0.000000
12/21/2010	2:00:38 PM	PHl3 MFC set to  0.000000
12/21/2010	2:00:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:00:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:00:38 PM	Tube furnace set to 0
12/21/2010	2:00:40 PM	Helium valve closed
12/21/2010	2:00:40 PM	H2 valve closed
12/21/2010	2:00:40 PM	BCl3 valve closed
12/21/2010	2:00:40 PM	PH3 valve closed
12/21/2010	2:00:40 PM	SiCl4 pre valve closed
12/21/2010	2:00:40 PM	SiCl4 post valve closed
12/21/2010	2:00:40 PM	Bubbler valve closed
12/21/2010	2:00:40 PM	Main Vac valve opened
12/21/2010	2:00:40 PM	Bypass valve opened
12/21/2010	2:00:40 PM	Helium MFC set to  0.000000
12/21/2010	2:00:40 PM	H2 MFC set to  0.000000
12/21/2010	2:00:40 PM	BCl3 MFC set to  0.000000
12/21/2010	2:00:40 PM	PHl3 MFC set to  0.000000
12/21/2010	2:00:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:00:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:00:41 PM	Tube furnace set to 0
12/21/2010	2:01:41 PM	H2 valve closed
12/21/2010	2:01:41 PM	BCl3 valve closed
12/21/2010	2:01:41 PM	PH3 valve closed
12/21/2010	2:01:41 PM	SiCl4 pre valve closed
12/21/2010	2:01:41 PM	SiCl4 post valve closed
12/21/2010	2:01:41 PM	Bubbler valve closed
12/21/2010	2:01:41 PM	Helium valve opened
12/21/2010	2:01:41 PM	Main Vac valve opened
12/21/2010	2:01:41 PM	Bypass valve opened
12/21/2010	2:01:41 PM	Helium MFC set to  100.000000
12/21/2010	2:01:41 PM	H2 MFC set to  0.000000
12/21/2010	2:01:41 PM	BCl3 MFC set to  0.000000
12/21/2010	2:01:41 PM	PHl3 MFC set to  0.000000
12/21/2010	2:01:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:01:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:01:41 PM	Tube furnace set to 0
12/21/2010	2:02:41 PM	Helium valve closed
12/21/2010	2:02:41 PM	H2 valve closed
12/21/2010	2:02:41 PM	BCl3 valve closed
12/21/2010	2:02:41 PM	PH3 valve closed
12/21/2010	2:02:41 PM	SiCl4 pre valve closed
12/21/2010	2:02:41 PM	SiCl4 post valve closed
12/21/2010	2:02:41 PM	Bubbler valve closed
12/21/2010	2:02:41 PM	Main Vac valve opened
12/21/2010	2:02:41 PM	Bypass valve opened
12/21/2010	2:02:41 PM	Helium MFC set to  0.000000
12/21/2010	2:02:41 PM	H2 MFC set to  0.000000
12/21/2010	2:02:41 PM	BCl3 MFC set to  0.000000
12/21/2010	2:02:41 PM	PHl3 MFC set to  0.000000
12/21/2010	2:02:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:02:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:02:41 PM	Tube furnace set to 0
12/21/2010	2:03:41 PM	H2 valve closed
12/21/2010	2:03:41 PM	BCl3 valve closed
12/21/2010	2:03:41 PM	PH3 valve closed
12/21/2010	2:03:41 PM	SiCl4 pre valve closed
12/21/2010	2:03:41 PM	SiCl4 post valve closed
12/21/2010	2:03:41 PM	Bubbler valve closed
12/21/2010	2:03:41 PM	Helium valve opened
12/21/2010	2:03:41 PM	Main Vac valve opened
12/21/2010	2:03:41 PM	Bypass valve opened
12/21/2010	2:03:41 PM	Helium MFC set to  100.000000
12/21/2010	2:03:41 PM	H2 MFC set to  0.000000
12/21/2010	2:03:41 PM	BCl3 MFC set to  0.000000
12/21/2010	2:03:41 PM	PHl3 MFC set to  0.000000
12/21/2010	2:03:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:03:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:03:41 PM	Tube furnace set to 0
12/21/2010	2:04:41 PM	Helium valve closed
12/21/2010	2:04:41 PM	H2 valve closed
12/21/2010	2:04:41 PM	BCl3 valve closed
12/21/2010	2:04:41 PM	PH3 valve closed
12/21/2010	2:04:41 PM	SiCl4 pre valve closed
12/21/2010	2:04:41 PM	SiCl4 post valve closed
12/21/2010	2:04:41 PM	Bubbler valve closed
12/21/2010	2:04:41 PM	Main Vac valve opened
12/21/2010	2:04:41 PM	Bypass valve opened
12/21/2010	2:04:41 PM	Helium MFC set to  0.000000
12/21/2010	2:04:41 PM	H2 MFC set to  0.000000
12/21/2010	2:04:41 PM	BCl3 MFC set to  0.000000
12/21/2010	2:04:41 PM	PHl3 MFC set to  0.000000
12/21/2010	2:04:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:04:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:04:41 PM	Tube furnace set to 0
12/21/2010	2:05:41 PM	H2 valve closed
12/21/2010	2:05:41 PM	BCl3 valve closed
12/21/2010	2:05:41 PM	PH3 valve closed
12/21/2010	2:05:41 PM	SiCl4 pre valve closed
12/21/2010	2:05:41 PM	SiCl4 post valve closed
12/21/2010	2:05:41 PM	Bubbler valve closed
12/21/2010	2:05:41 PM	Helium valve opened
12/21/2010	2:05:41 PM	Main Vac valve opened
12/21/2010	2:05:41 PM	Bypass valve opened
12/21/2010	2:05:41 PM	Helium MFC set to  100.000000
12/21/2010	2:05:41 PM	H2 MFC set to  0.000000
12/21/2010	2:05:41 PM	BCl3 MFC set to  0.000000
12/21/2010	2:05:41 PM	PHl3 MFC set to  0.000000
12/21/2010	2:05:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:05:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:05:42 PM	Tube furnace set to 0
12/21/2010	2:06:42 PM	Helium valve closed
12/21/2010	2:06:42 PM	H2 valve closed
12/21/2010	2:06:42 PM	BCl3 valve closed
12/21/2010	2:06:42 PM	PH3 valve closed
12/21/2010	2:06:42 PM	SiCl4 pre valve closed
12/21/2010	2:06:42 PM	SiCl4 post valve closed
12/21/2010	2:06:42 PM	Bubbler valve closed
12/21/2010	2:06:42 PM	Main Vac valve opened
12/21/2010	2:06:42 PM	Bypass valve opened
12/21/2010	2:06:42 PM	Helium MFC set to  0.000000
12/21/2010	2:06:42 PM	H2 MFC set to  0.000000
12/21/2010	2:06:42 PM	BCl3 MFC set to  0.000000
12/21/2010	2:06:42 PM	PHl3 MFC set to  0.000000
12/21/2010	2:06:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:06:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:06:42 PM	Tube furnace set to 0
12/21/2010	2:07:42 PM	H2 valve closed
12/21/2010	2:07:42 PM	BCl3 valve closed
12/21/2010	2:07:42 PM	PH3 valve closed
12/21/2010	2:07:42 PM	SiCl4 pre valve closed
12/21/2010	2:07:42 PM	SiCl4 post valve closed
12/21/2010	2:07:42 PM	Bubbler valve closed
12/21/2010	2:07:42 PM	Helium valve opened
12/21/2010	2:07:42 PM	Main Vac valve opened
12/21/2010	2:07:42 PM	Bypass valve opened
12/21/2010	2:07:42 PM	Helium MFC set to  100.000000
12/21/2010	2:07:42 PM	H2 MFC set to  0.000000
12/21/2010	2:07:42 PM	BCl3 MFC set to  0.000000
12/21/2010	2:07:42 PM	PHl3 MFC set to  0.000000
12/21/2010	2:07:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:07:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:07:42 PM	Tube furnace set to 0
12/21/2010	2:08:42 PM	Helium valve closed
12/21/2010	2:08:42 PM	H2 valve closed
12/21/2010	2:08:42 PM	BCl3 valve closed
12/21/2010	2:08:42 PM	PH3 valve closed
12/21/2010	2:08:42 PM	SiCl4 pre valve closed
12/21/2010	2:08:42 PM	SiCl4 post valve closed
12/21/2010	2:08:42 PM	Bubbler valve closed
12/21/2010	2:08:42 PM	Main Vac valve opened
12/21/2010	2:08:42 PM	Bypass valve opened
12/21/2010	2:08:42 PM	Helium MFC set to  0.000000
12/21/2010	2:08:42 PM	H2 MFC set to  0.000000
12/21/2010	2:08:42 PM	BCl3 MFC set to  0.000000
12/21/2010	2:08:42 PM	PHl3 MFC set to  0.000000
12/21/2010	2:08:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:08:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:08:42 PM	Tube furnace set to 0
12/21/2010	2:09:42 PM	H2 valve closed
12/21/2010	2:09:42 PM	BCl3 valve closed
12/21/2010	2:09:42 PM	PH3 valve closed
12/21/2010	2:09:42 PM	SiCl4 pre valve closed
12/21/2010	2:09:42 PM	SiCl4 post valve closed
12/21/2010	2:09:42 PM	Bubbler valve closed
12/21/2010	2:09:42 PM	Helium valve opened
12/21/2010	2:09:42 PM	Main Vac valve opened
12/21/2010	2:09:42 PM	Bypass valve opened
12/21/2010	2:09:42 PM	Helium MFC set to  100.000000
12/21/2010	2:09:42 PM	H2 MFC set to  0.000000
12/21/2010	2:09:42 PM	BCl3 MFC set to  0.000000
12/21/2010	2:09:42 PM	PHl3 MFC set to  0.000000
12/21/2010	2:09:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:09:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:09:42 PM	Tube furnace set to 0
12/21/2010	2:10:42 PM	Helium valve closed
12/21/2010	2:10:42 PM	H2 valve closed
12/21/2010	2:10:42 PM	BCl3 valve closed
12/21/2010	2:10:42 PM	PH3 valve closed
12/21/2010	2:10:42 PM	SiCl4 pre valve closed
12/21/2010	2:10:42 PM	SiCl4 post valve closed
12/21/2010	2:10:42 PM	Bubbler valve closed
12/21/2010	2:10:42 PM	Main Vac valve opened
12/21/2010	2:10:42 PM	Bypass valve opened
12/21/2010	2:10:42 PM	Helium MFC set to  0.000000
12/21/2010	2:10:42 PM	H2 MFC set to  0.000000
12/21/2010	2:10:42 PM	BCl3 MFC set to  0.000000
12/21/2010	2:10:42 PM	PHl3 MFC set to  0.000000
12/21/2010	2:10:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:10:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:10:43 PM	Tube furnace set to 0
12/21/2010	2:10:44 PM	Run finished at 2:10 PM
12/21/2010	2:10:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	2:11:27 PM	Helium MFC set to  10.000000
12/21/2010	2:11:28 PM	Helium valve opened
12/21/2010	2:13:01 PM	Helium valve closed
12/21/2010	2:13:52 PM	Main Vac valve closed
12/21/2010	2:13:53 PM	Bypass valve closed
12/21/2010	2:13:55 PM	Helium valve opened
12/21/2010	2:14:01 PM	Helium valve closed
12/21/2010	2:14:08 PM	Helium MFC set to  100.000000
12/21/2010	2:14:09 PM	Helium valve opened
12/21/2010	2:14:12 PM	Helium valve closed
12/21/2010	2:14:14 PM	Bypass valve opened
12/21/2010	2:14:16 PM	Main Vac valve opened
12/21/2010	2:15:05 PM	Helium valve opened
12/21/2010	2:15:35 PM	Helium valve closed
12/21/2010	2:16:32 PM	H2 MFC set to  10.000000
12/21/2010	2:16:33 PM	Helium valve opened
12/21/2010	2:16:35 PM	H2 valve opened
12/21/2010	2:16:37 PM	H2 valve closed
12/21/2010	2:16:41 PM	H2 valve opened
12/21/2010	2:16:43 PM	H2 valve closed
12/21/2010	2:16:45 PM	H2 valve opened
12/21/2010	2:16:47 PM	H2 valve closed
12/21/2010	2:16:54 PM	H2 MFC set to  20.000000
12/21/2010	2:16:55 PM	H2 valve opened
12/21/2010	2:17:00 PM	H2 valve closed
12/21/2010	2:17:02 PM	Helium valve closed
12/21/2010	2:17:50 PM	Helium valve opened
12/21/2010	2:17:51 PM	H2 valve opened
12/21/2010	2:18:00 PM	H2 valve closed
12/21/2010	2:18:25 PM	Tube furnace set to 100
12/21/2010	2:18:35 PM	Helium valve closed
12/21/2010	2:19:36 PM	Tube furnace set to 0
12/21/2010	2:19:37 PM	Helium valve opened
12/21/2010	2:20:55 PM	Helium valve closed
12/21/2010	2:22:09 PM	Helium valve opened
12/21/2010	2:23:05 PM	Helium valve closed
12/21/2010	2:25:57 PM	Helium MFC set to  50.000000
12/21/2010	2:25:57 PM	Helium valve opened
12/21/2010	2:26:00 PM	H2 valve opened
12/21/2010	2:26:09 PM	H2 valve closed
12/21/2010	2:28:17 PM	Helium valve closed
12/21/2010	2:30:48 PM	Helium valve opened
12/21/2010	2:30:50 PM	Helium valve closed
12/21/2010	2:31:03 PM	Tube furnace set to 200
12/21/2010	2:31:28 PM	Main Vac valve closed
12/21/2010	2:31:29 PM	Bypass valve closed
12/21/2010	2:31:40 PM	Bypass valve opened
12/21/2010	2:31:41 PM	Main Vac valve opened
12/21/2010	2:31:47 PM	Helium valve opened
12/21/2010	2:31:49 PM	H2 valve opened
12/21/2010	2:31:50 PM	H2 valve closed
12/21/2010	2:31:51 PM	Helium valve closed
12/21/2010	2:32:38 PM	Recipe started at 2:32 PM
12/21/2010	2:32:38 PM	Helium valve closed
12/21/2010	2:32:38 PM	BCl3 valve closed
12/21/2010	2:32:38 PM	PH3 valve closed
12/21/2010	2:32:38 PM	SiCl4 pre valve closed
12/21/2010	2:32:38 PM	SiCl4 post valve closed
12/21/2010	2:32:38 PM	Main Vac valve closed
12/21/2010	2:32:38 PM	Bypass valve closed
12/21/2010	2:32:38 PM	Bubbler valve closed
12/21/2010	2:32:38 PM	H2 valve opened
12/21/2010	2:32:38 PM	Helium MFC set to  0.000000
12/21/2010	2:32:38 PM	H2 MFC set to  500.000000
12/21/2010	2:32:38 PM	BCl3 MFC set to  0.000000
12/21/2010	2:32:38 PM	PHl3 MFC set to  0.000000
12/21/2010	2:32:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:32:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:32:38 PM	Tube furnace set to 300
12/21/2010	2:33:56 PM	Helium valve closed
12/21/2010	2:33:56 PM	BCl3 valve closed
12/21/2010	2:33:56 PM	PH3 valve closed
12/21/2010	2:33:56 PM	SiCl4 pre valve closed
12/21/2010	2:33:56 PM	SiCl4 post valve closed
12/21/2010	2:33:56 PM	Main Vac valve closed
12/21/2010	2:33:56 PM	Bypass valve closed
12/21/2010	2:33:56 PM	H2 valve opened
12/21/2010	2:33:56 PM	Bubbler valve opened
12/21/2010	2:33:56 PM	Helium MFC set to  0.000000
12/21/2010	2:33:56 PM	H2 MFC set to  400.000000
12/21/2010	2:33:56 PM	BCl3 MFC set to  0.000000
12/21/2010	2:33:56 PM	PHl3 MFC set to  0.000000
12/21/2010	2:33:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	2:33:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:33:56 PM	Tube furnace set to 1001
12/21/2010	2:57:56 PM	Helium valve closed
12/21/2010	2:57:56 PM	PH3 valve closed
12/21/2010	2:57:56 PM	Main Vac valve closed
12/21/2010	2:57:56 PM	Bypass valve closed
12/21/2010	2:57:56 PM	H2 valve opened
12/21/2010	2:57:56 PM	BCl3 valve opened
12/21/2010	2:57:56 PM	SiCl4 pre valve opened
12/21/2010	2:57:56 PM	SiCl4 post valve opened
12/21/2010	2:57:56 PM	Bubbler valve opened
12/21/2010	2:57:56 PM	Helium MFC set to  0.000000
12/21/2010	2:57:56 PM	H2 MFC set to  500.000000
12/21/2010	2:57:56 PM	BCl3 MFC set to  10.000000
12/21/2010	2:57:56 PM	PHl3 MFC set to  0.000000
12/21/2010	2:57:56 PM	SiCl4 MFC set to  50.000000
12/21/2010	2:57:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	2:57:56 PM	Tube furnace set to 1000
12/21/2010	3:12:56 PM	Helium valve closed
12/21/2010	3:12:56 PM	BCl3 valve closed
12/21/2010	3:12:56 PM	PH3 valve closed
12/21/2010	3:12:56 PM	SiCl4 pre valve closed
12/21/2010	3:12:56 PM	SiCl4 post valve closed
12/21/2010	3:12:56 PM	Main Vac valve closed
12/21/2010	3:12:56 PM	Bypass valve closed
12/21/2010	3:12:56 PM	H2 valve opened
12/21/2010	3:12:56 PM	Bubbler valve opened
12/21/2010	3:12:56 PM	Helium MFC set to  0.000000
12/21/2010	3:12:56 PM	H2 MFC set to  500.000000
12/21/2010	3:12:56 PM	BCl3 MFC set to  0.000000
12/21/2010	3:12:56 PM	PHl3 MFC set to  0.000000
12/21/2010	3:12:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:12:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:12:56 PM	Tube furnace set to 0
12/21/2010	3:13:16 PM	H2 valve closed
12/21/2010	3:13:16 PM	BCl3 valve closed
12/21/2010	3:13:16 PM	PH3 valve closed
12/21/2010	3:13:16 PM	SiCl4 pre valve closed
12/21/2010	3:13:16 PM	SiCl4 post valve closed
12/21/2010	3:13:16 PM	Main Vac valve closed
12/21/2010	3:13:16 PM	Bypass valve closed
12/21/2010	3:13:16 PM	Helium valve opened
12/21/2010	3:13:17 PM	Bubbler valve opened
12/21/2010	3:13:17 PM	Helium MFC set to  400.000000
12/21/2010	3:13:17 PM	H2 MFC set to  0.000000
12/21/2010	3:13:17 PM	BCl3 MFC set to  0.000000
12/21/2010	3:13:17 PM	PHl3 MFC set to  0.000000
12/21/2010	3:13:17 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:13:17 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:13:17 PM	Tube furnace set to 0
12/21/2010	3:33:17 PM	Helium valve closed
12/21/2010	3:33:17 PM	H2 valve closed
12/21/2010	3:33:17 PM	BCl3 valve closed
12/21/2010	3:33:17 PM	PH3 valve closed
12/21/2010	3:33:17 PM	SiCl4 pre valve closed
12/21/2010	3:33:17 PM	SiCl4 post valve closed
12/21/2010	3:33:17 PM	Main Vac valve closed
12/21/2010	3:33:17 PM	Bypass valve closed
12/21/2010	3:33:17 PM	Bubbler valve closed
12/21/2010	3:33:17 PM	Helium MFC set to  0.000000
12/21/2010	3:33:17 PM	H2 MFC set to  0.000000
12/21/2010	3:33:17 PM	BCl3 MFC set to  0.000000
12/21/2010	3:33:17 PM	PHl3 MFC set to  0.000000
12/21/2010	3:33:17 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:33:17 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:33:17 PM	Tube furnace set to 0
12/21/2010	3:33:17 PM	Run finished at 3:33 PM
12/21/2010	3:37:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	3:37:07 PM	Recipe started at 3:37 PM
12/21/2010	3:37:07 PM	Helium valve closed
12/21/2010	3:37:07 PM	H2 valve closed
12/21/2010	3:37:07 PM	BCl3 valve closed
12/21/2010	3:37:07 PM	PH3 valve closed
12/21/2010	3:37:07 PM	SiCl4 pre valve closed
12/21/2010	3:37:07 PM	SiCl4 post valve closed
12/21/2010	3:37:07 PM	Main Vac valve closed
12/21/2010	3:37:07 PM	Bubbler valve closed
12/21/2010	3:37:07 PM	Bypass valve opened
12/21/2010	3:37:07 PM	Helium MFC set to  0.000000
12/21/2010	3:37:07 PM	H2 MFC set to  0.000000
12/21/2010	3:37:07 PM	BCl3 MFC set to  0.000000
12/21/2010	3:37:07 PM	PHl3 MFC set to  0.000000
12/21/2010	3:37:07 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:37:07 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:37:07 PM	Tube furnace set to 0
12/21/2010	3:38:05 PM	Helium valve closed
12/21/2010	3:38:05 PM	H2 valve closed
12/21/2010	3:38:05 PM	BCl3 valve closed
12/21/2010	3:38:05 PM	PH3 valve closed
12/21/2010	3:38:05 PM	SiCl4 pre valve closed
12/21/2010	3:38:05 PM	SiCl4 post valve closed
12/21/2010	3:38:05 PM	Bubbler valve closed
12/21/2010	3:38:05 PM	Main Vac valve opened
12/21/2010	3:38:05 PM	Bypass valve opened
12/21/2010	3:38:05 PM	Helium MFC set to  0.000000
12/21/2010	3:38:05 PM	H2 MFC set to  0.000000
12/21/2010	3:38:05 PM	BCl3 MFC set to  0.000000
12/21/2010	3:38:05 PM	PHl3 MFC set to  0.000000
12/21/2010	3:38:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:38:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:38:05 PM	Tube furnace set to 0
12/21/2010	3:38:05 PM	Run finished at 3:38 PM
12/21/2010	3:38:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	3:38:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	3:38:39 PM	Recipe started at 3:38 PM
12/21/2010	3:38:39 PM	Helium valve closed
12/21/2010	3:38:39 PM	H2 valve closed
12/21/2010	3:38:39 PM	BCl3 valve closed
12/21/2010	3:38:39 PM	PH3 valve closed
12/21/2010	3:38:39 PM	SiCl4 pre valve closed
12/21/2010	3:38:39 PM	SiCl4 post valve closed
12/21/2010	3:38:39 PM	Main Vac valve closed
12/21/2010	3:38:39 PM	Bubbler valve closed
12/21/2010	3:38:39 PM	Bypass valve opened
12/21/2010	3:38:39 PM	Helium MFC set to  0.000000
12/21/2010	3:38:39 PM	H2 MFC set to  0.000000
12/21/2010	3:38:39 PM	BCl3 MFC set to  0.000000
12/21/2010	3:38:39 PM	PHl3 MFC set to  0.000000
12/21/2010	3:38:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:38:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:38:39 PM	Tube furnace set to 0
12/21/2010	3:38:40 PM	Helium valve closed
12/21/2010	3:38:40 PM	H2 valve closed
12/21/2010	3:38:40 PM	BCl3 valve closed
12/21/2010	3:38:40 PM	PH3 valve closed
12/21/2010	3:38:40 PM	SiCl4 pre valve closed
12/21/2010	3:38:40 PM	SiCl4 post valve closed
12/21/2010	3:38:40 PM	Bubbler valve closed
12/21/2010	3:38:40 PM	Main Vac valve opened
12/21/2010	3:38:40 PM	Bypass valve opened
12/21/2010	3:38:40 PM	Helium MFC set to  0.000000
12/21/2010	3:38:40 PM	H2 MFC set to  0.000000
12/21/2010	3:38:40 PM	BCl3 MFC set to  0.000000
12/21/2010	3:38:40 PM	PHl3 MFC set to  0.000000
12/21/2010	3:38:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:38:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:38:40 PM	Tube furnace set to 0
12/21/2010	3:39:40 PM	H2 valve closed
12/21/2010	3:39:40 PM	BCl3 valve closed
12/21/2010	3:39:40 PM	PH3 valve closed
12/21/2010	3:39:40 PM	SiCl4 pre valve closed
12/21/2010	3:39:40 PM	SiCl4 post valve closed
12/21/2010	3:39:40 PM	Bubbler valve closed
12/21/2010	3:39:40 PM	Helium valve opened
12/21/2010	3:39:40 PM	Main Vac valve opened
12/21/2010	3:39:40 PM	Bypass valve opened
12/21/2010	3:39:40 PM	Helium MFC set to  100.000000
12/21/2010	3:39:40 PM	H2 MFC set to  0.000000
12/21/2010	3:39:40 PM	BCl3 MFC set to  0.000000
12/21/2010	3:39:40 PM	PHl3 MFC set to  0.000000
12/21/2010	3:39:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:39:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:39:40 PM	Tube furnace set to 0
12/21/2010	3:40:40 PM	Helium valve closed
12/21/2010	3:40:40 PM	H2 valve closed
12/21/2010	3:40:40 PM	BCl3 valve closed
12/21/2010	3:40:40 PM	PH3 valve closed
12/21/2010	3:40:40 PM	SiCl4 pre valve closed
12/21/2010	3:40:40 PM	SiCl4 post valve closed
12/21/2010	3:40:40 PM	Bubbler valve closed
12/21/2010	3:40:40 PM	Main Vac valve opened
12/21/2010	3:40:40 PM	Bypass valve opened
12/21/2010	3:40:40 PM	Helium MFC set to  0.000000
12/21/2010	3:40:40 PM	H2 MFC set to  0.000000
12/21/2010	3:40:40 PM	BCl3 MFC set to  0.000000
12/21/2010	3:40:40 PM	PHl3 MFC set to  0.000000
12/21/2010	3:40:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:40:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:40:40 PM	Tube furnace set to 0
12/21/2010	3:41:40 PM	H2 valve closed
12/21/2010	3:41:40 PM	BCl3 valve closed
12/21/2010	3:41:40 PM	PH3 valve closed
12/21/2010	3:41:40 PM	SiCl4 pre valve closed
12/21/2010	3:41:40 PM	SiCl4 post valve closed
12/21/2010	3:41:40 PM	Bubbler valve closed
12/21/2010	3:41:40 PM	Helium valve opened
12/21/2010	3:41:40 PM	Main Vac valve opened
12/21/2010	3:41:40 PM	Bypass valve opened
12/21/2010	3:41:40 PM	Helium MFC set to  100.000000
12/21/2010	3:41:40 PM	H2 MFC set to  0.000000
12/21/2010	3:41:40 PM	BCl3 MFC set to  0.000000
12/21/2010	3:41:40 PM	PHl3 MFC set to  0.000000
12/21/2010	3:41:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:41:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:41:40 PM	Tube furnace set to 0
12/21/2010	3:42:40 PM	Helium valve closed
12/21/2010	3:42:40 PM	H2 valve closed
12/21/2010	3:42:40 PM	BCl3 valve closed
12/21/2010	3:42:40 PM	PH3 valve closed
12/21/2010	3:42:40 PM	SiCl4 pre valve closed
12/21/2010	3:42:40 PM	SiCl4 post valve closed
12/21/2010	3:42:40 PM	Bubbler valve closed
12/21/2010	3:42:40 PM	Main Vac valve opened
12/21/2010	3:42:40 PM	Bypass valve opened
12/21/2010	3:42:40 PM	Helium MFC set to  0.000000
12/21/2010	3:42:40 PM	H2 MFC set to  0.000000
12/21/2010	3:42:40 PM	BCl3 MFC set to  0.000000
12/21/2010	3:42:40 PM	PHl3 MFC set to  0.000000
12/21/2010	3:42:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:42:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:42:41 PM	Tube furnace set to 0
12/21/2010	3:43:41 PM	H2 valve closed
12/21/2010	3:43:41 PM	BCl3 valve closed
12/21/2010	3:43:41 PM	PH3 valve closed
12/21/2010	3:43:41 PM	SiCl4 pre valve closed
12/21/2010	3:43:41 PM	SiCl4 post valve closed
12/21/2010	3:43:41 PM	Bubbler valve closed
12/21/2010	3:43:41 PM	Helium valve opened
12/21/2010	3:43:41 PM	Main Vac valve opened
12/21/2010	3:43:41 PM	Bypass valve opened
12/21/2010	3:43:41 PM	Helium MFC set to  100.000000
12/21/2010	3:43:41 PM	H2 MFC set to  0.000000
12/21/2010	3:43:41 PM	BCl3 MFC set to  0.000000
12/21/2010	3:43:41 PM	PHl3 MFC set to  0.000000
12/21/2010	3:43:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:43:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:43:41 PM	Tube furnace set to 0
12/21/2010	3:44:41 PM	Helium valve closed
12/21/2010	3:44:41 PM	H2 valve closed
12/21/2010	3:44:41 PM	BCl3 valve closed
12/21/2010	3:44:41 PM	PH3 valve closed
12/21/2010	3:44:41 PM	SiCl4 pre valve closed
12/21/2010	3:44:41 PM	SiCl4 post valve closed
12/21/2010	3:44:41 PM	Bubbler valve closed
12/21/2010	3:44:41 PM	Main Vac valve opened
12/21/2010	3:44:41 PM	Bypass valve opened
12/21/2010	3:44:41 PM	Helium MFC set to  0.000000
12/21/2010	3:44:41 PM	H2 MFC set to  0.000000
12/21/2010	3:44:41 PM	BCl3 MFC set to  0.000000
12/21/2010	3:44:41 PM	PHl3 MFC set to  0.000000
12/21/2010	3:44:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:44:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:44:41 PM	Tube furnace set to 0
12/21/2010	3:45:41 PM	H2 valve closed
12/21/2010	3:45:41 PM	BCl3 valve closed
12/21/2010	3:45:41 PM	PH3 valve closed
12/21/2010	3:45:41 PM	SiCl4 pre valve closed
12/21/2010	3:45:41 PM	SiCl4 post valve closed
12/21/2010	3:45:41 PM	Bubbler valve closed
12/21/2010	3:45:41 PM	Helium valve opened
12/21/2010	3:45:41 PM	Main Vac valve opened
12/21/2010	3:45:41 PM	Bypass valve opened
12/21/2010	3:45:41 PM	Helium MFC set to  100.000000
12/21/2010	3:45:41 PM	H2 MFC set to  0.000000
12/21/2010	3:45:41 PM	BCl3 MFC set to  0.000000
12/21/2010	3:45:41 PM	PHl3 MFC set to  0.000000
12/21/2010	3:45:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:45:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:45:41 PM	Tube furnace set to 0
12/21/2010	3:46:41 PM	Helium valve closed
12/21/2010	3:46:41 PM	H2 valve closed
12/21/2010	3:46:41 PM	BCl3 valve closed
12/21/2010	3:46:41 PM	PH3 valve closed
12/21/2010	3:46:41 PM	SiCl4 pre valve closed
12/21/2010	3:46:41 PM	SiCl4 post valve closed
12/21/2010	3:46:41 PM	Bubbler valve closed
12/21/2010	3:46:41 PM	Main Vac valve opened
12/21/2010	3:46:41 PM	Bypass valve opened
12/21/2010	3:46:41 PM	Helium MFC set to  0.000000
12/21/2010	3:46:41 PM	H2 MFC set to  0.000000
12/21/2010	3:46:41 PM	BCl3 MFC set to  0.000000
12/21/2010	3:46:41 PM	PHl3 MFC set to  0.000000
12/21/2010	3:46:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:46:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:46:41 PM	Tube furnace set to 0
12/21/2010	3:47:41 PM	H2 valve closed
12/21/2010	3:47:41 PM	BCl3 valve closed
12/21/2010	3:47:42 PM	PH3 valve closed
12/21/2010	3:47:42 PM	SiCl4 pre valve closed
12/21/2010	3:47:42 PM	SiCl4 post valve closed
12/21/2010	3:47:42 PM	Bubbler valve closed
12/21/2010	3:47:42 PM	Helium valve opened
12/21/2010	3:47:42 PM	Main Vac valve opened
12/21/2010	3:47:42 PM	Bypass valve opened
12/21/2010	3:47:42 PM	Helium MFC set to  100.000000
12/21/2010	3:47:42 PM	H2 MFC set to  0.000000
12/21/2010	3:47:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:47:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:47:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:47:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:47:42 PM	Tube furnace set to 0
12/21/2010	3:48:42 PM	Helium valve closed
12/21/2010	3:48:42 PM	H2 valve closed
12/21/2010	3:48:42 PM	BCl3 valve closed
12/21/2010	3:48:42 PM	PH3 valve closed
12/21/2010	3:48:42 PM	SiCl4 pre valve closed
12/21/2010	3:48:42 PM	SiCl4 post valve closed
12/21/2010	3:48:42 PM	Bubbler valve closed
12/21/2010	3:48:42 PM	Main Vac valve opened
12/21/2010	3:48:42 PM	Bypass valve opened
12/21/2010	3:48:42 PM	Helium MFC set to  0.000000
12/21/2010	3:48:42 PM	H2 MFC set to  0.000000
12/21/2010	3:48:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:48:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:48:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:48:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:48:42 PM	Tube furnace set to 0
12/21/2010	3:49:42 PM	H2 valve closed
12/21/2010	3:49:42 PM	BCl3 valve closed
12/21/2010	3:49:42 PM	PH3 valve closed
12/21/2010	3:49:42 PM	SiCl4 pre valve closed
12/21/2010	3:49:42 PM	SiCl4 post valve closed
12/21/2010	3:49:42 PM	Bubbler valve closed
12/21/2010	3:49:42 PM	Helium valve opened
12/21/2010	3:49:42 PM	Main Vac valve opened
12/21/2010	3:49:42 PM	Bypass valve opened
12/21/2010	3:49:42 PM	Helium MFC set to  100.000000
12/21/2010	3:49:42 PM	H2 MFC set to  0.000000
12/21/2010	3:49:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:49:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:49:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:49:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:49:42 PM	Tube furnace set to 0
12/21/2010	3:50:42 PM	Helium valve closed
12/21/2010	3:50:42 PM	H2 valve closed
12/21/2010	3:50:42 PM	BCl3 valve closed
12/21/2010	3:50:42 PM	PH3 valve closed
12/21/2010	3:50:42 PM	SiCl4 pre valve closed
12/21/2010	3:50:42 PM	SiCl4 post valve closed
12/21/2010	3:50:42 PM	Bubbler valve closed
12/21/2010	3:50:42 PM	Main Vac valve opened
12/21/2010	3:50:42 PM	Bypass valve opened
12/21/2010	3:50:42 PM	Helium MFC set to  0.000000
12/21/2010	3:50:42 PM	H2 MFC set to  0.000000
12/21/2010	3:50:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:50:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:50:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:50:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:50:42 PM	Tube furnace set to 0
12/21/2010	3:51:42 PM	H2 valve closed
12/21/2010	3:51:42 PM	BCl3 valve closed
12/21/2010	3:51:42 PM	PH3 valve closed
12/21/2010	3:51:42 PM	SiCl4 pre valve closed
12/21/2010	3:51:42 PM	SiCl4 post valve closed
12/21/2010	3:51:42 PM	Bubbler valve closed
12/21/2010	3:51:42 PM	Helium valve opened
12/21/2010	3:51:42 PM	Main Vac valve opened
12/21/2010	3:51:42 PM	Bypass valve opened
12/21/2010	3:51:42 PM	Helium MFC set to  100.000000
12/21/2010	3:51:42 PM	H2 MFC set to  0.000000
12/21/2010	3:51:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:51:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:51:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:51:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:51:42 PM	Tube furnace set to 0
12/21/2010	3:52:43 PM	Helium valve closed
12/21/2010	3:52:43 PM	H2 valve closed
12/21/2010	3:52:43 PM	BCl3 valve closed
12/21/2010	3:52:43 PM	PH3 valve closed
12/21/2010	3:52:43 PM	SiCl4 pre valve closed
12/21/2010	3:52:43 PM	SiCl4 post valve closed
12/21/2010	3:52:43 PM	Bubbler valve closed
12/21/2010	3:52:43 PM	Main Vac valve opened
12/21/2010	3:52:43 PM	Bypass valve opened
12/21/2010	3:52:43 PM	Helium MFC set to  0.000000
12/21/2010	3:52:43 PM	H2 MFC set to  0.000000
12/21/2010	3:52:43 PM	BCl3 MFC set to  0.000000
12/21/2010	3:52:43 PM	PHl3 MFC set to  0.000000
12/21/2010	3:52:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:52:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:52:43 PM	Tube furnace set to 0
12/21/2010	3:53:43 PM	H2 valve closed
12/21/2010	3:53:43 PM	BCl3 valve closed
12/21/2010	3:53:43 PM	PH3 valve closed
12/21/2010	3:53:43 PM	SiCl4 pre valve closed
12/21/2010	3:53:43 PM	SiCl4 post valve closed
12/21/2010	3:53:43 PM	Bubbler valve closed
12/21/2010	3:53:43 PM	Helium valve opened
12/21/2010	3:53:43 PM	Main Vac valve opened
12/21/2010	3:53:43 PM	Bypass valve opened
12/21/2010	3:53:43 PM	Helium MFC set to  100.000000
12/21/2010	3:53:43 PM	H2 MFC set to  0.000000
12/21/2010	3:53:43 PM	BCl3 MFC set to  0.000000
12/21/2010	3:53:43 PM	PHl3 MFC set to  0.000000
12/21/2010	3:53:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:53:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:53:43 PM	Tube furnace set to 0
12/21/2010	3:54:43 PM	Helium valve closed
12/21/2010	3:54:43 PM	H2 valve closed
12/21/2010	3:54:43 PM	BCl3 valve closed
12/21/2010	3:54:43 PM	PH3 valve closed
12/21/2010	3:54:43 PM	SiCl4 pre valve closed
12/21/2010	3:54:43 PM	SiCl4 post valve closed
12/21/2010	3:54:43 PM	Bubbler valve closed
12/21/2010	3:54:43 PM	Main Vac valve opened
12/21/2010	3:54:43 PM	Bypass valve opened
12/21/2010	3:54:43 PM	Helium MFC set to  0.000000
12/21/2010	3:54:43 PM	H2 MFC set to  0.000000
12/21/2010	3:54:43 PM	BCl3 MFC set to  0.000000
12/21/2010	3:54:43 PM	PHl3 MFC set to  0.000000
12/21/2010	3:54:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:54:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:54:43 PM	Tube furnace set to 0
12/21/2010	3:55:43 PM	H2 valve closed
12/21/2010	3:55:43 PM	BCl3 valve closed
12/21/2010	3:55:43 PM	PH3 valve closed
12/21/2010	3:55:43 PM	SiCl4 pre valve closed
12/21/2010	3:55:43 PM	SiCl4 post valve closed
12/21/2010	3:55:43 PM	Bubbler valve closed
12/21/2010	3:55:43 PM	Helium valve opened
12/21/2010	3:55:43 PM	Main Vac valve opened
12/21/2010	3:55:43 PM	Bypass valve opened
12/21/2010	3:55:43 PM	Helium MFC set to  100.000000
12/21/2010	3:55:43 PM	H2 MFC set to  0.000000
12/21/2010	3:55:43 PM	BCl3 MFC set to  0.000000
12/21/2010	3:55:43 PM	PHl3 MFC set to  0.000000
12/21/2010	3:55:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:55:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:55:43 PM	Tube furnace set to 0
12/21/2010	3:56:42 PM	Helium valve closed
12/21/2010	3:56:42 PM	H2 valve closed
12/21/2010	3:56:42 PM	BCl3 valve closed
12/21/2010	3:56:42 PM	PH3 valve closed
12/21/2010	3:56:42 PM	SiCl4 pre valve closed
12/21/2010	3:56:42 PM	SiCl4 post valve closed
12/21/2010	3:56:42 PM	Bubbler valve closed
12/21/2010	3:56:42 PM	Main Vac valve opened
12/21/2010	3:56:42 PM	Bypass valve opened
12/21/2010	3:56:42 PM	Helium MFC set to  0.000000
12/21/2010	3:56:42 PM	H2 MFC set to  0.000000
12/21/2010	3:56:42 PM	BCl3 MFC set to  0.000000
12/21/2010	3:56:42 PM	PHl3 MFC set to  0.000000
12/21/2010	3:56:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:56:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:56:42 PM	Tube furnace set to 0
12/21/2010	3:57:35 PM	H2 valve closed
12/21/2010	3:57:35 PM	BCl3 valve closed
12/21/2010	3:57:35 PM	PH3 valve closed
12/21/2010	3:57:35 PM	SiCl4 pre valve closed
12/21/2010	3:57:35 PM	SiCl4 post valve closed
12/21/2010	3:57:35 PM	Bubbler valve closed
12/21/2010	3:57:35 PM	Helium valve opened
12/21/2010	3:57:35 PM	Main Vac valve opened
12/21/2010	3:57:35 PM	Bypass valve opened
12/21/2010	3:57:35 PM	Helium MFC set to  100.000000
12/21/2010	3:57:35 PM	H2 MFC set to  0.000000
12/21/2010	3:57:35 PM	BCl3 MFC set to  0.000000
12/21/2010	3:57:35 PM	PHl3 MFC set to  0.000000
12/21/2010	3:57:35 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:57:35 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:57:35 PM	Tube furnace set to 0
12/21/2010	3:58:08 PM	Helium valve closed
12/21/2010	3:58:08 PM	H2 valve closed
12/21/2010	3:58:08 PM	BCl3 valve closed
12/21/2010	3:58:08 PM	PH3 valve closed
12/21/2010	3:58:08 PM	SiCl4 pre valve closed
12/21/2010	3:58:08 PM	SiCl4 post valve closed
12/21/2010	3:58:08 PM	Bubbler valve closed
12/21/2010	3:58:08 PM	Main Vac valve opened
12/21/2010	3:58:08 PM	Bypass valve opened
12/21/2010	3:58:08 PM	Helium MFC set to  0.000000
12/21/2010	3:58:08 PM	H2 MFC set to  0.000000
12/21/2010	3:58:08 PM	BCl3 MFC set to  0.000000
12/21/2010	3:58:08 PM	PHl3 MFC set to  0.000000
12/21/2010	3:58:08 PM	SiCl4 MFC set to  0.000000
12/21/2010	3:58:08 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	3:58:08 PM	Tube furnace set to 0
12/21/2010	3:58:09 PM	Run finished at 3:58 PM
12/21/2010	3:58:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	3:58:26 PM	Helium MFC set to  50.000000
12/21/2010	3:58:27 PM	Helium valve opened
12/21/2010	4:01:36 PM	Helium valve closed
12/21/2010	4:02:46 PM	Recipe started at 4:02 PM
12/21/2010	4:02:46 PM	Helium valve closed
12/21/2010	4:02:46 PM	BCl3 valve closed
12/21/2010	4:02:46 PM	PH3 valve closed
12/21/2010	4:02:46 PM	SiCl4 pre valve closed
12/21/2010	4:02:46 PM	SiCl4 post valve closed
12/21/2010	4:02:46 PM	Main Vac valve closed
12/21/2010	4:02:46 PM	Bypass valve closed
12/21/2010	4:02:46 PM	Bubbler valve closed
12/21/2010	4:02:46 PM	H2 valve opened
12/21/2010	4:02:46 PM	Helium MFC set to  0.000000
12/21/2010	4:02:46 PM	H2 MFC set to  500.000000
12/21/2010	4:02:46 PM	BCl3 MFC set to  0.000000
12/21/2010	4:02:46 PM	PHl3 MFC set to  0.000000
12/21/2010	4:02:46 PM	SiCl4 MFC set to  0.000000
12/21/2010	4:02:46 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	4:02:46 PM	Tube furnace set to 300
12/21/2010	4:04:05 PM	Helium valve closed
12/21/2010	4:04:05 PM	BCl3 valve closed
12/21/2010	4:04:05 PM	PH3 valve closed
12/21/2010	4:04:05 PM	SiCl4 pre valve closed
12/21/2010	4:04:05 PM	SiCl4 post valve closed
12/21/2010	4:04:05 PM	Main Vac valve closed
12/21/2010	4:04:05 PM	Bypass valve closed
12/21/2010	4:04:05 PM	H2 valve opened
12/21/2010	4:04:05 PM	Bubbler valve opened
12/21/2010	4:04:05 PM	Helium MFC set to  0.000000
12/21/2010	4:04:05 PM	H2 MFC set to  400.000000
12/21/2010	4:04:05 PM	BCl3 MFC set to  0.000000
12/21/2010	4:04:05 PM	PHl3 MFC set to  0.000000
12/21/2010	4:04:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	4:04:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	4:04:06 PM	Tube furnace set to 1001
12/21/2010	4:28:06 PM	Helium valve closed
12/21/2010	4:28:06 PM	PH3 valve closed
12/21/2010	4:28:06 PM	Main Vac valve closed
12/21/2010	4:28:06 PM	Bypass valve closed
12/21/2010	4:28:06 PM	H2 valve opened
12/21/2010	4:28:06 PM	BCl3 valve opened
12/21/2010	4:28:06 PM	SiCl4 pre valve opened
12/21/2010	4:28:06 PM	SiCl4 post valve opened
12/21/2010	4:28:06 PM	Bubbler valve opened
12/21/2010	4:28:06 PM	Helium MFC set to  0.000000
12/21/2010	4:28:06 PM	H2 MFC set to  500.000000
12/21/2010	4:28:06 PM	BCl3 MFC set to  10.000000
12/21/2010	4:28:06 PM	PHl3 MFC set to  0.000000
12/21/2010	4:28:06 PM	SiCl4 MFC set to  50.000000
12/21/2010	4:28:06 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	4:28:06 PM	Tube furnace set to 1000
12/21/2010	4:43:06 PM	Helium valve closed
12/21/2010	4:43:06 PM	BCl3 valve closed
12/21/2010	4:43:06 PM	PH3 valve closed
12/21/2010	4:43:06 PM	SiCl4 pre valve closed
12/21/2010	4:43:06 PM	SiCl4 post valve closed
12/21/2010	4:43:06 PM	Main Vac valve closed
12/21/2010	4:43:06 PM	Bypass valve closed
12/21/2010	4:43:06 PM	H2 valve opened
12/21/2010	4:43:06 PM	Bubbler valve opened
12/21/2010	4:43:06 PM	Helium MFC set to  0.000000
12/21/2010	4:43:06 PM	H2 MFC set to  500.000000
12/21/2010	4:43:06 PM	BCl3 MFC set to  0.000000
12/21/2010	4:43:06 PM	PHl3 MFC set to  0.000000
12/21/2010	4:43:06 PM	SiCl4 MFC set to  0.000000
12/21/2010	4:43:06 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	4:43:06 PM	Tube furnace set to 0
12/21/2010	4:43:26 PM	H2 valve closed
12/21/2010	4:43:26 PM	BCl3 valve closed
12/21/2010	4:43:26 PM	PH3 valve closed
12/21/2010	4:43:26 PM	SiCl4 pre valve closed
12/21/2010	4:43:26 PM	SiCl4 post valve closed
12/21/2010	4:43:26 PM	Main Vac valve closed
12/21/2010	4:43:26 PM	Bypass valve closed
12/21/2010	4:43:26 PM	Helium valve opened
12/21/2010	4:43:26 PM	Bubbler valve opened
12/21/2010	4:43:26 PM	Helium MFC set to  400.000000
12/21/2010	4:43:26 PM	H2 MFC set to  0.000000
12/21/2010	4:43:26 PM	BCl3 MFC set to  0.000000
12/21/2010	4:43:26 PM	PHl3 MFC set to  0.000000
12/21/2010	4:43:26 PM	SiCl4 MFC set to  0.000000
12/21/2010	4:43:26 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	4:43:26 PM	Tube furnace set to 0
12/21/2010	5:03:26 PM	Helium valve closed
12/21/2010	5:03:26 PM	H2 valve closed
12/21/2010	5:03:26 PM	BCl3 valve closed
12/21/2010	5:03:26 PM	PH3 valve closed
12/21/2010	5:03:26 PM	SiCl4 pre valve closed
12/21/2010	5:03:26 PM	SiCl4 post valve closed
12/21/2010	5:03:26 PM	Main Vac valve closed
12/21/2010	5:03:26 PM	Bypass valve closed
12/21/2010	5:03:26 PM	Bubbler valve closed
12/21/2010	5:03:26 PM	Helium MFC set to  0.000000
12/21/2010	5:03:26 PM	H2 MFC set to  0.000000
12/21/2010	5:03:26 PM	BCl3 MFC set to  0.000000
12/21/2010	5:03:26 PM	PHl3 MFC set to  0.000000
12/21/2010	5:03:26 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:03:26 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:03:26 PM	Tube furnace set to 0
12/21/2010	5:03:27 PM	Run finished at 5:03 PM
12/21/2010	5:07:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	5:08:05 PM	Recipe started at 5:07 PM
12/21/2010	5:08:05 PM	Helium valve closed
12/21/2010	5:08:05 PM	H2 valve closed
12/21/2010	5:08:05 PM	BCl3 valve closed
12/21/2010	5:08:05 PM	PH3 valve closed
12/21/2010	5:08:05 PM	SiCl4 pre valve closed
12/21/2010	5:08:05 PM	SiCl4 post valve closed
12/21/2010	5:08:05 PM	Main Vac valve closed
12/21/2010	5:08:05 PM	Bubbler valve closed
12/21/2010	5:08:05 PM	Bypass valve opened
12/21/2010	5:08:05 PM	Helium MFC set to  0.000000
12/21/2010	5:08:05 PM	H2 MFC set to  0.000000
12/21/2010	5:08:05 PM	BCl3 MFC set to  0.000000
12/21/2010	5:08:05 PM	PHl3 MFC set to  0.000000
12/21/2010	5:08:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:08:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:08:06 PM	Tube furnace set to 0
12/21/2010	5:09:04 PM	Helium valve closed
12/21/2010	5:09:04 PM	H2 valve closed
12/21/2010	5:09:04 PM	BCl3 valve closed
12/21/2010	5:09:04 PM	PH3 valve closed
12/21/2010	5:09:04 PM	SiCl4 pre valve closed
12/21/2010	5:09:04 PM	SiCl4 post valve closed
12/21/2010	5:09:04 PM	Bubbler valve closed
12/21/2010	5:09:04 PM	Main Vac valve opened
12/21/2010	5:09:04 PM	Bypass valve opened
12/21/2010	5:09:04 PM	Helium MFC set to  0.000000
12/21/2010	5:09:04 PM	H2 MFC set to  0.000000
12/21/2010	5:09:04 PM	BCl3 MFC set to  0.000000
12/21/2010	5:09:04 PM	PHl3 MFC set to  0.000000
12/21/2010	5:09:04 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:09:04 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:09:05 PM	Tube furnace set to 0
12/21/2010	5:10:05 PM	H2 valve closed
12/21/2010	5:10:05 PM	BCl3 valve closed
12/21/2010	5:10:05 PM	PH3 valve closed
12/21/2010	5:10:05 PM	SiCl4 pre valve closed
12/21/2010	5:10:05 PM	SiCl4 post valve closed
12/21/2010	5:10:05 PM	Bubbler valve closed
12/21/2010	5:10:05 PM	Helium valve opened
12/21/2010	5:10:05 PM	Main Vac valve opened
12/21/2010	5:10:05 PM	Bypass valve opened
12/21/2010	5:10:05 PM	Helium MFC set to  100.000000
12/21/2010	5:10:05 PM	H2 MFC set to  0.000000
12/21/2010	5:10:05 PM	BCl3 MFC set to  0.000000
12/21/2010	5:10:05 PM	PHl3 MFC set to  0.000000
12/21/2010	5:10:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:10:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:10:05 PM	Tube furnace set to 0
12/21/2010	5:11:05 PM	Helium valve closed
12/21/2010	5:11:05 PM	H2 valve closed
12/21/2010	5:11:05 PM	BCl3 valve closed
12/21/2010	5:11:05 PM	PH3 valve closed
12/21/2010	5:11:05 PM	SiCl4 pre valve closed
12/21/2010	5:11:05 PM	SiCl4 post valve closed
12/21/2010	5:11:05 PM	Bubbler valve closed
12/21/2010	5:11:05 PM	Main Vac valve opened
12/21/2010	5:11:05 PM	Bypass valve opened
12/21/2010	5:11:05 PM	Helium MFC set to  0.000000
12/21/2010	5:11:05 PM	H2 MFC set to  0.000000
12/21/2010	5:11:05 PM	BCl3 MFC set to  0.000000
12/21/2010	5:11:05 PM	PHl3 MFC set to  0.000000
12/21/2010	5:11:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:11:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:11:05 PM	Tube furnace set to 0
12/21/2010	5:12:05 PM	H2 valve closed
12/21/2010	5:12:05 PM	BCl3 valve closed
12/21/2010	5:12:05 PM	PH3 valve closed
12/21/2010	5:12:05 PM	SiCl4 pre valve closed
12/21/2010	5:12:05 PM	SiCl4 post valve closed
12/21/2010	5:12:05 PM	Bubbler valve closed
12/21/2010	5:12:05 PM	Helium valve opened
12/21/2010	5:12:05 PM	Main Vac valve opened
12/21/2010	5:12:05 PM	Bypass valve opened
12/21/2010	5:12:05 PM	Helium MFC set to  100.000000
12/21/2010	5:12:05 PM	H2 MFC set to  0.000000
12/21/2010	5:12:05 PM	BCl3 MFC set to  0.000000
12/21/2010	5:12:05 PM	PHl3 MFC set to  0.000000
12/21/2010	5:12:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:12:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:12:05 PM	Tube furnace set to 0
12/21/2010	5:13:05 PM	Helium valve closed
12/21/2010	5:13:05 PM	H2 valve closed
12/21/2010	5:13:05 PM	BCl3 valve closed
12/21/2010	5:13:05 PM	PH3 valve closed
12/21/2010	5:13:05 PM	SiCl4 pre valve closed
12/21/2010	5:13:05 PM	SiCl4 post valve closed
12/21/2010	5:13:05 PM	Bubbler valve closed
12/21/2010	5:13:05 PM	Main Vac valve opened
12/21/2010	5:13:05 PM	Bypass valve opened
12/21/2010	5:13:05 PM	Helium MFC set to  0.000000
12/21/2010	5:13:05 PM	H2 MFC set to  0.000000
12/21/2010	5:13:05 PM	BCl3 MFC set to  0.000000
12/21/2010	5:13:05 PM	PHl3 MFC set to  0.000000
12/21/2010	5:13:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:13:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:13:05 PM	Tube furnace set to 0
12/21/2010	5:13:30 PM	H2 valve closed
12/21/2010	5:13:30 PM	BCl3 valve closed
12/21/2010	5:13:30 PM	PH3 valve closed
12/21/2010	5:13:30 PM	SiCl4 pre valve closed
12/21/2010	5:13:30 PM	SiCl4 post valve closed
12/21/2010	5:13:30 PM	Bubbler valve closed
12/21/2010	5:13:30 PM	Helium valve opened
12/21/2010	5:13:30 PM	Main Vac valve opened
12/21/2010	5:13:30 PM	Bypass valve opened
12/21/2010	5:13:30 PM	Helium MFC set to  100.000000
12/21/2010	5:13:30 PM	H2 MFC set to  0.000000
12/21/2010	5:13:30 PM	BCl3 MFC set to  0.000000
12/21/2010	5:13:30 PM	PHl3 MFC set to  0.000000
12/21/2010	5:13:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:13:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:13:30 PM	Tube furnace set to 0
12/21/2010	5:14:30 PM	Helium valve closed
12/21/2010	5:14:30 PM	H2 valve closed
12/21/2010	5:14:30 PM	BCl3 valve closed
12/21/2010	5:14:30 PM	PH3 valve closed
12/21/2010	5:14:30 PM	SiCl4 pre valve closed
12/21/2010	5:14:30 PM	SiCl4 post valve closed
12/21/2010	5:14:30 PM	Bubbler valve closed
12/21/2010	5:14:30 PM	Main Vac valve opened
12/21/2010	5:14:30 PM	Bypass valve opened
12/21/2010	5:14:30 PM	Helium MFC set to  0.000000
12/21/2010	5:14:30 PM	H2 MFC set to  0.000000
12/21/2010	5:14:30 PM	BCl3 MFC set to  0.000000
12/21/2010	5:14:30 PM	PHl3 MFC set to  0.000000
12/21/2010	5:14:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:14:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:14:30 PM	Tube furnace set to 0
12/21/2010	5:15:30 PM	H2 valve closed
12/21/2010	5:15:30 PM	BCl3 valve closed
12/21/2010	5:15:30 PM	PH3 valve closed
12/21/2010	5:15:30 PM	SiCl4 pre valve closed
12/21/2010	5:15:30 PM	SiCl4 post valve closed
12/21/2010	5:15:30 PM	Bubbler valve closed
12/21/2010	5:15:30 PM	Helium valve opened
12/21/2010	5:15:30 PM	Main Vac valve opened
12/21/2010	5:15:30 PM	Bypass valve opened
12/21/2010	5:15:30 PM	Helium MFC set to  100.000000
12/21/2010	5:15:30 PM	H2 MFC set to  0.000000
12/21/2010	5:15:30 PM	BCl3 MFC set to  0.000000
12/21/2010	5:15:30 PM	PHl3 MFC set to  0.000000
12/21/2010	5:15:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:15:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:15:30 PM	Tube furnace set to 0
12/21/2010	5:16:30 PM	Helium valve closed
12/21/2010	5:16:30 PM	H2 valve closed
12/21/2010	5:16:30 PM	BCl3 valve closed
12/21/2010	5:16:30 PM	PH3 valve closed
12/21/2010	5:16:30 PM	SiCl4 pre valve closed
12/21/2010	5:16:30 PM	SiCl4 post valve closed
12/21/2010	5:16:30 PM	Bubbler valve closed
12/21/2010	5:16:30 PM	Main Vac valve opened
12/21/2010	5:16:30 PM	Bypass valve opened
12/21/2010	5:16:30 PM	Helium MFC set to  0.000000
12/21/2010	5:16:30 PM	H2 MFC set to  0.000000
12/21/2010	5:16:30 PM	BCl3 MFC set to  0.000000
12/21/2010	5:16:30 PM	PHl3 MFC set to  0.000000
12/21/2010	5:16:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:16:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:16:30 PM	Tube furnace set to 0
12/21/2010	5:17:30 PM	H2 valve closed
12/21/2010	5:17:30 PM	BCl3 valve closed
12/21/2010	5:17:30 PM	PH3 valve closed
12/21/2010	5:17:30 PM	SiCl4 pre valve closed
12/21/2010	5:17:30 PM	SiCl4 post valve closed
12/21/2010	5:17:30 PM	Bubbler valve closed
12/21/2010	5:17:30 PM	Helium valve opened
12/21/2010	5:17:30 PM	Main Vac valve opened
12/21/2010	5:17:30 PM	Bypass valve opened
12/21/2010	5:17:30 PM	Helium MFC set to  100.000000
12/21/2010	5:17:30 PM	H2 MFC set to  0.000000
12/21/2010	5:17:30 PM	BCl3 MFC set to  0.000000
12/21/2010	5:17:30 PM	PHl3 MFC set to  0.000000
12/21/2010	5:17:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:17:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:17:31 PM	Tube furnace set to 0
12/21/2010	5:18:31 PM	Helium valve closed
12/21/2010	5:18:31 PM	H2 valve closed
12/21/2010	5:18:31 PM	BCl3 valve closed
12/21/2010	5:18:31 PM	PH3 valve closed
12/21/2010	5:18:31 PM	SiCl4 pre valve closed
12/21/2010	5:18:31 PM	SiCl4 post valve closed
12/21/2010	5:18:31 PM	Bubbler valve closed
12/21/2010	5:18:31 PM	Main Vac valve opened
12/21/2010	5:18:31 PM	Bypass valve opened
12/21/2010	5:18:31 PM	Helium MFC set to  0.000000
12/21/2010	5:18:31 PM	H2 MFC set to  0.000000
12/21/2010	5:18:31 PM	BCl3 MFC set to  0.000000
12/21/2010	5:18:31 PM	PHl3 MFC set to  0.000000
12/21/2010	5:18:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:18:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:18:31 PM	Tube furnace set to 0
12/21/2010	5:19:31 PM	H2 valve closed
12/21/2010	5:19:31 PM	BCl3 valve closed
12/21/2010	5:19:31 PM	PH3 valve closed
12/21/2010	5:19:31 PM	SiCl4 pre valve closed
12/21/2010	5:19:31 PM	SiCl4 post valve closed
12/21/2010	5:19:31 PM	Bubbler valve closed
12/21/2010	5:19:31 PM	Helium valve opened
12/21/2010	5:19:31 PM	Main Vac valve opened
12/21/2010	5:19:31 PM	Bypass valve opened
12/21/2010	5:19:31 PM	Helium MFC set to  100.000000
12/21/2010	5:19:31 PM	H2 MFC set to  0.000000
12/21/2010	5:19:31 PM	BCl3 MFC set to  0.000000
12/21/2010	5:19:31 PM	PHl3 MFC set to  0.000000
12/21/2010	5:19:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:19:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:19:31 PM	Tube furnace set to 0
12/21/2010	5:20:31 PM	Helium valve closed
12/21/2010	5:20:31 PM	H2 valve closed
12/21/2010	5:20:31 PM	BCl3 valve closed
12/21/2010	5:20:31 PM	PH3 valve closed
12/21/2010	5:20:31 PM	SiCl4 pre valve closed
12/21/2010	5:20:31 PM	SiCl4 post valve closed
12/21/2010	5:20:31 PM	Bubbler valve closed
12/21/2010	5:20:31 PM	Main Vac valve opened
12/21/2010	5:20:31 PM	Bypass valve opened
12/21/2010	5:20:31 PM	Helium MFC set to  0.000000
12/21/2010	5:20:31 PM	H2 MFC set to  0.000000
12/21/2010	5:20:31 PM	BCl3 MFC set to  0.000000
12/21/2010	5:20:31 PM	PHl3 MFC set to  0.000000
12/21/2010	5:20:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:20:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:20:31 PM	Tube furnace set to 0
12/21/2010	5:21:31 PM	H2 valve closed
12/21/2010	5:21:31 PM	BCl3 valve closed
12/21/2010	5:21:31 PM	PH3 valve closed
12/21/2010	5:21:31 PM	SiCl4 pre valve closed
12/21/2010	5:21:31 PM	SiCl4 post valve closed
12/21/2010	5:21:31 PM	Bubbler valve closed
12/21/2010	5:21:31 PM	Helium valve opened
12/21/2010	5:21:31 PM	Main Vac valve opened
12/21/2010	5:21:31 PM	Bypass valve opened
12/21/2010	5:21:31 PM	Helium MFC set to  100.000000
12/21/2010	5:21:31 PM	H2 MFC set to  0.000000
12/21/2010	5:21:31 PM	BCl3 MFC set to  0.000000
12/21/2010	5:21:31 PM	PHl3 MFC set to  0.000000
12/21/2010	5:21:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:21:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:21:31 PM	Tube furnace set to 0
12/21/2010	5:22:31 PM	Helium valve closed
12/21/2010	5:22:31 PM	H2 valve closed
12/21/2010	5:22:31 PM	BCl3 valve closed
12/21/2010	5:22:31 PM	PH3 valve closed
12/21/2010	5:22:31 PM	SiCl4 pre valve closed
12/21/2010	5:22:31 PM	SiCl4 post valve closed
12/21/2010	5:22:31 PM	Bubbler valve closed
12/21/2010	5:22:31 PM	Main Vac valve opened
12/21/2010	5:22:31 PM	Bypass valve opened
12/21/2010	5:22:31 PM	Helium MFC set to  0.000000
12/21/2010	5:22:31 PM	H2 MFC set to  0.000000
12/21/2010	5:22:31 PM	BCl3 MFC set to  0.000000
12/21/2010	5:22:31 PM	PHl3 MFC set to  0.000000
12/21/2010	5:22:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:22:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:22:32 PM	Tube furnace set to 0
12/21/2010	5:23:32 PM	H2 valve closed
12/21/2010	5:23:32 PM	BCl3 valve closed
12/21/2010	5:23:32 PM	PH3 valve closed
12/21/2010	5:23:32 PM	SiCl4 pre valve closed
12/21/2010	5:23:32 PM	SiCl4 post valve closed
12/21/2010	5:23:32 PM	Bubbler valve closed
12/21/2010	5:23:32 PM	Helium valve opened
12/21/2010	5:23:32 PM	Main Vac valve opened
12/21/2010	5:23:32 PM	Bypass valve opened
12/21/2010	5:23:32 PM	Helium MFC set to  100.000000
12/21/2010	5:23:32 PM	H2 MFC set to  0.000000
12/21/2010	5:23:32 PM	BCl3 MFC set to  0.000000
12/21/2010	5:23:32 PM	PHl3 MFC set to  0.000000
12/21/2010	5:23:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:23:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:23:32 PM	Tube furnace set to 0
12/21/2010	5:24:32 PM	Helium valve closed
12/21/2010	5:24:32 PM	H2 valve closed
12/21/2010	5:24:32 PM	BCl3 valve closed
12/21/2010	5:24:32 PM	PH3 valve closed
12/21/2010	5:24:32 PM	SiCl4 pre valve closed
12/21/2010	5:24:32 PM	SiCl4 post valve closed
12/21/2010	5:24:32 PM	Bubbler valve closed
12/21/2010	5:24:32 PM	Main Vac valve opened
12/21/2010	5:24:32 PM	Bypass valve opened
12/21/2010	5:24:32 PM	Helium MFC set to  0.000000
12/21/2010	5:24:32 PM	H2 MFC set to  0.000000
12/21/2010	5:24:32 PM	BCl3 MFC set to  0.000000
12/21/2010	5:24:32 PM	PHl3 MFC set to  0.000000
12/21/2010	5:24:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:24:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:24:32 PM	Tube furnace set to 0
12/21/2010	5:25:32 PM	H2 valve closed
12/21/2010	5:25:32 PM	BCl3 valve closed
12/21/2010	5:25:32 PM	PH3 valve closed
12/21/2010	5:25:32 PM	SiCl4 pre valve closed
12/21/2010	5:25:32 PM	SiCl4 post valve closed
12/21/2010	5:25:32 PM	Bubbler valve closed
12/21/2010	5:25:32 PM	Helium valve opened
12/21/2010	5:25:32 PM	Main Vac valve opened
12/21/2010	5:25:32 PM	Bypass valve opened
12/21/2010	5:25:32 PM	Helium MFC set to  100.000000
12/21/2010	5:25:32 PM	H2 MFC set to  0.000000
12/21/2010	5:25:32 PM	BCl3 MFC set to  0.000000
12/21/2010	5:25:32 PM	PHl3 MFC set to  0.000000
12/21/2010	5:25:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:25:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:25:32 PM	Tube furnace set to 0
12/21/2010	5:26:32 PM	Helium valve closed
12/21/2010	5:26:32 PM	H2 valve closed
12/21/2010	5:26:32 PM	BCl3 valve closed
12/21/2010	5:26:32 PM	PH3 valve closed
12/21/2010	5:26:32 PM	SiCl4 pre valve closed
12/21/2010	5:26:32 PM	SiCl4 post valve closed
12/21/2010	5:26:32 PM	Bubbler valve closed
12/21/2010	5:26:32 PM	Main Vac valve opened
12/21/2010	5:26:32 PM	Bypass valve opened
12/21/2010	5:26:32 PM	Helium MFC set to  0.000000
12/21/2010	5:26:32 PM	H2 MFC set to  0.000000
12/21/2010	5:26:32 PM	BCl3 MFC set to  0.000000
12/21/2010	5:26:32 PM	PHl3 MFC set to  0.000000
12/21/2010	5:26:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:26:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:26:32 PM	Tube furnace set to 0
12/21/2010	5:27:32 PM	H2 valve closed
12/21/2010	5:27:32 PM	BCl3 valve closed
12/21/2010	5:27:32 PM	PH3 valve closed
12/21/2010	5:27:32 PM	SiCl4 pre valve closed
12/21/2010	5:27:32 PM	SiCl4 post valve closed
12/21/2010	5:27:32 PM	Bubbler valve closed
12/21/2010	5:27:32 PM	Helium valve opened
12/21/2010	5:27:32 PM	Main Vac valve opened
12/21/2010	5:27:32 PM	Bypass valve opened
12/21/2010	5:27:32 PM	Helium MFC set to  100.000000
12/21/2010	5:27:32 PM	H2 MFC set to  0.000000
12/21/2010	5:27:33 PM	BCl3 MFC set to  0.000000
12/21/2010	5:27:33 PM	PHl3 MFC set to  0.000000
12/21/2010	5:27:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:27:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:27:33 PM	Tube furnace set to 0
12/21/2010	5:28:06 PM	Helium valve closed
12/21/2010	5:28:06 PM	H2 valve closed
12/21/2010	5:28:06 PM	BCl3 valve closed
12/21/2010	5:28:06 PM	PH3 valve closed
12/21/2010	5:28:06 PM	SiCl4 pre valve closed
12/21/2010	5:28:06 PM	SiCl4 post valve closed
12/21/2010	5:28:06 PM	Bubbler valve closed
12/21/2010	5:28:06 PM	Main Vac valve opened
12/21/2010	5:28:06 PM	Bypass valve opened
12/21/2010	5:28:06 PM	Helium MFC set to  0.000000
12/21/2010	5:28:06 PM	H2 MFC set to  0.000000
12/21/2010	5:28:06 PM	BCl3 MFC set to  0.000000
12/21/2010	5:28:06 PM	PHl3 MFC set to  0.000000
12/21/2010	5:28:06 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:28:06 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:28:07 PM	Tube furnace set to 0
12/21/2010	5:28:08 PM	Run finished at 5:28 PM
12/21/2010	5:28:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	5:29:01 PM	Helium MFC set to  50.000000
12/21/2010	5:29:02 PM	Helium valve opened
12/21/2010	5:31:22 PM	Helium valve closed
12/21/2010	5:33:31 PM	Helium valve opened
12/21/2010	5:36:46 PM	Helium valve closed
12/21/2010	5:38:42 PM	Helium valve opened
12/21/2010	5:42:45 PM	Helium valve closed
12/21/2010	5:46:49 PM	Helium valve opened
12/21/2010	5:53:04 PM	Helium valve closed
12/21/2010	5:56:33 PM	Recipe started at 5:56 PM
12/21/2010	5:56:33 PM	Helium valve closed
12/21/2010	5:56:33 PM	BCl3 valve closed
12/21/2010	5:56:33 PM	PH3 valve closed
12/21/2010	5:56:33 PM	SiCl4 pre valve closed
12/21/2010	5:56:33 PM	SiCl4 post valve closed
12/21/2010	5:56:33 PM	Main Vac valve closed
12/21/2010	5:56:33 PM	Bypass valve closed
12/21/2010	5:56:33 PM	Bubbler valve closed
12/21/2010	5:56:33 PM	H2 valve opened
12/21/2010	5:56:33 PM	Helium MFC set to  0.000000
12/21/2010	5:56:33 PM	H2 MFC set to  500.000000
12/21/2010	5:56:33 PM	BCl3 MFC set to  0.000000
12/21/2010	5:56:33 PM	PHl3 MFC set to  0.000000
12/21/2010	5:56:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:56:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:56:33 PM	Tube furnace set to 200
12/21/2010	5:57:52 PM	Helium valve closed
12/21/2010	5:57:52 PM	BCl3 valve closed
12/21/2010	5:57:52 PM	PH3 valve closed
12/21/2010	5:57:52 PM	SiCl4 pre valve closed
12/21/2010	5:57:52 PM	SiCl4 post valve closed
12/21/2010	5:57:52 PM	Main Vac valve closed
12/21/2010	5:57:52 PM	Bypass valve closed
12/21/2010	5:57:52 PM	H2 valve opened
12/21/2010	5:57:52 PM	Bubbler valve opened
12/21/2010	5:57:52 PM	Helium MFC set to  0.000000
12/21/2010	5:57:52 PM	H2 MFC set to  500.000000
12/21/2010	5:57:52 PM	BCl3 MFC set to  0.000000
12/21/2010	5:57:52 PM	PHl3 MFC set to  0.000000
12/21/2010	5:57:52 PM	SiCl4 MFC set to  0.000000
12/21/2010	5:57:52 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	5:57:52 PM	Tube furnace set to 1001
12/21/2010	6:18:52 PM	Helium valve closed
12/21/2010	6:18:52 PM	PH3 valve closed
12/21/2010	6:18:52 PM	Main Vac valve closed
12/21/2010	6:18:52 PM	Bypass valve closed
12/21/2010	6:18:52 PM	H2 valve opened
12/21/2010	6:18:52 PM	BCl3 valve opened
12/21/2010	6:18:52 PM	SiCl4 pre valve opened
12/21/2010	6:18:52 PM	SiCl4 post valve opened
12/21/2010	6:18:52 PM	Bubbler valve opened
12/21/2010	6:18:52 PM	Helium MFC set to  0.000000
12/21/2010	6:18:52 PM	H2 MFC set to  500.000000
12/21/2010	6:18:52 PM	BCl3 MFC set to  10.000000
12/21/2010	6:18:52 PM	PHl3 MFC set to  0.000000
12/21/2010	6:18:52 PM	SiCl4 MFC set to  50.000000
12/21/2010	6:18:52 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:18:52 PM	Tube furnace set to 1000
12/21/2010	6:33:52 PM	H2 valve closed
12/21/2010	6:33:52 PM	BCl3 valve closed
12/21/2010	6:33:52 PM	PH3 valve closed
12/21/2010	6:33:52 PM	SiCl4 pre valve closed
12/21/2010	6:33:52 PM	SiCl4 post valve closed
12/21/2010	6:33:52 PM	Main Vac valve closed
12/21/2010	6:33:52 PM	Bypass valve closed
12/21/2010	6:33:52 PM	Helium valve opened
12/21/2010	6:33:52 PM	Bubbler valve opened
12/21/2010	6:33:52 PM	Helium MFC set to  500.000000
12/21/2010	6:33:52 PM	H2 MFC set to  0.000000
12/21/2010	6:33:52 PM	BCl3 MFC set to  0.000000
12/21/2010	6:33:52 PM	PHl3 MFC set to  0.000000
12/21/2010	6:33:52 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:33:52 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:33:53 PM	Tube furnace set to 0
12/21/2010	6:37:53 PM	Helium valve closed
12/21/2010	6:37:53 PM	H2 valve closed
12/21/2010	6:37:53 PM	BCl3 valve closed
12/21/2010	6:37:53 PM	PH3 valve closed
12/21/2010	6:37:53 PM	SiCl4 pre valve closed
12/21/2010	6:37:53 PM	SiCl4 post valve closed
12/21/2010	6:37:53 PM	Main Vac valve closed
12/21/2010	6:37:53 PM	Bypass valve closed
12/21/2010	6:37:53 PM	Bubbler valve closed
12/21/2010	6:37:53 PM	Helium MFC set to  0.000000
12/21/2010	6:37:53 PM	H2 MFC set to  0.000000
12/21/2010	6:37:53 PM	BCl3 MFC set to  0.000000
12/21/2010	6:37:53 PM	PHl3 MFC set to  0.000000
12/21/2010	6:37:53 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:37:53 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:37:53 PM	Tube furnace set to 0
12/21/2010	6:37:58 PM	Helium valve closed
12/21/2010	6:37:58 PM	H2 valve closed
12/21/2010	6:37:58 PM	BCl3 valve closed
12/21/2010	6:37:58 PM	PH3 valve closed
12/21/2010	6:37:58 PM	SiCl4 pre valve closed
12/21/2010	6:37:58 PM	SiCl4 post valve closed
12/21/2010	6:37:58 PM	Main Vac valve closed
12/21/2010	6:37:58 PM	Bubbler valve closed
12/21/2010	6:37:58 PM	Bypass valve opened
12/21/2010	6:37:58 PM	Helium MFC set to  0.000000
12/21/2010	6:37:58 PM	H2 MFC set to  0.000000
12/21/2010	6:37:58 PM	BCl3 MFC set to  0.000000
12/21/2010	6:37:58 PM	PHl3 MFC set to  0.000000
12/21/2010	6:37:58 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:37:58 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:37:58 PM	Tube furnace set to 0
12/21/2010	6:38:05 PM	H2 valve closed
12/21/2010	6:38:05 PM	BCl3 valve closed
12/21/2010	6:38:05 PM	PH3 valve closed
12/21/2010	6:38:05 PM	SiCl4 pre valve closed
12/21/2010	6:38:05 PM	SiCl4 post valve closed
12/21/2010	6:38:05 PM	Main Vac valve closed
12/21/2010	6:38:05 PM	Bypass valve closed
12/21/2010	6:38:05 PM	Bubbler valve closed
12/21/2010	6:38:05 PM	Helium valve opened
12/21/2010	6:38:05 PM	Helium MFC set to  500.000000
12/21/2010	6:38:05 PM	H2 MFC set to  0.000000
12/21/2010	6:38:05 PM	BCl3 MFC set to  0.000000
12/21/2010	6:38:05 PM	PHl3 MFC set to  0.000000
12/21/2010	6:38:05 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:38:05 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:38:05 PM	Tube furnace set to 0
12/21/2010	6:38:44 PM	H2 valve closed
12/21/2010	6:38:44 PM	BCl3 valve closed
12/21/2010	6:38:44 PM	PH3 valve closed
12/21/2010	6:38:44 PM	SiCl4 pre valve closed
12/21/2010	6:38:44 PM	SiCl4 post valve closed
12/21/2010	6:38:44 PM	Main Vac valve closed
12/21/2010	6:38:44 PM	Bypass valve closed
12/21/2010	6:38:44 PM	Helium valve opened
12/21/2010	6:38:44 PM	Bubbler valve opened
12/21/2010	6:38:44 PM	Helium MFC set to  500.000000
12/21/2010	6:38:44 PM	H2 MFC set to  0.000000
12/21/2010	6:38:44 PM	BCl3 MFC set to  0.000000
12/21/2010	6:38:44 PM	PHl3 MFC set to  0.000000
12/21/2010	6:38:44 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:38:44 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:38:44 PM	Tube furnace set to 0
12/21/2010	6:50:45 PM	Helium valve closed
12/21/2010	6:50:45 PM	H2 valve closed
12/21/2010	6:50:45 PM	BCl3 valve closed
12/21/2010	6:50:45 PM	PH3 valve closed
12/21/2010	6:50:45 PM	SiCl4 pre valve closed
12/21/2010	6:50:45 PM	SiCl4 post valve closed
12/21/2010	6:50:45 PM	Main Vac valve closed
12/21/2010	6:50:45 PM	Bypass valve closed
12/21/2010	6:50:45 PM	Bubbler valve closed
12/21/2010	6:50:45 PM	Helium MFC set to  0.000000
12/21/2010	6:50:45 PM	H2 MFC set to  0.000000
12/21/2010	6:50:45 PM	BCl3 MFC set to  0.000000
12/21/2010	6:50:45 PM	PHl3 MFC set to  0.000000
12/21/2010	6:50:45 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:50:45 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:50:46 PM	Tube furnace set to 0
12/21/2010	6:50:46 PM	Run finished at 6:50 PM
12/21/2010	6:54:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	6:54:02 PM	Recipe started at 6:54 PM
12/21/2010	6:54:02 PM	Helium valve closed
12/21/2010	6:54:02 PM	H2 valve closed
12/21/2010	6:54:02 PM	BCl3 valve closed
12/21/2010	6:54:02 PM	PH3 valve closed
12/21/2010	6:54:02 PM	SiCl4 pre valve closed
12/21/2010	6:54:02 PM	SiCl4 post valve closed
12/21/2010	6:54:02 PM	Main Vac valve closed
12/21/2010	6:54:02 PM	Bubbler valve closed
12/21/2010	6:54:02 PM	Bypass valve opened
12/21/2010	6:54:02 PM	Helium MFC set to  0.000000
12/21/2010	6:54:02 PM	H2 MFC set to  0.000000
12/21/2010	6:54:02 PM	BCl3 MFC set to  0.000000
12/21/2010	6:54:02 PM	PHl3 MFC set to  0.000000
12/21/2010	6:54:02 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:54:02 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:54:03 PM	Tube furnace set to 0
12/21/2010	6:54:57 PM	Helium valve closed
12/21/2010	6:54:57 PM	H2 valve closed
12/21/2010	6:54:57 PM	BCl3 valve closed
12/21/2010	6:54:57 PM	PH3 valve closed
12/21/2010	6:54:57 PM	SiCl4 pre valve closed
12/21/2010	6:54:57 PM	SiCl4 post valve closed
12/21/2010	6:54:57 PM	Bubbler valve closed
12/21/2010	6:54:57 PM	Main Vac valve opened
12/21/2010	6:54:57 PM	Bypass valve opened
12/21/2010	6:54:57 PM	Helium MFC set to  0.000000
12/21/2010	6:54:57 PM	H2 MFC set to  0.000000
12/21/2010	6:54:57 PM	BCl3 MFC set to  0.000000
12/21/2010	6:54:57 PM	PHl3 MFC set to  0.000000
12/21/2010	6:54:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	6:54:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	6:54:57 PM	Tube furnace set to 0
12/21/2010	6:54:57 PM	Run finished at 6:54 PM
12/21/2010	6:54:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	8:29:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	8:29:13 PM	Recipe started at 8:29 PM
12/21/2010	8:29:13 PM	H2 valve closed
12/21/2010	8:29:13 PM	BCl3 valve closed
12/21/2010	8:29:13 PM	PH3 valve closed
12/21/2010	8:29:13 PM	SiCl4 pre valve closed
12/21/2010	8:29:13 PM	SiCl4 post valve closed
12/21/2010	8:29:13 PM	Main Vac valve closed
12/21/2010	8:29:13 PM	Bypass valve closed
12/21/2010	8:29:13 PM	Bubbler valve closed
12/21/2010	8:29:13 PM	Helium valve opened
12/21/2010	8:29:13 PM	Helium MFC set to  500.000000
12/21/2010	8:29:13 PM	H2 MFC set to  0.000000
12/21/2010	8:29:13 PM	BCl3 MFC set to  0.000000
12/21/2010	8:29:13 PM	PHl3 MFC set to  0.000000
12/21/2010	8:29:13 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:29:13 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:29:13 PM	Tube furnace set to 0
12/21/2010	8:30:33 PM	Helium valve closed
12/21/2010	8:30:33 PM	H2 valve closed
12/21/2010	8:30:33 PM	BCl3 valve closed
12/21/2010	8:30:34 PM	PH3 valve closed
12/21/2010	8:30:34 PM	SiCl4 pre valve closed
12/21/2010	8:30:34 PM	SiCl4 post valve closed
12/21/2010	8:30:34 PM	Main Vac valve closed
12/21/2010	8:30:34 PM	Bypass valve closed
12/21/2010	8:30:34 PM	Bubbler valve closed
12/21/2010	8:30:34 PM	Helium MFC set to  0.000000
12/21/2010	8:30:34 PM	H2 MFC set to  0.000000
12/21/2010	8:30:34 PM	BCl3 MFC set to  0.000000
12/21/2010	8:30:34 PM	PHl3 MFC set to  0.000000
12/21/2010	8:30:34 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:30:34 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:30:34 PM	Tube furnace set to 0
12/21/2010	8:30:34 PM	Run finished at 8:30 PM
12/21/2010	8:30:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/21/2010	8:35:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	8:35:55 PM	Recipe started at 8:35 PM
12/21/2010	8:35:55 PM	Helium valve closed
12/21/2010	8:35:55 PM	H2 valve closed
12/21/2010	8:35:55 PM	BCl3 valve closed
12/21/2010	8:35:55 PM	PH3 valve closed
12/21/2010	8:35:55 PM	SiCl4 pre valve closed
12/21/2010	8:35:55 PM	SiCl4 post valve closed
12/21/2010	8:35:55 PM	Main Vac valve closed
12/21/2010	8:35:55 PM	Bubbler valve closed
12/21/2010	8:35:55 PM	Bypass valve opened
12/21/2010	8:35:55 PM	Helium MFC set to  0.000000
12/21/2010	8:35:55 PM	H2 MFC set to  0.000000
12/21/2010	8:35:55 PM	BCl3 MFC set to  0.000000
12/21/2010	8:35:55 PM	PHl3 MFC set to  0.000000
12/21/2010	8:35:55 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:35:55 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:35:56 PM	Tube furnace set to 0
12/21/2010	8:36:54 PM	Helium valve closed
12/21/2010	8:36:54 PM	H2 valve closed
12/21/2010	8:36:54 PM	BCl3 valve closed
12/21/2010	8:36:54 PM	PH3 valve closed
12/21/2010	8:36:54 PM	SiCl4 pre valve closed
12/21/2010	8:36:54 PM	SiCl4 post valve closed
12/21/2010	8:36:54 PM	Bubbler valve closed
12/21/2010	8:36:54 PM	Main Vac valve opened
12/21/2010	8:36:54 PM	Bypass valve opened
12/21/2010	8:36:54 PM	Helium MFC set to  0.000000
12/21/2010	8:36:54 PM	H2 MFC set to  0.000000
12/21/2010	8:36:54 PM	BCl3 MFC set to  0.000000
12/21/2010	8:36:54 PM	PHl3 MFC set to  0.000000
12/21/2010	8:36:54 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:36:54 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:36:54 PM	Tube furnace set to 0
12/21/2010	8:36:54 PM	Run finished at 8:36 PM
12/21/2010	8:36:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	8:37:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	8:37:38 PM	Recipe started at 8:37 PM
12/21/2010	8:37:38 PM	Helium valve closed
12/21/2010	8:37:38 PM	H2 valve closed
12/21/2010	8:37:38 PM	BCl3 valve closed
12/21/2010	8:37:38 PM	PH3 valve closed
12/21/2010	8:37:38 PM	SiCl4 pre valve closed
12/21/2010	8:37:38 PM	SiCl4 post valve closed
12/21/2010	8:37:38 PM	Main Vac valve closed
12/21/2010	8:37:38 PM	Bubbler valve closed
12/21/2010	8:37:38 PM	Bypass valve opened
12/21/2010	8:37:38 PM	Helium MFC set to  0.000000
12/21/2010	8:37:38 PM	H2 MFC set to  0.000000
12/21/2010	8:37:38 PM	BCl3 MFC set to  0.000000
12/21/2010	8:37:38 PM	PHl3 MFC set to  0.000000
12/21/2010	8:37:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:37:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:37:39 PM	Tube furnace set to 0
12/21/2010	8:37:39 PM	Helium valve closed
12/21/2010	8:37:39 PM	H2 valve closed
12/21/2010	8:37:39 PM	BCl3 valve closed
12/21/2010	8:37:39 PM	PH3 valve closed
12/21/2010	8:37:39 PM	SiCl4 pre valve closed
12/21/2010	8:37:39 PM	SiCl4 post valve closed
12/21/2010	8:37:39 PM	Bubbler valve closed
12/21/2010	8:37:39 PM	Main Vac valve opened
12/21/2010	8:37:39 PM	Bypass valve opened
12/21/2010	8:37:39 PM	Helium MFC set to  0.000000
12/21/2010	8:37:39 PM	H2 MFC set to  0.000000
12/21/2010	8:37:39 PM	BCl3 MFC set to  0.000000
12/21/2010	8:37:39 PM	PHl3 MFC set to  0.000000
12/21/2010	8:37:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:37:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:37:39 PM	Tube furnace set to 0
12/21/2010	8:38:39 PM	H2 valve closed
12/21/2010	8:38:39 PM	BCl3 valve closed
12/21/2010	8:38:39 PM	PH3 valve closed
12/21/2010	8:38:39 PM	SiCl4 pre valve closed
12/21/2010	8:38:39 PM	SiCl4 post valve closed
12/21/2010	8:38:39 PM	Bubbler valve closed
12/21/2010	8:38:39 PM	Helium valve opened
12/21/2010	8:38:39 PM	Main Vac valve opened
12/21/2010	8:38:39 PM	Bypass valve opened
12/21/2010	8:38:39 PM	Helium MFC set to  100.000000
12/21/2010	8:38:39 PM	H2 MFC set to  0.000000
12/21/2010	8:38:39 PM	BCl3 MFC set to  0.000000
12/21/2010	8:38:39 PM	PHl3 MFC set to  0.000000
12/21/2010	8:38:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:38:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:38:39 PM	Tube furnace set to 0
12/21/2010	8:39:39 PM	Helium valve closed
12/21/2010	8:39:39 PM	H2 valve closed
12/21/2010	8:39:39 PM	BCl3 valve closed
12/21/2010	8:39:39 PM	PH3 valve closed
12/21/2010	8:39:39 PM	SiCl4 pre valve closed
12/21/2010	8:39:39 PM	SiCl4 post valve closed
12/21/2010	8:39:39 PM	Bubbler valve closed
12/21/2010	8:39:39 PM	Main Vac valve opened
12/21/2010	8:39:39 PM	Bypass valve opened
12/21/2010	8:39:39 PM	Helium MFC set to  0.000000
12/21/2010	8:39:39 PM	H2 MFC set to  0.000000
12/21/2010	8:39:39 PM	BCl3 MFC set to  0.000000
12/21/2010	8:39:39 PM	PHl3 MFC set to  0.000000
12/21/2010	8:39:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:39:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:39:39 PM	Tube furnace set to 0
12/21/2010	8:40:39 PM	H2 valve closed
12/21/2010	8:40:39 PM	BCl3 valve closed
12/21/2010	8:40:39 PM	PH3 valve closed
12/21/2010	8:40:39 PM	SiCl4 pre valve closed
12/21/2010	8:40:39 PM	SiCl4 post valve closed
12/21/2010	8:40:39 PM	Bubbler valve closed
12/21/2010	8:40:39 PM	Helium valve opened
12/21/2010	8:40:39 PM	Main Vac valve opened
12/21/2010	8:40:39 PM	Bypass valve opened
12/21/2010	8:40:40 PM	Helium MFC set to  100.000000
12/21/2010	8:40:40 PM	H2 MFC set to  0.000000
12/21/2010	8:40:40 PM	BCl3 MFC set to  0.000000
12/21/2010	8:40:40 PM	PHl3 MFC set to  0.000000
12/21/2010	8:40:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:40:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:40:40 PM	Tube furnace set to 0
12/21/2010	8:41:40 PM	Helium valve closed
12/21/2010	8:41:40 PM	H2 valve closed
12/21/2010	8:41:40 PM	BCl3 valve closed
12/21/2010	8:41:40 PM	PH3 valve closed
12/21/2010	8:41:40 PM	SiCl4 pre valve closed
12/21/2010	8:41:40 PM	SiCl4 post valve closed
12/21/2010	8:41:40 PM	Bubbler valve closed
12/21/2010	8:41:40 PM	Main Vac valve opened
12/21/2010	8:41:40 PM	Bypass valve opened
12/21/2010	8:41:40 PM	Helium MFC set to  0.000000
12/21/2010	8:41:40 PM	H2 MFC set to  0.000000
12/21/2010	8:41:40 PM	BCl3 MFC set to  0.000000
12/21/2010	8:41:40 PM	PHl3 MFC set to  0.000000
12/21/2010	8:41:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:41:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:41:40 PM	Tube furnace set to 0
12/21/2010	8:42:40 PM	H2 valve closed
12/21/2010	8:42:40 PM	BCl3 valve closed
12/21/2010	8:42:40 PM	PH3 valve closed
12/21/2010	8:42:40 PM	SiCl4 pre valve closed
12/21/2010	8:42:40 PM	SiCl4 post valve closed
12/21/2010	8:42:40 PM	Bubbler valve closed
12/21/2010	8:42:40 PM	Helium valve opened
12/21/2010	8:42:40 PM	Main Vac valve opened
12/21/2010	8:42:40 PM	Bypass valve opened
12/21/2010	8:42:40 PM	Helium MFC set to  100.000000
12/21/2010	8:42:40 PM	H2 MFC set to  0.000000
12/21/2010	8:42:40 PM	BCl3 MFC set to  0.000000
12/21/2010	8:42:40 PM	PHl3 MFC set to  0.000000
12/21/2010	8:42:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:42:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:42:40 PM	Tube furnace set to 0
12/21/2010	8:43:40 PM	Helium valve closed
12/21/2010	8:43:40 PM	H2 valve closed
12/21/2010	8:43:40 PM	BCl3 valve closed
12/21/2010	8:43:40 PM	PH3 valve closed
12/21/2010	8:43:40 PM	SiCl4 pre valve closed
12/21/2010	8:43:40 PM	SiCl4 post valve closed
12/21/2010	8:43:40 PM	Bubbler valve closed
12/21/2010	8:43:40 PM	Main Vac valve opened
12/21/2010	8:43:40 PM	Bypass valve opened
12/21/2010	8:43:40 PM	Helium MFC set to  0.000000
12/21/2010	8:43:40 PM	H2 MFC set to  0.000000
12/21/2010	8:43:40 PM	BCl3 MFC set to  0.000000
12/21/2010	8:43:40 PM	PHl3 MFC set to  0.000000
12/21/2010	8:43:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:43:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:43:40 PM	Tube furnace set to 0
12/21/2010	8:44:40 PM	H2 valve closed
12/21/2010	8:44:40 PM	BCl3 valve closed
12/21/2010	8:44:40 PM	PH3 valve closed
12/21/2010	8:44:40 PM	SiCl4 pre valve closed
12/21/2010	8:44:40 PM	SiCl4 post valve closed
12/21/2010	8:44:40 PM	Bubbler valve closed
12/21/2010	8:44:40 PM	Helium valve opened
12/21/2010	8:44:40 PM	Main Vac valve opened
12/21/2010	8:44:40 PM	Bypass valve opened
12/21/2010	8:44:40 PM	Helium MFC set to  100.000000
12/21/2010	8:44:40 PM	H2 MFC set to  0.000000
12/21/2010	8:44:40 PM	BCl3 MFC set to  0.000000
12/21/2010	8:44:40 PM	PHl3 MFC set to  0.000000
12/21/2010	8:44:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:44:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:44:40 PM	Tube furnace set to 0
12/21/2010	8:45:41 PM	Helium valve closed
12/21/2010	8:45:41 PM	H2 valve closed
12/21/2010	8:45:41 PM	BCl3 valve closed
12/21/2010	8:45:41 PM	PH3 valve closed
12/21/2010	8:45:41 PM	SiCl4 pre valve closed
12/21/2010	8:45:41 PM	SiCl4 post valve closed
12/21/2010	8:45:41 PM	Bubbler valve closed
12/21/2010	8:45:41 PM	Main Vac valve opened
12/21/2010	8:45:41 PM	Bypass valve opened
12/21/2010	8:45:41 PM	Helium MFC set to  0.000000
12/21/2010	8:45:41 PM	H2 MFC set to  0.000000
12/21/2010	8:45:41 PM	BCl3 MFC set to  0.000000
12/21/2010	8:45:41 PM	PHl3 MFC set to  0.000000
12/21/2010	8:45:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:45:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:45:41 PM	Tube furnace set to 0
12/21/2010	8:46:41 PM	H2 valve closed
12/21/2010	8:46:41 PM	BCl3 valve closed
12/21/2010	8:46:41 PM	PH3 valve closed
12/21/2010	8:46:41 PM	SiCl4 pre valve closed
12/21/2010	8:46:41 PM	SiCl4 post valve closed
12/21/2010	8:46:41 PM	Bubbler valve closed
12/21/2010	8:46:41 PM	Helium valve opened
12/21/2010	8:46:41 PM	Main Vac valve opened
12/21/2010	8:46:41 PM	Bypass valve opened
12/21/2010	8:46:41 PM	Helium MFC set to  100.000000
12/21/2010	8:46:41 PM	H2 MFC set to  0.000000
12/21/2010	8:46:41 PM	BCl3 MFC set to  0.000000
12/21/2010	8:46:41 PM	PHl3 MFC set to  0.000000
12/21/2010	8:46:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:46:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:46:41 PM	Tube furnace set to 0
12/21/2010	8:47:41 PM	Helium valve closed
12/21/2010	8:47:41 PM	H2 valve closed
12/21/2010	8:47:41 PM	BCl3 valve closed
12/21/2010	8:47:41 PM	PH3 valve closed
12/21/2010	8:47:41 PM	SiCl4 pre valve closed
12/21/2010	8:47:41 PM	SiCl4 post valve closed
12/21/2010	8:47:41 PM	Bubbler valve closed
12/21/2010	8:47:41 PM	Main Vac valve opened
12/21/2010	8:47:41 PM	Bypass valve opened
12/21/2010	8:47:41 PM	Helium MFC set to  0.000000
12/21/2010	8:47:41 PM	H2 MFC set to  0.000000
12/21/2010	8:47:41 PM	BCl3 MFC set to  0.000000
12/21/2010	8:47:41 PM	PHl3 MFC set to  0.000000
12/21/2010	8:47:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:47:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:47:41 PM	Tube furnace set to 0
12/21/2010	8:48:41 PM	H2 valve closed
12/21/2010	8:48:41 PM	BCl3 valve closed
12/21/2010	8:48:41 PM	PH3 valve closed
12/21/2010	8:48:41 PM	SiCl4 pre valve closed
12/21/2010	8:48:41 PM	SiCl4 post valve closed
12/21/2010	8:48:41 PM	Bubbler valve closed
12/21/2010	8:48:41 PM	Helium valve opened
12/21/2010	8:48:41 PM	Main Vac valve opened
12/21/2010	8:48:41 PM	Bypass valve opened
12/21/2010	8:48:41 PM	Helium MFC set to  100.000000
12/21/2010	8:48:41 PM	H2 MFC set to  0.000000
12/21/2010	8:48:41 PM	BCl3 MFC set to  0.000000
12/21/2010	8:48:41 PM	PHl3 MFC set to  0.000000
12/21/2010	8:48:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:48:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:48:41 PM	Tube furnace set to 0
12/21/2010	8:49:41 PM	Helium valve closed
12/21/2010	8:49:41 PM	H2 valve closed
12/21/2010	8:49:41 PM	BCl3 valve closed
12/21/2010	8:49:41 PM	PH3 valve closed
12/21/2010	8:49:41 PM	SiCl4 pre valve closed
12/21/2010	8:49:41 PM	SiCl4 post valve closed
12/21/2010	8:49:41 PM	Bubbler valve closed
12/21/2010	8:49:41 PM	Main Vac valve opened
12/21/2010	8:49:41 PM	Bypass valve opened
12/21/2010	8:49:41 PM	Helium MFC set to  0.000000
12/21/2010	8:49:41 PM	H2 MFC set to  0.000000
12/21/2010	8:49:41 PM	BCl3 MFC set to  0.000000
12/21/2010	8:49:41 PM	PHl3 MFC set to  0.000000
12/21/2010	8:49:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:49:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:49:41 PM	Tube furnace set to 0
12/21/2010	8:50:42 PM	H2 valve closed
12/21/2010	8:50:42 PM	BCl3 valve closed
12/21/2010	8:50:42 PM	PH3 valve closed
12/21/2010	8:50:42 PM	SiCl4 pre valve closed
12/21/2010	8:50:42 PM	SiCl4 post valve closed
12/21/2010	8:50:42 PM	Bubbler valve closed
12/21/2010	8:50:42 PM	Helium valve opened
12/21/2010	8:50:42 PM	Main Vac valve opened
12/21/2010	8:50:42 PM	Bypass valve opened
12/21/2010	8:50:42 PM	Helium MFC set to  100.000000
12/21/2010	8:50:42 PM	H2 MFC set to  0.000000
12/21/2010	8:50:42 PM	BCl3 MFC set to  0.000000
12/21/2010	8:50:42 PM	PHl3 MFC set to  0.000000
12/21/2010	8:50:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:50:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:50:42 PM	Tube furnace set to 0
12/21/2010	8:51:42 PM	Helium valve closed
12/21/2010	8:51:42 PM	H2 valve closed
12/21/2010	8:51:42 PM	BCl3 valve closed
12/21/2010	8:51:42 PM	PH3 valve closed
12/21/2010	8:51:42 PM	SiCl4 pre valve closed
12/21/2010	8:51:42 PM	SiCl4 post valve closed
12/21/2010	8:51:42 PM	Bubbler valve closed
12/21/2010	8:51:42 PM	Main Vac valve opened
12/21/2010	8:51:42 PM	Bypass valve opened
12/21/2010	8:51:42 PM	Helium MFC set to  0.000000
12/21/2010	8:51:42 PM	H2 MFC set to  0.000000
12/21/2010	8:51:42 PM	BCl3 MFC set to  0.000000
12/21/2010	8:51:42 PM	PHl3 MFC set to  0.000000
12/21/2010	8:51:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:51:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:51:42 PM	Tube furnace set to 0
12/21/2010	8:52:42 PM	H2 valve closed
12/21/2010	8:52:42 PM	BCl3 valve closed
12/21/2010	8:52:42 PM	PH3 valve closed
12/21/2010	8:52:42 PM	SiCl4 pre valve closed
12/21/2010	8:52:42 PM	SiCl4 post valve closed
12/21/2010	8:52:42 PM	Bubbler valve closed
12/21/2010	8:52:42 PM	Helium valve opened
12/21/2010	8:52:42 PM	Main Vac valve opened
12/21/2010	8:52:42 PM	Bypass valve opened
12/21/2010	8:52:42 PM	Helium MFC set to  100.000000
12/21/2010	8:52:42 PM	H2 MFC set to  0.000000
12/21/2010	8:52:42 PM	BCl3 MFC set to  0.000000
12/21/2010	8:52:42 PM	PHl3 MFC set to  0.000000
12/21/2010	8:52:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:52:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:52:42 PM	Tube furnace set to 0
12/21/2010	8:53:42 PM	Helium valve closed
12/21/2010	8:53:42 PM	H2 valve closed
12/21/2010	8:53:42 PM	BCl3 valve closed
12/21/2010	8:53:42 PM	PH3 valve closed
12/21/2010	8:53:42 PM	SiCl4 pre valve closed
12/21/2010	8:53:42 PM	SiCl4 post valve closed
12/21/2010	8:53:42 PM	Bubbler valve closed
12/21/2010	8:53:42 PM	Main Vac valve opened
12/21/2010	8:53:42 PM	Bypass valve opened
12/21/2010	8:53:42 PM	Helium MFC set to  0.000000
12/21/2010	8:53:42 PM	H2 MFC set to  0.000000
12/21/2010	8:53:42 PM	BCl3 MFC set to  0.000000
12/21/2010	8:53:42 PM	PHl3 MFC set to  0.000000
12/21/2010	8:53:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:53:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:53:42 PM	Tube furnace set to 0
12/21/2010	8:54:42 PM	H2 valve closed
12/21/2010	8:54:42 PM	BCl3 valve closed
12/21/2010	8:54:42 PM	PH3 valve closed
12/21/2010	8:54:42 PM	SiCl4 pre valve closed
12/21/2010	8:54:42 PM	SiCl4 post valve closed
12/21/2010	8:54:42 PM	Bubbler valve closed
12/21/2010	8:54:42 PM	Helium valve opened
12/21/2010	8:54:42 PM	Main Vac valve opened
12/21/2010	8:54:42 PM	Bypass valve opened
12/21/2010	8:54:42 PM	Helium MFC set to  100.000000
12/21/2010	8:54:42 PM	H2 MFC set to  0.000000
12/21/2010	8:54:42 PM	BCl3 MFC set to  0.000000
12/21/2010	8:54:42 PM	PHl3 MFC set to  0.000000
12/21/2010	8:54:42 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:54:42 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:54:43 PM	Tube furnace set to 0
12/21/2010	8:55:43 PM	Helium valve closed
12/21/2010	8:55:43 PM	H2 valve closed
12/21/2010	8:55:43 PM	BCl3 valve closed
12/21/2010	8:55:43 PM	PH3 valve closed
12/21/2010	8:55:43 PM	SiCl4 pre valve closed
12/21/2010	8:55:43 PM	SiCl4 post valve closed
12/21/2010	8:55:43 PM	Bubbler valve closed
12/21/2010	8:55:43 PM	Main Vac valve opened
12/21/2010	8:55:43 PM	Bypass valve opened
12/21/2010	8:55:43 PM	Helium MFC set to  0.000000
12/21/2010	8:55:43 PM	H2 MFC set to  0.000000
12/21/2010	8:55:43 PM	BCl3 MFC set to  0.000000
12/21/2010	8:55:43 PM	PHl3 MFC set to  0.000000
12/21/2010	8:55:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:55:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:55:43 PM	Tube furnace set to 0
12/21/2010	8:56:43 PM	H2 valve closed
12/21/2010	8:56:43 PM	BCl3 valve closed
12/21/2010	8:56:43 PM	PH3 valve closed
12/21/2010	8:56:43 PM	SiCl4 pre valve closed
12/21/2010	8:56:43 PM	SiCl4 post valve closed
12/21/2010	8:56:43 PM	Bubbler valve closed
12/21/2010	8:56:43 PM	Helium valve opened
12/21/2010	8:56:43 PM	Main Vac valve opened
12/21/2010	8:56:43 PM	Bypass valve opened
12/21/2010	8:56:43 PM	Helium MFC set to  100.000000
12/21/2010	8:56:43 PM	H2 MFC set to  0.000000
12/21/2010	8:56:43 PM	BCl3 MFC set to  0.000000
12/21/2010	8:56:43 PM	PHl3 MFC set to  0.000000
12/21/2010	8:56:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:56:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:56:43 PM	Tube furnace set to 0
12/21/2010	8:57:43 PM	Helium valve closed
12/21/2010	8:57:43 PM	H2 valve closed
12/21/2010	8:57:43 PM	BCl3 valve closed
12/21/2010	8:57:43 PM	PH3 valve closed
12/21/2010	8:57:43 PM	SiCl4 pre valve closed
12/21/2010	8:57:43 PM	SiCl4 post valve closed
12/21/2010	8:57:43 PM	Bubbler valve closed
12/21/2010	8:57:43 PM	Main Vac valve opened
12/21/2010	8:57:43 PM	Bypass valve opened
12/21/2010	8:57:43 PM	Helium MFC set to  0.000000
12/21/2010	8:57:43 PM	H2 MFC set to  0.000000
12/21/2010	8:57:43 PM	BCl3 MFC set to  0.000000
12/21/2010	8:57:43 PM	PHl3 MFC set to  0.000000
12/21/2010	8:57:43 PM	SiCl4 MFC set to  0.000000
12/21/2010	8:57:43 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	8:57:43 PM	Tube furnace set to 0
12/21/2010	8:57:44 PM	Run finished at 8:57 PM
12/21/2010	8:57:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	9:50:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	9:50:31 PM	Recipe started at 9:50 PM
12/21/2010	9:50:31 PM	Helium valve closed
12/21/2010	9:50:31 PM	H2 valve closed
12/21/2010	9:50:31 PM	BCl3 valve closed
12/21/2010	9:50:31 PM	PH3 valve closed
12/21/2010	9:50:31 PM	SiCl4 pre valve closed
12/21/2010	9:50:31 PM	SiCl4 post valve closed
12/21/2010	9:50:31 PM	Main Vac valve closed
12/21/2010	9:50:31 PM	Bubbler valve closed
12/21/2010	9:50:31 PM	Bypass valve opened
12/21/2010	9:50:31 PM	Helium MFC set to  0.000000
12/21/2010	9:50:31 PM	H2 MFC set to  0.000000
12/21/2010	9:50:31 PM	BCl3 MFC set to  0.000000
12/21/2010	9:50:31 PM	PHl3 MFC set to  0.000000
12/21/2010	9:50:31 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:50:31 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:50:31 PM	Tube furnace set to 0
12/21/2010	9:50:32 PM	Helium valve closed
12/21/2010	9:50:32 PM	H2 valve closed
12/21/2010	9:50:32 PM	BCl3 valve closed
12/21/2010	9:50:32 PM	PH3 valve closed
12/21/2010	9:50:32 PM	SiCl4 pre valve closed
12/21/2010	9:50:32 PM	SiCl4 post valve closed
12/21/2010	9:50:32 PM	Bubbler valve closed
12/21/2010	9:50:32 PM	Main Vac valve opened
12/21/2010	9:50:32 PM	Bypass valve opened
12/21/2010	9:50:32 PM	Helium MFC set to  0.000000
12/21/2010	9:50:32 PM	H2 MFC set to  0.000000
12/21/2010	9:50:32 PM	BCl3 MFC set to  0.000000
12/21/2010	9:50:32 PM	PHl3 MFC set to  0.000000
12/21/2010	9:50:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:50:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:50:32 PM	Tube furnace set to 0
12/21/2010	9:51:32 PM	H2 valve closed
12/21/2010	9:51:32 PM	BCl3 valve closed
12/21/2010	9:51:32 PM	PH3 valve closed
12/21/2010	9:51:32 PM	SiCl4 pre valve closed
12/21/2010	9:51:32 PM	SiCl4 post valve closed
12/21/2010	9:51:32 PM	Bubbler valve closed
12/21/2010	9:51:32 PM	Helium valve opened
12/21/2010	9:51:32 PM	Main Vac valve opened
12/21/2010	9:51:32 PM	Bypass valve opened
12/21/2010	9:51:32 PM	Helium MFC set to  100.000000
12/21/2010	9:51:32 PM	H2 MFC set to  0.000000
12/21/2010	9:51:32 PM	BCl3 MFC set to  0.000000
12/21/2010	9:51:32 PM	PHl3 MFC set to  0.000000
12/21/2010	9:51:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:51:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:51:32 PM	Tube furnace set to 0
12/21/2010	9:52:32 PM	Helium valve closed
12/21/2010	9:52:32 PM	H2 valve closed
12/21/2010	9:52:32 PM	BCl3 valve closed
12/21/2010	9:52:32 PM	PH3 valve closed
12/21/2010	9:52:32 PM	SiCl4 pre valve closed
12/21/2010	9:52:32 PM	SiCl4 post valve closed
12/21/2010	9:52:32 PM	Bubbler valve closed
12/21/2010	9:52:32 PM	Main Vac valve opened
12/21/2010	9:52:32 PM	Bypass valve opened
12/21/2010	9:52:32 PM	Helium MFC set to  0.000000
12/21/2010	9:52:32 PM	H2 MFC set to  0.000000
12/21/2010	9:52:32 PM	BCl3 MFC set to  0.000000
12/21/2010	9:52:32 PM	PHl3 MFC set to  0.000000
12/21/2010	9:52:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:52:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:52:32 PM	Tube furnace set to 0
12/21/2010	9:53:32 PM	H2 valve closed
12/21/2010	9:53:32 PM	BCl3 valve closed
12/21/2010	9:53:32 PM	PH3 valve closed
12/21/2010	9:53:32 PM	SiCl4 pre valve closed
12/21/2010	9:53:32 PM	SiCl4 post valve closed
12/21/2010	9:53:32 PM	Bubbler valve closed
12/21/2010	9:53:32 PM	Helium valve opened
12/21/2010	9:53:32 PM	Main Vac valve opened
12/21/2010	9:53:32 PM	Bypass valve opened
12/21/2010	9:53:32 PM	Helium MFC set to  100.000000
12/21/2010	9:53:32 PM	H2 MFC set to  0.000000
12/21/2010	9:53:32 PM	BCl3 MFC set to  0.000000
12/21/2010	9:53:32 PM	PHl3 MFC set to  0.000000
12/21/2010	9:53:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:53:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:53:32 PM	Tube furnace set to 0
12/21/2010	9:54:32 PM	Helium valve closed
12/21/2010	9:54:32 PM	H2 valve closed
12/21/2010	9:54:32 PM	BCl3 valve closed
12/21/2010	9:54:32 PM	PH3 valve closed
12/21/2010	9:54:32 PM	SiCl4 pre valve closed
12/21/2010	9:54:32 PM	SiCl4 post valve closed
12/21/2010	9:54:32 PM	Bubbler valve closed
12/21/2010	9:54:32 PM	Main Vac valve opened
12/21/2010	9:54:32 PM	Bypass valve opened
12/21/2010	9:54:32 PM	Helium MFC set to  0.000000
12/21/2010	9:54:32 PM	H2 MFC set to  0.000000
12/21/2010	9:54:32 PM	BCl3 MFC set to  0.000000
12/21/2010	9:54:32 PM	PHl3 MFC set to  0.000000
12/21/2010	9:54:32 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:54:32 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:54:33 PM	Tube furnace set to 0
12/21/2010	9:55:33 PM	H2 valve closed
12/21/2010	9:55:33 PM	BCl3 valve closed
12/21/2010	9:55:33 PM	PH3 valve closed
12/21/2010	9:55:33 PM	SiCl4 pre valve closed
12/21/2010	9:55:33 PM	SiCl4 post valve closed
12/21/2010	9:55:33 PM	Bubbler valve closed
12/21/2010	9:55:33 PM	Helium valve opened
12/21/2010	9:55:33 PM	Main Vac valve opened
12/21/2010	9:55:33 PM	Bypass valve opened
12/21/2010	9:55:33 PM	Helium MFC set to  100.000000
12/21/2010	9:55:33 PM	H2 MFC set to  0.000000
12/21/2010	9:55:33 PM	BCl3 MFC set to  0.000000
12/21/2010	9:55:33 PM	PHl3 MFC set to  0.000000
12/21/2010	9:55:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:55:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:55:33 PM	Tube furnace set to 0
12/21/2010	9:56:33 PM	Helium valve closed
12/21/2010	9:56:33 PM	H2 valve closed
12/21/2010	9:56:33 PM	BCl3 valve closed
12/21/2010	9:56:33 PM	PH3 valve closed
12/21/2010	9:56:33 PM	SiCl4 pre valve closed
12/21/2010	9:56:33 PM	SiCl4 post valve closed
12/21/2010	9:56:33 PM	Bubbler valve closed
12/21/2010	9:56:33 PM	Main Vac valve opened
12/21/2010	9:56:33 PM	Bypass valve opened
12/21/2010	9:56:33 PM	Helium MFC set to  0.000000
12/21/2010	9:56:33 PM	H2 MFC set to  0.000000
12/21/2010	9:56:33 PM	BCl3 MFC set to  0.000000
12/21/2010	9:56:33 PM	PHl3 MFC set to  0.000000
12/21/2010	9:56:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:56:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:56:33 PM	Tube furnace set to 0
12/21/2010	9:57:33 PM	H2 valve closed
12/21/2010	9:57:33 PM	BCl3 valve closed
12/21/2010	9:57:33 PM	PH3 valve closed
12/21/2010	9:57:33 PM	SiCl4 pre valve closed
12/21/2010	9:57:33 PM	SiCl4 post valve closed
12/21/2010	9:57:33 PM	Bubbler valve closed
12/21/2010	9:57:33 PM	Helium valve opened
12/21/2010	9:57:33 PM	Main Vac valve opened
12/21/2010	9:57:33 PM	Bypass valve opened
12/21/2010	9:57:33 PM	Helium MFC set to  100.000000
12/21/2010	9:57:33 PM	H2 MFC set to  0.000000
12/21/2010	9:57:33 PM	BCl3 MFC set to  0.000000
12/21/2010	9:57:33 PM	PHl3 MFC set to  0.000000
12/21/2010	9:57:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:57:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:57:33 PM	Tube furnace set to 0
12/21/2010	9:58:33 PM	Helium valve closed
12/21/2010	9:58:33 PM	H2 valve closed
12/21/2010	9:58:33 PM	BCl3 valve closed
12/21/2010	9:58:33 PM	PH3 valve closed
12/21/2010	9:58:33 PM	SiCl4 pre valve closed
12/21/2010	9:58:33 PM	SiCl4 post valve closed
12/21/2010	9:58:33 PM	Bubbler valve closed
12/21/2010	9:58:33 PM	Main Vac valve opened
12/21/2010	9:58:33 PM	Bypass valve opened
12/21/2010	9:58:33 PM	Helium MFC set to  0.000000
12/21/2010	9:58:33 PM	H2 MFC set to  0.000000
12/21/2010	9:58:33 PM	BCl3 MFC set to  0.000000
12/21/2010	9:58:33 PM	PHl3 MFC set to  0.000000
12/21/2010	9:58:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:58:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:58:33 PM	Tube furnace set to 0
12/21/2010	9:59:33 PM	H2 valve closed
12/21/2010	9:59:33 PM	BCl3 valve closed
12/21/2010	9:59:33 PM	PH3 valve closed
12/21/2010	9:59:33 PM	SiCl4 pre valve closed
12/21/2010	9:59:33 PM	SiCl4 post valve closed
12/21/2010	9:59:33 PM	Bubbler valve closed
12/21/2010	9:59:33 PM	Helium valve opened
12/21/2010	9:59:33 PM	Main Vac valve opened
12/21/2010	9:59:33 PM	Bypass valve opened
12/21/2010	9:59:33 PM	Helium MFC set to  100.000000
12/21/2010	9:59:33 PM	H2 MFC set to  0.000000
12/21/2010	9:59:33 PM	BCl3 MFC set to  0.000000
12/21/2010	9:59:33 PM	PHl3 MFC set to  0.000000
12/21/2010	9:59:33 PM	SiCl4 MFC set to  0.000000
12/21/2010	9:59:33 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	9:59:34 PM	Tube furnace set to 0
12/21/2010	10:00:34 PM	Helium valve closed
12/21/2010	10:00:34 PM	H2 valve closed
12/21/2010	10:00:34 PM	BCl3 valve closed
12/21/2010	10:00:34 PM	PH3 valve closed
12/21/2010	10:00:34 PM	SiCl4 pre valve closed
12/21/2010	10:00:34 PM	SiCl4 post valve closed
12/21/2010	10:00:34 PM	Bubbler valve closed
12/21/2010	10:00:34 PM	Main Vac valve opened
12/21/2010	10:00:34 PM	Bypass valve opened
12/21/2010	10:00:34 PM	Helium MFC set to  0.000000
12/21/2010	10:00:34 PM	H2 MFC set to  0.000000
12/21/2010	10:00:34 PM	BCl3 MFC set to  0.000000
12/21/2010	10:00:34 PM	PHl3 MFC set to  0.000000
12/21/2010	10:00:34 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:00:34 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:00:34 PM	Tube furnace set to 0
12/21/2010	10:01:34 PM	H2 valve closed
12/21/2010	10:01:34 PM	BCl3 valve closed
12/21/2010	10:01:34 PM	PH3 valve closed
12/21/2010	10:01:34 PM	SiCl4 pre valve closed
12/21/2010	10:01:34 PM	SiCl4 post valve closed
12/21/2010	10:01:34 PM	Bubbler valve closed
12/21/2010	10:01:34 PM	Helium valve opened
12/21/2010	10:01:34 PM	Main Vac valve opened
12/21/2010	10:01:34 PM	Bypass valve opened
12/21/2010	10:01:34 PM	Helium MFC set to  100.000000
12/21/2010	10:01:34 PM	H2 MFC set to  0.000000
12/21/2010	10:01:34 PM	BCl3 MFC set to  0.000000
12/21/2010	10:01:34 PM	PHl3 MFC set to  0.000000
12/21/2010	10:01:34 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:01:34 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:01:34 PM	Tube furnace set to 0
12/21/2010	10:02:34 PM	Helium valve closed
12/21/2010	10:02:34 PM	H2 valve closed
12/21/2010	10:02:34 PM	BCl3 valve closed
12/21/2010	10:02:34 PM	PH3 valve closed
12/21/2010	10:02:34 PM	SiCl4 pre valve closed
12/21/2010	10:02:34 PM	SiCl4 post valve closed
12/21/2010	10:02:34 PM	Bubbler valve closed
12/21/2010	10:02:34 PM	Main Vac valve opened
12/21/2010	10:02:34 PM	Bypass valve opened
12/21/2010	10:02:34 PM	Helium MFC set to  0.000000
12/21/2010	10:02:34 PM	H2 MFC set to  0.000000
12/21/2010	10:02:34 PM	BCl3 MFC set to  0.000000
12/21/2010	10:02:34 PM	PHl3 MFC set to  0.000000
12/21/2010	10:02:34 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:02:34 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:02:34 PM	Tube furnace set to 0
12/21/2010	10:03:08 PM	Run aborted at 10:03 PM
12/21/2010	10:03:08 PM	Helium valve closed
12/21/2010	10:03:08 PM	H2 valve closed
12/21/2010	10:03:08 PM	BCl3 valve closed
12/21/2010	10:03:08 PM	PH3 valve closed
12/21/2010	10:03:08 PM	SiCl4 pre valve closed
12/21/2010	10:03:08 PM	SiCl4 post valve closed
12/21/2010	10:03:08 PM	Bypass valve closed
12/21/2010	10:03:08 PM	Main Vac valve closed
12/21/2010	10:03:08 PM	Bubbler valve closed
12/21/2010	10:03:08 PM	Helium MFC set to  0.000000
12/21/2010	10:03:08 PM	H2 MFC set to  0.000000
12/21/2010	10:03:08 PM	BCl3 MFC set to  0.000000
12/21/2010	10:03:08 PM	PHl3 MFC set to  0.000000
12/21/2010	10:03:08 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:03:08 PM	Tube furnace set to 0
12/21/2010	10:03:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	10:03:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:03:10 PM	Recipe started at 10:03 PM
12/21/2010	10:03:10 PM	Helium valve closed
12/21/2010	10:03:10 PM	H2 valve closed
12/21/2010	10:03:10 PM	BCl3 valve closed
12/21/2010	10:03:10 PM	PH3 valve closed
12/21/2010	10:03:10 PM	SiCl4 pre valve closed
12/21/2010	10:03:10 PM	SiCl4 post valve closed
12/21/2010	10:03:10 PM	Main Vac valve closed
12/21/2010	10:03:10 PM	Bubbler valve closed
12/21/2010	10:03:10 PM	Bypass valve opened
12/21/2010	10:03:10 PM	Helium MFC set to  0.000000
12/21/2010	10:03:10 PM	H2 MFC set to  0.000000
12/21/2010	10:03:10 PM	BCl3 MFC set to  0.000000
12/21/2010	10:03:10 PM	PHl3 MFC set to  0.000000
12/21/2010	10:03:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:03:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:03:10 PM	Tube furnace set to 0
12/21/2010	10:03:10 PM	Helium valve closed
12/21/2010	10:03:10 PM	H2 valve closed
12/21/2010	10:03:10 PM	BCl3 valve closed
12/21/2010	10:03:10 PM	PH3 valve closed
12/21/2010	10:03:10 PM	SiCl4 pre valve closed
12/21/2010	10:03:10 PM	SiCl4 post valve closed
12/21/2010	10:03:10 PM	Bubbler valve closed
12/21/2010	10:03:10 PM	Main Vac valve opened
12/21/2010	10:03:10 PM	Bypass valve opened
12/21/2010	10:03:10 PM	Helium MFC set to  0.000000
12/21/2010	10:03:10 PM	H2 MFC set to  0.000000
12/21/2010	10:03:10 PM	BCl3 MFC set to  0.000000
12/21/2010	10:03:10 PM	PHl3 MFC set to  0.000000
12/21/2010	10:03:10 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:03:10 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:03:10 PM	Tube furnace set to 0
12/21/2010	10:03:11 PM	Run finished at 10:03 PM
12/21/2010	10:03:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:04:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	10:04:18 PM	Recipe started at 10:04 PM
12/21/2010	10:04:18 PM	Helium valve closed
12/21/2010	10:04:18 PM	H2 valve closed
12/21/2010	10:04:18 PM	BCl3 valve closed
12/21/2010	10:04:18 PM	PH3 valve closed
12/21/2010	10:04:18 PM	SiCl4 pre valve closed
12/21/2010	10:04:18 PM	SiCl4 post valve closed
12/21/2010	10:04:18 PM	Main Vac valve closed
12/21/2010	10:04:18 PM	Bubbler valve closed
12/21/2010	10:04:18 PM	Bypass valve opened
12/21/2010	10:04:18 PM	Helium MFC set to  0.000000
12/21/2010	10:04:18 PM	H2 MFC set to  0.000000
12/21/2010	10:04:18 PM	BCl3 MFC set to  0.000000
12/21/2010	10:04:18 PM	PHl3 MFC set to  0.000000
12/21/2010	10:04:18 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:04:18 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:04:18 PM	Tube furnace set to 0
12/21/2010	10:04:19 PM	Helium valve closed
12/21/2010	10:04:19 PM	H2 valve closed
12/21/2010	10:04:19 PM	BCl3 valve closed
12/21/2010	10:04:19 PM	PH3 valve closed
12/21/2010	10:04:19 PM	SiCl4 pre valve closed
12/21/2010	10:04:19 PM	SiCl4 post valve closed
12/21/2010	10:04:19 PM	Bubbler valve closed
12/21/2010	10:04:19 PM	Main Vac valve opened
12/21/2010	10:04:19 PM	Bypass valve opened
12/21/2010	10:04:19 PM	Helium MFC set to  0.000000
12/21/2010	10:04:19 PM	H2 MFC set to  0.000000
12/21/2010	10:04:19 PM	BCl3 MFC set to  0.000000
12/21/2010	10:04:19 PM	PHl3 MFC set to  0.000000
12/21/2010	10:04:19 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:04:19 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:04:19 PM	Tube furnace set to 0
12/21/2010	10:05:19 PM	H2 valve closed
12/21/2010	10:05:19 PM	BCl3 valve closed
12/21/2010	10:05:19 PM	PH3 valve closed
12/21/2010	10:05:19 PM	SiCl4 pre valve closed
12/21/2010	10:05:19 PM	SiCl4 post valve closed
12/21/2010	10:05:19 PM	Bubbler valve closed
12/21/2010	10:05:19 PM	Helium valve opened
12/21/2010	10:05:19 PM	Main Vac valve opened
12/21/2010	10:05:19 PM	Bypass valve opened
12/21/2010	10:05:19 PM	Helium MFC set to  100.000000
12/21/2010	10:05:19 PM	H2 MFC set to  0.000000
12/21/2010	10:05:19 PM	BCl3 MFC set to  0.000000
12/21/2010	10:05:19 PM	PHl3 MFC set to  0.000000
12/21/2010	10:05:19 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:05:19 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:05:19 PM	Tube furnace set to 0
12/21/2010	10:06:19 PM	Helium valve closed
12/21/2010	10:06:19 PM	H2 valve closed
12/21/2010	10:06:19 PM	BCl3 valve closed
12/21/2010	10:06:19 PM	PH3 valve closed
12/21/2010	10:06:19 PM	SiCl4 pre valve closed
12/21/2010	10:06:19 PM	SiCl4 post valve closed
12/21/2010	10:06:19 PM	Bubbler valve closed
12/21/2010	10:06:19 PM	Main Vac valve opened
12/21/2010	10:06:19 PM	Bypass valve opened
12/21/2010	10:06:19 PM	Helium MFC set to  0.000000
12/21/2010	10:06:19 PM	H2 MFC set to  0.000000
12/21/2010	10:06:19 PM	BCl3 MFC set to  0.000000
12/21/2010	10:06:19 PM	PHl3 MFC set to  0.000000
12/21/2010	10:06:19 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:06:19 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:06:19 PM	Tube furnace set to 0
12/21/2010	10:07:19 PM	H2 valve closed
12/21/2010	10:07:19 PM	BCl3 valve closed
12/21/2010	10:07:19 PM	PH3 valve closed
12/21/2010	10:07:19 PM	SiCl4 pre valve closed
12/21/2010	10:07:19 PM	SiCl4 post valve closed
12/21/2010	10:07:19 PM	Bubbler valve closed
12/21/2010	10:07:19 PM	Helium valve opened
12/21/2010	10:07:19 PM	Main Vac valve opened
12/21/2010	10:07:19 PM	Bypass valve opened
12/21/2010	10:07:19 PM	Helium MFC set to  100.000000
12/21/2010	10:07:19 PM	H2 MFC set to  0.000000
12/21/2010	10:07:19 PM	BCl3 MFC set to  0.000000
12/21/2010	10:07:19 PM	PHl3 MFC set to  0.000000
12/21/2010	10:07:19 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:07:19 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:07:19 PM	Tube furnace set to 0
12/21/2010	10:08:19 PM	Helium valve closed
12/21/2010	10:08:19 PM	H2 valve closed
12/21/2010	10:08:19 PM	BCl3 valve closed
12/21/2010	10:08:19 PM	PH3 valve closed
12/21/2010	10:08:19 PM	SiCl4 pre valve closed
12/21/2010	10:08:19 PM	SiCl4 post valve closed
12/21/2010	10:08:19 PM	Bubbler valve closed
12/21/2010	10:08:19 PM	Main Vac valve opened
12/21/2010	10:08:19 PM	Bypass valve opened
12/21/2010	10:08:19 PM	Helium MFC set to  0.000000
12/21/2010	10:08:19 PM	H2 MFC set to  0.000000
12/21/2010	10:08:19 PM	BCl3 MFC set to  0.000000
12/21/2010	10:08:19 PM	PHl3 MFC set to  0.000000
12/21/2010	10:08:19 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:08:19 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:08:19 PM	Tube furnace set to 0
12/21/2010	10:09:20 PM	H2 valve closed
12/21/2010	10:09:20 PM	BCl3 valve closed
12/21/2010	10:09:20 PM	PH3 valve closed
12/21/2010	10:09:20 PM	SiCl4 pre valve closed
12/21/2010	10:09:20 PM	SiCl4 post valve closed
12/21/2010	10:09:20 PM	Bubbler valve closed
12/21/2010	10:09:20 PM	Helium valve opened
12/21/2010	10:09:20 PM	Main Vac valve opened
12/21/2010	10:09:20 PM	Bypass valve opened
12/21/2010	10:09:20 PM	Helium MFC set to  100.000000
12/21/2010	10:09:20 PM	H2 MFC set to  0.000000
12/21/2010	10:09:20 PM	BCl3 MFC set to  0.000000
12/21/2010	10:09:20 PM	PHl3 MFC set to  0.000000
12/21/2010	10:09:20 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:09:20 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:09:20 PM	Tube furnace set to 0
12/21/2010	10:10:20 PM	Helium valve closed
12/21/2010	10:10:20 PM	H2 valve closed
12/21/2010	10:10:20 PM	BCl3 valve closed
12/21/2010	10:10:20 PM	PH3 valve closed
12/21/2010	10:10:20 PM	SiCl4 pre valve closed
12/21/2010	10:10:20 PM	SiCl4 post valve closed
12/21/2010	10:10:20 PM	Bubbler valve closed
12/21/2010	10:10:20 PM	Main Vac valve opened
12/21/2010	10:10:20 PM	Bypass valve opened
12/21/2010	10:10:20 PM	Helium MFC set to  0.000000
12/21/2010	10:10:20 PM	H2 MFC set to  0.000000
12/21/2010	10:10:20 PM	BCl3 MFC set to  0.000000
12/21/2010	10:10:20 PM	PHl3 MFC set to  0.000000
12/21/2010	10:10:20 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:10:20 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:10:20 PM	Tube furnace set to 0
12/21/2010	10:11:20 PM	H2 valve closed
12/21/2010	10:11:20 PM	BCl3 valve closed
12/21/2010	10:11:20 PM	PH3 valve closed
12/21/2010	10:11:20 PM	SiCl4 pre valve closed
12/21/2010	10:11:20 PM	SiCl4 post valve closed
12/21/2010	10:11:20 PM	Bubbler valve closed
12/21/2010	10:11:20 PM	Helium valve opened
12/21/2010	10:11:20 PM	Main Vac valve opened
12/21/2010	10:11:20 PM	Bypass valve opened
12/21/2010	10:11:20 PM	Helium MFC set to  100.000000
12/21/2010	10:11:20 PM	H2 MFC set to  0.000000
12/21/2010	10:11:20 PM	BCl3 MFC set to  0.000000
12/21/2010	10:11:20 PM	PHl3 MFC set to  0.000000
12/21/2010	10:11:20 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:11:20 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:11:20 PM	Tube furnace set to 0
12/21/2010	10:12:20 PM	Helium valve closed
12/21/2010	10:12:20 PM	H2 valve closed
12/21/2010	10:12:20 PM	BCl3 valve closed
12/21/2010	10:12:20 PM	PH3 valve closed
12/21/2010	10:12:20 PM	SiCl4 pre valve closed
12/21/2010	10:12:20 PM	SiCl4 post valve closed
12/21/2010	10:12:20 PM	Bubbler valve closed
12/21/2010	10:12:20 PM	Main Vac valve opened
12/21/2010	10:12:20 PM	Bypass valve opened
12/21/2010	10:12:20 PM	Helium MFC set to  0.000000
12/21/2010	10:12:20 PM	H2 MFC set to  0.000000
12/21/2010	10:12:20 PM	BCl3 MFC set to  0.000000
12/21/2010	10:12:20 PM	PHl3 MFC set to  0.000000
12/21/2010	10:12:20 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:12:20 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:12:20 PM	Tube furnace set to 0
12/21/2010	10:13:11 PM	Run aborted at 10:13 PM
12/21/2010	10:13:11 PM	Helium valve closed
12/21/2010	10:13:11 PM	H2 valve closed
12/21/2010	10:13:11 PM	BCl3 valve closed
12/21/2010	10:13:11 PM	PH3 valve closed
12/21/2010	10:13:11 PM	SiCl4 pre valve closed
12/21/2010	10:13:11 PM	SiCl4 post valve closed
12/21/2010	10:13:11 PM	Bypass valve closed
12/21/2010	10:13:11 PM	Main Vac valve closed
12/21/2010	10:13:11 PM	Bubbler valve closed
12/21/2010	10:13:11 PM	Helium MFC set to  0.000000
12/21/2010	10:13:11 PM	H2 MFC set to  0.000000
12/21/2010	10:13:11 PM	BCl3 MFC set to  0.000000
12/21/2010	10:13:11 PM	PHl3 MFC set to  0.000000
12/21/2010	10:13:11 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:13:11 PM	Tube furnace set to 0
12/21/2010	10:13:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	10:13:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:13:12 PM	Recipe started at 10:13 PM
12/21/2010	10:13:12 PM	Helium valve closed
12/21/2010	10:13:12 PM	H2 valve closed
12/21/2010	10:13:12 PM	BCl3 valve closed
12/21/2010	10:13:12 PM	PH3 valve closed
12/21/2010	10:13:12 PM	SiCl4 pre valve closed
12/21/2010	10:13:12 PM	SiCl4 post valve closed
12/21/2010	10:13:12 PM	Main Vac valve closed
12/21/2010	10:13:12 PM	Bubbler valve closed
12/21/2010	10:13:12 PM	Bypass valve opened
12/21/2010	10:13:12 PM	Helium MFC set to  0.000000
12/21/2010	10:13:12 PM	H2 MFC set to  0.000000
12/21/2010	10:13:12 PM	BCl3 MFC set to  0.000000
12/21/2010	10:13:12 PM	PHl3 MFC set to  0.000000
12/21/2010	10:13:12 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:13:12 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:13:12 PM	Tube furnace set to 0
12/21/2010	10:13:13 PM	Helium valve closed
12/21/2010	10:13:13 PM	H2 valve closed
12/21/2010	10:13:13 PM	BCl3 valve closed
12/21/2010	10:13:13 PM	PH3 valve closed
12/21/2010	10:13:13 PM	SiCl4 pre valve closed
12/21/2010	10:13:13 PM	SiCl4 post valve closed
12/21/2010	10:13:13 PM	Bubbler valve closed
12/21/2010	10:13:13 PM	Main Vac valve opened
12/21/2010	10:13:13 PM	Bypass valve opened
12/21/2010	10:13:13 PM	Helium MFC set to  0.000000
12/21/2010	10:13:13 PM	H2 MFC set to  0.000000
12/21/2010	10:13:13 PM	BCl3 MFC set to  0.000000
12/21/2010	10:13:13 PM	PHl3 MFC set to  0.000000
12/21/2010	10:13:13 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:13:13 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:13:13 PM	Tube furnace set to 0
12/21/2010	10:13:13 PM	Run finished at 10:13 PM
12/21/2010	10:13:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	10:13:38 PM	Recipe started at 10:13 PM
12/21/2010	10:13:38 PM	Helium valve closed
12/21/2010	10:13:38 PM	BCl3 valve closed
12/21/2010	10:13:38 PM	PH3 valve closed
12/21/2010	10:13:38 PM	SiCl4 pre valve closed
12/21/2010	10:13:38 PM	SiCl4 post valve closed
12/21/2010	10:13:38 PM	Main Vac valve closed
12/21/2010	10:13:38 PM	Bypass valve closed
12/21/2010	10:13:38 PM	Bubbler valve closed
12/21/2010	10:13:38 PM	H2 valve opened
12/21/2010	10:13:38 PM	Helium MFC set to  0.000000
12/21/2010	10:13:38 PM	H2 MFC set to  500.000000
12/21/2010	10:13:38 PM	BCl3 MFC set to  0.000000
12/21/2010	10:13:38 PM	PHl3 MFC set to  0.000000
12/21/2010	10:13:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:13:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:13:38 PM	Tube furnace set to 0
12/21/2010	10:14:59 PM	Helium valve closed
12/21/2010	10:14:59 PM	BCl3 valve closed
12/21/2010	10:14:59 PM	PH3 valve closed
12/21/2010	10:14:59 PM	SiCl4 pre valve closed
12/21/2010	10:14:59 PM	SiCl4 post valve closed
12/21/2010	10:14:59 PM	Main Vac valve closed
12/21/2010	10:14:59 PM	Bypass valve closed
12/21/2010	10:14:59 PM	H2 valve opened
12/21/2010	10:14:59 PM	Bubbler valve opened
12/21/2010	10:14:59 PM	Helium MFC set to  0.000000
12/21/2010	10:14:59 PM	H2 MFC set to  500.000000
12/21/2010	10:14:59 PM	BCl3 MFC set to  0.000000
12/21/2010	10:14:59 PM	PHl3 MFC set to  0.000000
12/21/2010	10:14:59 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:14:59 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:14:59 PM	Tube furnace set to 1000
12/21/2010	10:34:59 PM	Helium valve closed
12/21/2010	10:34:59 PM	PH3 valve closed
12/21/2010	10:34:59 PM	Main Vac valve closed
12/21/2010	10:34:59 PM	Bypass valve closed
12/21/2010	10:34:59 PM	H2 valve opened
12/21/2010	10:34:59 PM	BCl3 valve opened
12/21/2010	10:34:59 PM	SiCl4 pre valve opened
12/21/2010	10:34:59 PM	SiCl4 post valve opened
12/21/2010	10:34:59 PM	Bubbler valve opened
12/21/2010	10:34:59 PM	Helium MFC set to  0.000000
12/21/2010	10:34:59 PM	H2 MFC set to  500.000000
12/21/2010	10:34:59 PM	BCl3 MFC set to  12.000000
12/21/2010	10:34:59 PM	PHl3 MFC set to  0.000000
12/21/2010	10:34:59 PM	SiCl4 MFC set to  50.000000
12/21/2010	10:34:59 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:34:59 PM	Tube furnace set to 1000
12/21/2010	10:54:59 PM	H2 valve closed
12/21/2010	10:54:59 PM	BCl3 valve closed
12/21/2010	10:54:59 PM	PH3 valve closed
12/21/2010	10:54:59 PM	SiCl4 pre valve closed
12/21/2010	10:54:59 PM	SiCl4 post valve closed
12/21/2010	10:54:59 PM	Main Vac valve closed
12/21/2010	10:54:59 PM	Bypass valve closed
12/21/2010	10:54:59 PM	Helium valve opened
12/21/2010	10:54:59 PM	Bubbler valve opened
12/21/2010	10:54:59 PM	Helium MFC set to  500.000000
12/21/2010	10:54:59 PM	H2 MFC set to  0.000000
12/21/2010	10:54:59 PM	BCl3 MFC set to  0.000000
12/21/2010	10:54:59 PM	PHl3 MFC set to  0.000000
12/21/2010	10:54:59 PM	SiCl4 MFC set to  0.000000
12/21/2010	10:54:59 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	10:54:59 PM	Tube furnace set to 0
12/21/2010	11:14:59 PM	Helium valve closed
12/21/2010	11:14:59 PM	H2 valve closed
12/21/2010	11:14:59 PM	BCl3 valve closed
12/21/2010	11:14:59 PM	PH3 valve closed
12/21/2010	11:14:59 PM	SiCl4 pre valve closed
12/21/2010	11:14:59 PM	SiCl4 post valve closed
12/21/2010	11:14:59 PM	Main Vac valve closed
12/21/2010	11:14:59 PM	Bypass valve closed
12/21/2010	11:14:59 PM	Bubbler valve closed
12/21/2010	11:14:59 PM	Helium MFC set to  0.000000
12/21/2010	11:14:59 PM	H2 MFC set to  0.000000
12/21/2010	11:14:59 PM	BCl3 MFC set to  0.000000
12/21/2010	11:14:59 PM	PHl3 MFC set to  0.000000
12/21/2010	11:14:59 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:14:59 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:14:59 PM	Tube furnace set to 0
12/21/2010	11:15:00 PM	Run finished at 11:15 PM
12/21/2010	11:25:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:25:30 PM	Recipe started at 11:25 PM
12/21/2010	11:25:30 PM	Helium valve closed
12/21/2010	11:25:30 PM	H2 valve closed
12/21/2010	11:25:30 PM	BCl3 valve closed
12/21/2010	11:25:30 PM	PH3 valve closed
12/21/2010	11:25:30 PM	SiCl4 pre valve closed
12/21/2010	11:25:30 PM	SiCl4 post valve closed
12/21/2010	11:25:30 PM	Main Vac valve closed
12/21/2010	11:25:30 PM	Bubbler valve closed
12/21/2010	11:25:30 PM	Bypass valve opened
12/21/2010	11:25:30 PM	Helium MFC set to  0.000000
12/21/2010	11:25:30 PM	H2 MFC set to  0.000000
12/21/2010	11:25:30 PM	BCl3 MFC set to  0.000000
12/21/2010	11:25:30 PM	PHl3 MFC set to  0.000000
12/21/2010	11:25:30 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:25:30 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:25:30 PM	Tube furnace set to 0
12/21/2010	11:26:28 PM	Helium valve closed
12/21/2010	11:26:28 PM	H2 valve closed
12/21/2010	11:26:28 PM	BCl3 valve closed
12/21/2010	11:26:28 PM	PH3 valve closed
12/21/2010	11:26:28 PM	SiCl4 pre valve closed
12/21/2010	11:26:28 PM	SiCl4 post valve closed
12/21/2010	11:26:28 PM	Bubbler valve closed
12/21/2010	11:26:28 PM	Main Vac valve opened
12/21/2010	11:26:28 PM	Bypass valve opened
12/21/2010	11:26:28 PM	Helium MFC set to  0.000000
12/21/2010	11:26:28 PM	H2 MFC set to  0.000000
12/21/2010	11:26:28 PM	BCl3 MFC set to  0.000000
12/21/2010	11:26:28 PM	PHl3 MFC set to  0.000000
12/21/2010	11:26:28 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:26:28 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:26:28 PM	Tube furnace set to 0
12/21/2010	11:26:28 PM	Run finished at 11:26 PM
12/21/2010	11:26:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:28:46 PM	Bypass valve closed
12/21/2010	11:28:47 PM	Main Vac valve closed
12/21/2010	11:29:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:29:15 PM	Recipe started at 11:29 PM
12/21/2010	11:29:15 PM	Helium valve closed
12/21/2010	11:29:15 PM	H2 valve closed
12/21/2010	11:29:15 PM	BCl3 valve closed
12/21/2010	11:29:15 PM	PH3 valve closed
12/21/2010	11:29:15 PM	SiCl4 pre valve closed
12/21/2010	11:29:15 PM	SiCl4 post valve closed
12/21/2010	11:29:15 PM	Main Vac valve closed
12/21/2010	11:29:15 PM	Bubbler valve closed
12/21/2010	11:29:15 PM	Bypass valve opened
12/21/2010	11:29:15 PM	Helium MFC set to  0.000000
12/21/2010	11:29:15 PM	H2 MFC set to  0.000000
12/21/2010	11:29:15 PM	BCl3 MFC set to  0.000000
12/21/2010	11:29:15 PM	PHl3 MFC set to  0.000000
12/21/2010	11:29:15 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:29:15 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:29:15 PM	Tube furnace set to 0
12/21/2010	11:29:15 PM	Helium valve closed
12/21/2010	11:29:15 PM	H2 valve closed
12/21/2010	11:29:15 PM	BCl3 valve closed
12/21/2010	11:29:15 PM	PH3 valve closed
12/21/2010	11:29:15 PM	SiCl4 pre valve closed
12/21/2010	11:29:15 PM	SiCl4 post valve closed
12/21/2010	11:29:15 PM	Bubbler valve closed
12/21/2010	11:29:15 PM	Main Vac valve opened
12/21/2010	11:29:15 PM	Bypass valve opened
12/21/2010	11:29:15 PM	Helium MFC set to  0.000000
12/21/2010	11:29:15 PM	H2 MFC set to  0.000000
12/21/2010	11:29:15 PM	BCl3 MFC set to  0.000000
12/21/2010	11:29:15 PM	PHl3 MFC set to  0.000000
12/21/2010	11:29:15 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:29:15 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:29:16 PM	Tube furnace set to 0
12/21/2010	11:29:16 PM	Run finished at 11:29 PM
12/21/2010	11:29:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:31:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	11:31:55 PM	Recipe started at 11:31 PM
12/21/2010	11:31:55 PM	Helium valve closed
12/21/2010	11:31:55 PM	H2 valve closed
12/21/2010	11:31:55 PM	BCl3 valve closed
12/21/2010	11:31:55 PM	PH3 valve closed
12/21/2010	11:31:55 PM	SiCl4 pre valve closed
12/21/2010	11:31:55 PM	SiCl4 post valve closed
12/21/2010	11:31:55 PM	Main Vac valve closed
12/21/2010	11:31:55 PM	Bubbler valve closed
12/21/2010	11:31:55 PM	Bypass valve opened
12/21/2010	11:31:55 PM	Helium MFC set to  0.000000
12/21/2010	11:31:55 PM	H2 MFC set to  0.000000
12/21/2010	11:31:55 PM	BCl3 MFC set to  0.000000
12/21/2010	11:31:55 PM	PHl3 MFC set to  0.000000
12/21/2010	11:31:55 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:31:55 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:31:55 PM	Tube furnace set to 0
12/21/2010	11:31:55 PM	Helium valve closed
12/21/2010	11:31:55 PM	H2 valve closed
12/21/2010	11:31:55 PM	BCl3 valve closed
12/21/2010	11:31:55 PM	PH3 valve closed
12/21/2010	11:31:55 PM	SiCl4 pre valve closed
12/21/2010	11:31:55 PM	SiCl4 post valve closed
12/21/2010	11:31:55 PM	Bubbler valve closed
12/21/2010	11:31:55 PM	Main Vac valve opened
12/21/2010	11:31:55 PM	Bypass valve opened
12/21/2010	11:31:55 PM	Helium MFC set to  0.000000
12/21/2010	11:31:55 PM	H2 MFC set to  0.000000
12/21/2010	11:31:55 PM	BCl3 MFC set to  0.000000
12/21/2010	11:31:55 PM	PHl3 MFC set to  0.000000
12/21/2010	11:31:55 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:31:55 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:31:56 PM	Tube furnace set to 0
12/21/2010	11:32:56 PM	H2 valve closed
12/21/2010	11:32:56 PM	BCl3 valve closed
12/21/2010	11:32:56 PM	PH3 valve closed
12/21/2010	11:32:56 PM	SiCl4 pre valve closed
12/21/2010	11:32:56 PM	SiCl4 post valve closed
12/21/2010	11:32:56 PM	Bubbler valve closed
12/21/2010	11:32:56 PM	Helium valve opened
12/21/2010	11:32:56 PM	Main Vac valve opened
12/21/2010	11:32:56 PM	Bypass valve opened
12/21/2010	11:32:56 PM	Helium MFC set to  100.000000
12/21/2010	11:32:56 PM	H2 MFC set to  0.000000
12/21/2010	11:32:56 PM	BCl3 MFC set to  0.000000
12/21/2010	11:32:56 PM	PHl3 MFC set to  0.000000
12/21/2010	11:32:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:32:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:32:56 PM	Tube furnace set to 0
12/21/2010	11:33:56 PM	Helium valve closed
12/21/2010	11:33:56 PM	H2 valve closed
12/21/2010	11:33:56 PM	BCl3 valve closed
12/21/2010	11:33:56 PM	PH3 valve closed
12/21/2010	11:33:56 PM	SiCl4 pre valve closed
12/21/2010	11:33:56 PM	SiCl4 post valve closed
12/21/2010	11:33:56 PM	Bubbler valve closed
12/21/2010	11:33:56 PM	Main Vac valve opened
12/21/2010	11:33:56 PM	Bypass valve opened
12/21/2010	11:33:56 PM	Helium MFC set to  0.000000
12/21/2010	11:33:56 PM	H2 MFC set to  0.000000
12/21/2010	11:33:56 PM	BCl3 MFC set to  0.000000
12/21/2010	11:33:56 PM	PHl3 MFC set to  0.000000
12/21/2010	11:33:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:33:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:33:56 PM	Tube furnace set to 0
12/21/2010	11:34:56 PM	H2 valve closed
12/21/2010	11:34:56 PM	BCl3 valve closed
12/21/2010	11:34:56 PM	PH3 valve closed
12/21/2010	11:34:56 PM	SiCl4 pre valve closed
12/21/2010	11:34:56 PM	SiCl4 post valve closed
12/21/2010	11:34:56 PM	Bubbler valve closed
12/21/2010	11:34:56 PM	Helium valve opened
12/21/2010	11:34:56 PM	Main Vac valve opened
12/21/2010	11:34:56 PM	Bypass valve opened
12/21/2010	11:34:56 PM	Helium MFC set to  100.000000
12/21/2010	11:34:56 PM	H2 MFC set to  0.000000
12/21/2010	11:34:56 PM	BCl3 MFC set to  0.000000
12/21/2010	11:34:56 PM	PHl3 MFC set to  0.000000
12/21/2010	11:34:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:34:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:34:56 PM	Tube furnace set to 0
12/21/2010	11:35:56 PM	Helium valve closed
12/21/2010	11:35:56 PM	H2 valve closed
12/21/2010	11:35:56 PM	BCl3 valve closed
12/21/2010	11:35:56 PM	PH3 valve closed
12/21/2010	11:35:56 PM	SiCl4 pre valve closed
12/21/2010	11:35:56 PM	SiCl4 post valve closed
12/21/2010	11:35:56 PM	Bubbler valve closed
12/21/2010	11:35:56 PM	Main Vac valve opened
12/21/2010	11:35:56 PM	Bypass valve opened
12/21/2010	11:35:56 PM	Helium MFC set to  0.000000
12/21/2010	11:35:56 PM	H2 MFC set to  0.000000
12/21/2010	11:35:56 PM	BCl3 MFC set to  0.000000
12/21/2010	11:35:56 PM	PHl3 MFC set to  0.000000
12/21/2010	11:35:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:35:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:35:56 PM	Tube furnace set to 0
12/21/2010	11:36:56 PM	H2 valve closed
12/21/2010	11:36:56 PM	BCl3 valve closed
12/21/2010	11:36:56 PM	PH3 valve closed
12/21/2010	11:36:56 PM	SiCl4 pre valve closed
12/21/2010	11:36:56 PM	SiCl4 post valve closed
12/21/2010	11:36:56 PM	Bubbler valve closed
12/21/2010	11:36:56 PM	Helium valve opened
12/21/2010	11:36:56 PM	Main Vac valve opened
12/21/2010	11:36:56 PM	Bypass valve opened
12/21/2010	11:36:56 PM	Helium MFC set to  100.000000
12/21/2010	11:36:56 PM	H2 MFC set to  0.000000
12/21/2010	11:36:56 PM	BCl3 MFC set to  0.000000
12/21/2010	11:36:56 PM	PHl3 MFC set to  0.000000
12/21/2010	11:36:56 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:36:56 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:36:57 PM	Tube furnace set to 0
12/21/2010	11:37:57 PM	Helium valve closed
12/21/2010	11:37:57 PM	H2 valve closed
12/21/2010	11:37:57 PM	BCl3 valve closed
12/21/2010	11:37:57 PM	PH3 valve closed
12/21/2010	11:37:57 PM	SiCl4 pre valve closed
12/21/2010	11:37:57 PM	SiCl4 post valve closed
12/21/2010	11:37:57 PM	Bubbler valve closed
12/21/2010	11:37:57 PM	Main Vac valve opened
12/21/2010	11:37:57 PM	Bypass valve opened
12/21/2010	11:37:57 PM	Helium MFC set to  0.000000
12/21/2010	11:37:57 PM	H2 MFC set to  0.000000
12/21/2010	11:37:57 PM	BCl3 MFC set to  0.000000
12/21/2010	11:37:57 PM	PHl3 MFC set to  0.000000
12/21/2010	11:37:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:37:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:37:57 PM	Tube furnace set to 0
12/21/2010	11:38:57 PM	H2 valve closed
12/21/2010	11:38:57 PM	BCl3 valve closed
12/21/2010	11:38:57 PM	PH3 valve closed
12/21/2010	11:38:57 PM	SiCl4 pre valve closed
12/21/2010	11:38:57 PM	SiCl4 post valve closed
12/21/2010	11:38:57 PM	Bubbler valve closed
12/21/2010	11:38:57 PM	Helium valve opened
12/21/2010	11:38:57 PM	Main Vac valve opened
12/21/2010	11:38:57 PM	Bypass valve opened
12/21/2010	11:38:57 PM	Helium MFC set to  100.000000
12/21/2010	11:38:57 PM	H2 MFC set to  0.000000
12/21/2010	11:38:57 PM	BCl3 MFC set to  0.000000
12/21/2010	11:38:57 PM	PHl3 MFC set to  0.000000
12/21/2010	11:38:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:38:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:38:57 PM	Tube furnace set to 0
12/21/2010	11:39:57 PM	Helium valve closed
12/21/2010	11:39:57 PM	H2 valve closed
12/21/2010	11:39:57 PM	BCl3 valve closed
12/21/2010	11:39:57 PM	PH3 valve closed
12/21/2010	11:39:57 PM	SiCl4 pre valve closed
12/21/2010	11:39:57 PM	SiCl4 post valve closed
12/21/2010	11:39:57 PM	Bubbler valve closed
12/21/2010	11:39:57 PM	Main Vac valve opened
12/21/2010	11:39:57 PM	Bypass valve opened
12/21/2010	11:39:57 PM	Helium MFC set to  0.000000
12/21/2010	11:39:57 PM	H2 MFC set to  0.000000
12/21/2010	11:39:57 PM	BCl3 MFC set to  0.000000
12/21/2010	11:39:57 PM	PHl3 MFC set to  0.000000
12/21/2010	11:39:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:39:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:39:57 PM	Tube furnace set to 0
12/21/2010	11:40:57 PM	H2 valve closed
12/21/2010	11:40:57 PM	BCl3 valve closed
12/21/2010	11:40:57 PM	PH3 valve closed
12/21/2010	11:40:57 PM	SiCl4 pre valve closed
12/21/2010	11:40:57 PM	SiCl4 post valve closed
12/21/2010	11:40:57 PM	Bubbler valve closed
12/21/2010	11:40:57 PM	Helium valve opened
12/21/2010	11:40:57 PM	Main Vac valve opened
12/21/2010	11:40:57 PM	Bypass valve opened
12/21/2010	11:40:57 PM	Helium MFC set to  100.000000
12/21/2010	11:40:57 PM	H2 MFC set to  0.000000
12/21/2010	11:40:57 PM	BCl3 MFC set to  0.000000
12/21/2010	11:40:57 PM	PHl3 MFC set to  0.000000
12/21/2010	11:40:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:40:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:40:57 PM	Tube furnace set to 0
12/21/2010	11:41:57 PM	Helium valve closed
12/21/2010	11:41:57 PM	H2 valve closed
12/21/2010	11:41:57 PM	BCl3 valve closed
12/21/2010	11:41:57 PM	PH3 valve closed
12/21/2010	11:41:57 PM	SiCl4 pre valve closed
12/21/2010	11:41:57 PM	SiCl4 post valve closed
12/21/2010	11:41:57 PM	Bubbler valve closed
12/21/2010	11:41:57 PM	Main Vac valve opened
12/21/2010	11:41:57 PM	Bypass valve opened
12/21/2010	11:41:57 PM	Helium MFC set to  0.000000
12/21/2010	11:41:57 PM	H2 MFC set to  0.000000
12/21/2010	11:41:57 PM	BCl3 MFC set to  0.000000
12/21/2010	11:41:57 PM	PHl3 MFC set to  0.000000
12/21/2010	11:41:57 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:41:57 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:41:58 PM	Tube furnace set to 0
12/21/2010	11:42:58 PM	H2 valve closed
12/21/2010	11:42:58 PM	BCl3 valve closed
12/21/2010	11:42:58 PM	PH3 valve closed
12/21/2010	11:42:58 PM	SiCl4 pre valve closed
12/21/2010	11:42:58 PM	SiCl4 post valve closed
12/21/2010	11:42:58 PM	Bubbler valve closed
12/21/2010	11:42:58 PM	Helium valve opened
12/21/2010	11:42:58 PM	Main Vac valve opened
12/21/2010	11:42:58 PM	Bypass valve opened
12/21/2010	11:42:58 PM	Helium MFC set to  100.000000
12/21/2010	11:42:58 PM	H2 MFC set to  0.000000
12/21/2010	11:42:58 PM	BCl3 MFC set to  0.000000
12/21/2010	11:42:58 PM	PHl3 MFC set to  0.000000
12/21/2010	11:42:58 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:42:58 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:42:58 PM	Tube furnace set to 0
12/21/2010	11:43:58 PM	Helium valve closed
12/21/2010	11:43:58 PM	H2 valve closed
12/21/2010	11:43:58 PM	BCl3 valve closed
12/21/2010	11:43:58 PM	PH3 valve closed
12/21/2010	11:43:58 PM	SiCl4 pre valve closed
12/21/2010	11:43:58 PM	SiCl4 post valve closed
12/21/2010	11:43:58 PM	Bubbler valve closed
12/21/2010	11:43:58 PM	Main Vac valve opened
12/21/2010	11:43:58 PM	Bypass valve opened
12/21/2010	11:43:58 PM	Helium MFC set to  0.000000
12/21/2010	11:43:58 PM	H2 MFC set to  0.000000
12/21/2010	11:43:58 PM	BCl3 MFC set to  0.000000
12/21/2010	11:43:58 PM	PHl3 MFC set to  0.000000
12/21/2010	11:43:58 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:43:58 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:43:58 PM	Tube furnace set to 0
12/21/2010	11:44:58 PM	H2 valve closed
12/21/2010	11:44:58 PM	BCl3 valve closed
12/21/2010	11:44:58 PM	PH3 valve closed
12/21/2010	11:44:58 PM	SiCl4 pre valve closed
12/21/2010	11:44:58 PM	SiCl4 post valve closed
12/21/2010	11:44:58 PM	Bubbler valve closed
12/21/2010	11:44:58 PM	Helium valve opened
12/21/2010	11:44:58 PM	Main Vac valve opened
12/21/2010	11:44:58 PM	Bypass valve opened
12/21/2010	11:44:58 PM	Helium MFC set to  100.000000
12/21/2010	11:44:58 PM	H2 MFC set to  0.000000
12/21/2010	11:44:58 PM	BCl3 MFC set to  0.000000
12/21/2010	11:44:58 PM	PHl3 MFC set to  0.000000
12/21/2010	11:44:58 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:44:58 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:44:58 PM	Tube furnace set to 0
12/21/2010	11:45:21 PM	Run aborted at 11:45 PM
12/21/2010	11:45:21 PM	Helium valve closed
12/21/2010	11:45:21 PM	H2 valve closed
12/21/2010	11:45:21 PM	BCl3 valve closed
12/21/2010	11:45:21 PM	PH3 valve closed
12/21/2010	11:45:21 PM	SiCl4 pre valve closed
12/21/2010	11:45:21 PM	SiCl4 post valve closed
12/21/2010	11:45:21 PM	Bypass valve closed
12/21/2010	11:45:21 PM	Main Vac valve closed
12/21/2010	11:45:21 PM	Bubbler valve closed
12/21/2010	11:45:21 PM	Helium MFC set to  0.000000
12/21/2010	11:45:21 PM	H2 MFC set to  0.000000
12/21/2010	11:45:21 PM	BCl3 MFC set to  0.000000
12/21/2010	11:45:21 PM	PHl3 MFC set to  0.000000
12/21/2010	11:45:21 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:45:21 PM	Tube furnace set to 0
12/21/2010	11:45:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	11:45:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:45:22 PM	Recipe started at 11:45 PM
12/21/2010	11:45:22 PM	Helium valve closed
12/21/2010	11:45:22 PM	H2 valve closed
12/21/2010	11:45:22 PM	BCl3 valve closed
12/21/2010	11:45:22 PM	PH3 valve closed
12/21/2010	11:45:22 PM	SiCl4 pre valve closed
12/21/2010	11:45:22 PM	SiCl4 post valve closed
12/21/2010	11:45:22 PM	Main Vac valve closed
12/21/2010	11:45:22 PM	Bubbler valve closed
12/21/2010	11:45:22 PM	Bypass valve opened
12/21/2010	11:45:22 PM	Helium MFC set to  0.000000
12/21/2010	11:45:22 PM	H2 MFC set to  0.000000
12/21/2010	11:45:22 PM	BCl3 MFC set to  0.000000
12/21/2010	11:45:22 PM	PHl3 MFC set to  0.000000
12/21/2010	11:45:22 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:45:22 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:45:22 PM	Tube furnace set to 0
12/21/2010	11:45:23 PM	Helium valve closed
12/21/2010	11:45:23 PM	H2 valve closed
12/21/2010	11:45:23 PM	BCl3 valve closed
12/21/2010	11:45:23 PM	PH3 valve closed
12/21/2010	11:45:23 PM	SiCl4 pre valve closed
12/21/2010	11:45:23 PM	SiCl4 post valve closed
12/21/2010	11:45:23 PM	Bubbler valve closed
12/21/2010	11:45:23 PM	Main Vac valve opened
12/21/2010	11:45:23 PM	Bypass valve opened
12/21/2010	11:45:23 PM	Helium MFC set to  0.000000
12/21/2010	11:45:23 PM	H2 MFC set to  0.000000
12/21/2010	11:45:23 PM	BCl3 MFC set to  0.000000
12/21/2010	11:45:23 PM	PHl3 MFC set to  0.000000
12/21/2010	11:45:23 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:45:23 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:45:23 PM	Tube furnace set to 0
12/21/2010	11:45:23 PM	Run finished at 11:45 PM
12/21/2010	11:45:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/21/2010	11:45:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/21/2010	11:45:38 PM	Recipe started at 11:45 PM
12/21/2010	11:45:38 PM	Helium valve closed
12/21/2010	11:45:38 PM	H2 valve closed
12/21/2010	11:45:38 PM	BCl3 valve closed
12/21/2010	11:45:38 PM	PH3 valve closed
12/21/2010	11:45:38 PM	SiCl4 pre valve closed
12/21/2010	11:45:38 PM	SiCl4 post valve closed
12/21/2010	11:45:38 PM	Main Vac valve closed
12/21/2010	11:45:38 PM	Bubbler valve closed
12/21/2010	11:45:38 PM	Bypass valve opened
12/21/2010	11:45:38 PM	Helium MFC set to  0.000000
12/21/2010	11:45:38 PM	H2 MFC set to  0.000000
12/21/2010	11:45:38 PM	BCl3 MFC set to  0.000000
12/21/2010	11:45:38 PM	PHl3 MFC set to  0.000000
12/21/2010	11:45:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:45:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:45:38 PM	Tube furnace set to 0
12/21/2010	11:45:38 PM	Helium valve closed
12/21/2010	11:45:38 PM	H2 valve closed
12/21/2010	11:45:38 PM	BCl3 valve closed
12/21/2010	11:45:38 PM	PH3 valve closed
12/21/2010	11:45:38 PM	SiCl4 pre valve closed
12/21/2010	11:45:38 PM	SiCl4 post valve closed
12/21/2010	11:45:38 PM	Bubbler valve closed
12/21/2010	11:45:38 PM	Main Vac valve opened
12/21/2010	11:45:38 PM	Bypass valve opened
12/21/2010	11:45:38 PM	Helium MFC set to  0.000000
12/21/2010	11:45:38 PM	H2 MFC set to  0.000000
12/21/2010	11:45:38 PM	BCl3 MFC set to  0.000000
12/21/2010	11:45:38 PM	PHl3 MFC set to  0.000000
12/21/2010	11:45:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:45:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:45:38 PM	Tube furnace set to 0
12/21/2010	11:46:38 PM	H2 valve closed
12/21/2010	11:46:38 PM	BCl3 valve closed
12/21/2010	11:46:38 PM	PH3 valve closed
12/21/2010	11:46:38 PM	SiCl4 pre valve closed
12/21/2010	11:46:38 PM	SiCl4 post valve closed
12/21/2010	11:46:38 PM	Bubbler valve closed
12/21/2010	11:46:38 PM	Helium valve opened
12/21/2010	11:46:38 PM	Main Vac valve opened
12/21/2010	11:46:38 PM	Bypass valve opened
12/21/2010	11:46:38 PM	Helium MFC set to  100.000000
12/21/2010	11:46:38 PM	H2 MFC set to  0.000000
12/21/2010	11:46:38 PM	BCl3 MFC set to  0.000000
12/21/2010	11:46:38 PM	PHl3 MFC set to  0.000000
12/21/2010	11:46:38 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:46:38 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:46:39 PM	Tube furnace set to 0
12/21/2010	11:47:39 PM	Helium valve closed
12/21/2010	11:47:39 PM	H2 valve closed
12/21/2010	11:47:39 PM	BCl3 valve closed
12/21/2010	11:47:39 PM	PH3 valve closed
12/21/2010	11:47:39 PM	SiCl4 pre valve closed
12/21/2010	11:47:39 PM	SiCl4 post valve closed
12/21/2010	11:47:39 PM	Bubbler valve closed
12/21/2010	11:47:39 PM	Main Vac valve opened
12/21/2010	11:47:39 PM	Bypass valve opened
12/21/2010	11:47:39 PM	Helium MFC set to  0.000000
12/21/2010	11:47:39 PM	H2 MFC set to  0.000000
12/21/2010	11:47:39 PM	BCl3 MFC set to  0.000000
12/21/2010	11:47:39 PM	PHl3 MFC set to  0.000000
12/21/2010	11:47:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:47:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:47:39 PM	Tube furnace set to 0
12/21/2010	11:48:39 PM	H2 valve closed
12/21/2010	11:48:39 PM	BCl3 valve closed
12/21/2010	11:48:39 PM	PH3 valve closed
12/21/2010	11:48:39 PM	SiCl4 pre valve closed
12/21/2010	11:48:39 PM	SiCl4 post valve closed
12/21/2010	11:48:39 PM	Bubbler valve closed
12/21/2010	11:48:39 PM	Helium valve opened
12/21/2010	11:48:39 PM	Main Vac valve opened
12/21/2010	11:48:39 PM	Bypass valve opened
12/21/2010	11:48:39 PM	Helium MFC set to  100.000000
12/21/2010	11:48:39 PM	H2 MFC set to  0.000000
12/21/2010	11:48:39 PM	BCl3 MFC set to  0.000000
12/21/2010	11:48:39 PM	PHl3 MFC set to  0.000000
12/21/2010	11:48:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:48:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:48:39 PM	Tube furnace set to 0
12/21/2010	11:49:39 PM	Helium valve closed
12/21/2010	11:49:39 PM	H2 valve closed
12/21/2010	11:49:39 PM	BCl3 valve closed
12/21/2010	11:49:39 PM	PH3 valve closed
12/21/2010	11:49:39 PM	SiCl4 pre valve closed
12/21/2010	11:49:39 PM	SiCl4 post valve closed
12/21/2010	11:49:39 PM	Bubbler valve closed
12/21/2010	11:49:39 PM	Main Vac valve opened
12/21/2010	11:49:39 PM	Bypass valve opened
12/21/2010	11:49:39 PM	Helium MFC set to  0.000000
12/21/2010	11:49:39 PM	H2 MFC set to  0.000000
12/21/2010	11:49:39 PM	BCl3 MFC set to  0.000000
12/21/2010	11:49:39 PM	PHl3 MFC set to  0.000000
12/21/2010	11:49:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:49:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:49:39 PM	Tube furnace set to 0
12/21/2010	11:50:39 PM	H2 valve closed
12/21/2010	11:50:39 PM	BCl3 valve closed
12/21/2010	11:50:39 PM	PH3 valve closed
12/21/2010	11:50:39 PM	SiCl4 pre valve closed
12/21/2010	11:50:39 PM	SiCl4 post valve closed
12/21/2010	11:50:39 PM	Bubbler valve closed
12/21/2010	11:50:39 PM	Helium valve opened
12/21/2010	11:50:39 PM	Main Vac valve opened
12/21/2010	11:50:39 PM	Bypass valve opened
12/21/2010	11:50:39 PM	Helium MFC set to  100.000000
12/21/2010	11:50:39 PM	H2 MFC set to  0.000000
12/21/2010	11:50:39 PM	BCl3 MFC set to  0.000000
12/21/2010	11:50:39 PM	PHl3 MFC set to  0.000000
12/21/2010	11:50:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:50:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:50:39 PM	Tube furnace set to 0
12/21/2010	11:51:39 PM	Helium valve closed
12/21/2010	11:51:39 PM	H2 valve closed
12/21/2010	11:51:39 PM	BCl3 valve closed
12/21/2010	11:51:39 PM	PH3 valve closed
12/21/2010	11:51:39 PM	SiCl4 pre valve closed
12/21/2010	11:51:39 PM	SiCl4 post valve closed
12/21/2010	11:51:39 PM	Bubbler valve closed
12/21/2010	11:51:39 PM	Main Vac valve opened
12/21/2010	11:51:39 PM	Bypass valve opened
12/21/2010	11:51:39 PM	Helium MFC set to  0.000000
12/21/2010	11:51:39 PM	H2 MFC set to  0.000000
12/21/2010	11:51:39 PM	BCl3 MFC set to  0.000000
12/21/2010	11:51:39 PM	PHl3 MFC set to  0.000000
12/21/2010	11:51:39 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:51:39 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:51:40 PM	Tube furnace set to 0
12/21/2010	11:52:40 PM	H2 valve closed
12/21/2010	11:52:40 PM	BCl3 valve closed
12/21/2010	11:52:40 PM	PH3 valve closed
12/21/2010	11:52:40 PM	SiCl4 pre valve closed
12/21/2010	11:52:40 PM	SiCl4 post valve closed
12/21/2010	11:52:40 PM	Bubbler valve closed
12/21/2010	11:52:40 PM	Helium valve opened
12/21/2010	11:52:40 PM	Main Vac valve opened
12/21/2010	11:52:40 PM	Bypass valve opened
12/21/2010	11:52:40 PM	Helium MFC set to  100.000000
12/21/2010	11:52:40 PM	H2 MFC set to  0.000000
12/21/2010	11:52:40 PM	BCl3 MFC set to  0.000000
12/21/2010	11:52:40 PM	PHl3 MFC set to  0.000000
12/21/2010	11:52:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:52:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:52:40 PM	Tube furnace set to 0
12/21/2010	11:53:40 PM	Helium valve closed
12/21/2010	11:53:40 PM	H2 valve closed
12/21/2010	11:53:40 PM	BCl3 valve closed
12/21/2010	11:53:40 PM	PH3 valve closed
12/21/2010	11:53:40 PM	SiCl4 pre valve closed
12/21/2010	11:53:40 PM	SiCl4 post valve closed
12/21/2010	11:53:40 PM	Bubbler valve closed
12/21/2010	11:53:40 PM	Main Vac valve opened
12/21/2010	11:53:40 PM	Bypass valve opened
12/21/2010	11:53:40 PM	Helium MFC set to  0.000000
12/21/2010	11:53:40 PM	H2 MFC set to  0.000000
12/21/2010	11:53:40 PM	BCl3 MFC set to  0.000000
12/21/2010	11:53:40 PM	PHl3 MFC set to  0.000000
12/21/2010	11:53:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:53:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:53:40 PM	Tube furnace set to 0
12/21/2010	11:54:40 PM	H2 valve closed
12/21/2010	11:54:40 PM	BCl3 valve closed
12/21/2010	11:54:40 PM	PH3 valve closed
12/21/2010	11:54:40 PM	SiCl4 pre valve closed
12/21/2010	11:54:40 PM	SiCl4 post valve closed
12/21/2010	11:54:40 PM	Bubbler valve closed
12/21/2010	11:54:40 PM	Helium valve opened
12/21/2010	11:54:40 PM	Main Vac valve opened
12/21/2010	11:54:40 PM	Bypass valve opened
12/21/2010	11:54:40 PM	Helium MFC set to  100.000000
12/21/2010	11:54:40 PM	H2 MFC set to  0.000000
12/21/2010	11:54:40 PM	BCl3 MFC set to  0.000000
12/21/2010	11:54:40 PM	PHl3 MFC set to  0.000000
12/21/2010	11:54:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:54:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:54:40 PM	Tube furnace set to 0
12/21/2010	11:55:40 PM	Helium valve closed
12/21/2010	11:55:40 PM	H2 valve closed
12/21/2010	11:55:40 PM	BCl3 valve closed
12/21/2010	11:55:40 PM	PH3 valve closed
12/21/2010	11:55:40 PM	SiCl4 pre valve closed
12/21/2010	11:55:40 PM	SiCl4 post valve closed
12/21/2010	11:55:40 PM	Bubbler valve closed
12/21/2010	11:55:40 PM	Main Vac valve opened
12/21/2010	11:55:40 PM	Bypass valve opened
12/21/2010	11:55:40 PM	Helium MFC set to  0.000000
12/21/2010	11:55:40 PM	H2 MFC set to  0.000000
12/21/2010	11:55:40 PM	BCl3 MFC set to  0.000000
12/21/2010	11:55:40 PM	PHl3 MFC set to  0.000000
12/21/2010	11:55:40 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:55:40 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:55:40 PM	Tube furnace set to 0
12/21/2010	11:56:40 PM	H2 valve closed
12/21/2010	11:56:40 PM	BCl3 valve closed
12/21/2010	11:56:40 PM	PH3 valve closed
12/21/2010	11:56:41 PM	SiCl4 pre valve closed
12/21/2010	11:56:41 PM	SiCl4 post valve closed
12/21/2010	11:56:41 PM	Bubbler valve closed
12/21/2010	11:56:41 PM	Helium valve opened
12/21/2010	11:56:41 PM	Main Vac valve opened
12/21/2010	11:56:41 PM	Bypass valve opened
12/21/2010	11:56:41 PM	Helium MFC set to  100.000000
12/21/2010	11:56:41 PM	H2 MFC set to  0.000000
12/21/2010	11:56:41 PM	BCl3 MFC set to  0.000000
12/21/2010	11:56:41 PM	PHl3 MFC set to  0.000000
12/21/2010	11:56:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:56:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:56:41 PM	Tube furnace set to 0
12/21/2010	11:57:41 PM	Helium valve closed
12/21/2010	11:57:41 PM	H2 valve closed
12/21/2010	11:57:41 PM	BCl3 valve closed
12/21/2010	11:57:41 PM	PH3 valve closed
12/21/2010	11:57:41 PM	SiCl4 pre valve closed
12/21/2010	11:57:41 PM	SiCl4 post valve closed
12/21/2010	11:57:41 PM	Bubbler valve closed
12/21/2010	11:57:41 PM	Main Vac valve opened
12/21/2010	11:57:41 PM	Bypass valve opened
12/21/2010	11:57:41 PM	Helium MFC set to  0.000000
12/21/2010	11:57:41 PM	H2 MFC set to  0.000000
12/21/2010	11:57:41 PM	BCl3 MFC set to  0.000000
12/21/2010	11:57:41 PM	PHl3 MFC set to  0.000000
12/21/2010	11:57:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:57:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:57:41 PM	Tube furnace set to 0
12/21/2010	11:58:41 PM	H2 valve closed
12/21/2010	11:58:41 PM	BCl3 valve closed
12/21/2010	11:58:41 PM	PH3 valve closed
12/21/2010	11:58:41 PM	SiCl4 pre valve closed
12/21/2010	11:58:41 PM	SiCl4 post valve closed
12/21/2010	11:58:41 PM	Bubbler valve closed
12/21/2010	11:58:41 PM	Helium valve opened
12/21/2010	11:58:41 PM	Main Vac valve opened
12/21/2010	11:58:41 PM	Bypass valve opened
12/21/2010	11:58:41 PM	Helium MFC set to  100.000000
12/21/2010	11:58:41 PM	H2 MFC set to  0.000000
12/21/2010	11:58:41 PM	BCl3 MFC set to  0.000000
12/21/2010	11:58:41 PM	PHl3 MFC set to  0.000000
12/21/2010	11:58:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:58:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:58:41 PM	Tube furnace set to 0
12/21/2010	11:59:41 PM	Helium valve closed
12/21/2010	11:59:41 PM	H2 valve closed
12/21/2010	11:59:41 PM	BCl3 valve closed
12/21/2010	11:59:41 PM	PH3 valve closed
12/21/2010	11:59:41 PM	SiCl4 pre valve closed
12/21/2010	11:59:41 PM	SiCl4 post valve closed
12/21/2010	11:59:41 PM	Bubbler valve closed
12/21/2010	11:59:41 PM	Main Vac valve opened
12/21/2010	11:59:41 PM	Bypass valve opened
12/21/2010	11:59:41 PM	Helium MFC set to  0.000000
12/21/2010	11:59:41 PM	H2 MFC set to  0.000000
12/21/2010	11:59:41 PM	BCl3 MFC set to  0.000000
12/21/2010	11:59:41 PM	PHl3 MFC set to  0.000000
12/21/2010	11:59:41 PM	SiCl4 MFC set to  0.000000
12/21/2010	11:59:41 PM	Bypass solenoid MFC set to  0.000000
12/21/2010	11:59:41 PM	Tube furnace set to 0
